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- W2074300498 abstract "The system configuration and printing-based fabrication technology of distributed MEMS are discussed using our research trials related to those aspects. Based on the concept of autonomous distributed system (ADS), we have constructed and operated a smart conveyer using micro nozzle arrays. We also applied printing technology to fabricate a kind of distributed MEMS, i.e. a flexible display consisting of movable Fabry-Perot interferometers." @default.
- W2074300498 created "2016-06-24" @default.
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- W2074300498 date "2010-06-01" @default.
- W2074300498 modified "2023-09-30" @default.
- W2074300498 title "System Configuration and Fabrication Technology for Distributed MEMS" @default.
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- W2074300498 doi "https://doi.org/10.1109/dmems.2010.23" @default.
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