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• W2074383012 abstract "The species and ion charge state evolution of a pulsed cathodic arc plasma was investigated at different pressures. A zirconium cathode was operated in a nitrogen environment, and the plasma composition was analyzed by time-of-flight charge-to-mass spectrometry. Large plasma chemistry changes were detected with respect to time and pressure. The 250μs plasma pulse can be divided in two characteristic phases: a transient phase before 150μs and a steady state phase for all later times. The measured changes in plasma chemistry in the transient phase at p∼10−5Torr are explained by charge transfer collisions, while the increasing N+ fraction in the p&gt;10−5Torr range most likely originates from erosion of the nitrided cathode surface. In the steady-state phase, a pressure-induced change from higher to lower charge states was observed, which was mainly due to scattering of self-sputtered metal followed by metal ion-atom charge exchange collisions. These results are of importance for understanding the evolution of thin film composition and microstructure during reactive plasma deposition." @default.
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• W2074383012 date "2004-10-28" @default.
• W2074383012 modified "2023-09-23" @default.
• W2074383012 title "Charge state and time resolved plasma composition of a pulsed zirconium arc in a nitrogen environment" @default.
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• W2074383012 doi "https://doi.org/10.1063/1.1803627" @default.
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