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- W2074388767 abstract "Resolution enhancement techniques and higher NA exposure are employed to meet the lithography requirements imposed by aggressive shrinks to chip feature sizes. For certain critical levels, like storage and isolation patterning of DRAM devices, the capability to exactly reproduce the mask layout is limited. Severe corner rounding and line image shortening can occur. Such phenomena can be significant contributors to side effects like current leakage, inadequate retention time, stress, and perhaps yield loss. Our development work has shown that the use of Serif and Hammerhead structures can improve resolution printing. Moreover, better process latitude and CD control can be achieved. This paper gives an overview of these innovative techniques. It includes the consideration of different design layouts based on simulations, as well as mask making limitations e.g. mask inspection capability. The benefits of these techniques are discussed and illustrated with detailed lithographic performance data and SEM pictures." @default.
- W2074388767 created "2016-06-24" @default.
- W2074388767 creator A5055905384 @default.
- W2074388767 creator A5060995960 @default.
- W2074388767 creator A5078109063 @default.
- W2074388767 creator A5083396616 @default.
- W2074388767 creator A5086643385 @default.
- W2074388767 date "2000-08-18" @default.
- W2074388767 modified "2023-10-18" @default.
- W2074388767 title "Advanced lithography kits: serifs and hammerhead" @default.
- W2074388767 doi "https://doi.org/10.1117/12.395715" @default.
- W2074388767 hasPublicationYear "2000" @default.
- W2074388767 type Work @default.
- W2074388767 sameAs 2074388767 @default.
- W2074388767 citedByCount "0" @default.
- W2074388767 crossrefType "proceedings-article" @default.
- W2074388767 hasAuthorship W2074388767A5055905384 @default.
- W2074388767 hasAuthorship W2074388767A5060995960 @default.
- W2074388767 hasAuthorship W2074388767A5078109063 @default.
- W2074388767 hasAuthorship W2074388767A5083396616 @default.
- W2074388767 hasAuthorship W2074388767A5086643385 @default.
- W2074388767 hasConcept C111919701 @default.
- W2074388767 hasConcept C127413603 @default.
- W2074388767 hasConcept C136625980 @default.
- W2074388767 hasConcept C139719470 @default.
- W2074388767 hasConcept C142362112 @default.
- W2074388767 hasConcept C153349607 @default.
- W2074388767 hasConcept C162324750 @default.
- W2074388767 hasConcept C165005293 @default.
- W2074388767 hasConcept C171250308 @default.
- W2074388767 hasConcept C192562407 @default.
- W2074388767 hasConcept C204223013 @default.
- W2074388767 hasConcept C24326235 @default.
- W2074388767 hasConcept C2777042071 @default.
- W2074388767 hasConcept C2777402240 @default.
- W2074388767 hasConcept C2777441419 @default.
- W2074388767 hasConcept C2779227376 @default.
- W2074388767 hasConcept C41008148 @default.
- W2074388767 hasConcept C49040817 @default.
- W2074388767 hasConcept C53524968 @default.
- W2074388767 hasConcept C7366592 @default.
- W2074388767 hasConcept C76155785 @default.
- W2074388767 hasConcept C9390403 @default.
- W2074388767 hasConceptScore W2074388767C111919701 @default.
- W2074388767 hasConceptScore W2074388767C127413603 @default.
- W2074388767 hasConceptScore W2074388767C136625980 @default.
- W2074388767 hasConceptScore W2074388767C139719470 @default.
- W2074388767 hasConceptScore W2074388767C142362112 @default.
- W2074388767 hasConceptScore W2074388767C153349607 @default.
- W2074388767 hasConceptScore W2074388767C162324750 @default.
- W2074388767 hasConceptScore W2074388767C165005293 @default.
- W2074388767 hasConceptScore W2074388767C171250308 @default.
- W2074388767 hasConceptScore W2074388767C192562407 @default.
- W2074388767 hasConceptScore W2074388767C204223013 @default.
- W2074388767 hasConceptScore W2074388767C24326235 @default.
- W2074388767 hasConceptScore W2074388767C2777042071 @default.
- W2074388767 hasConceptScore W2074388767C2777402240 @default.
- W2074388767 hasConceptScore W2074388767C2777441419 @default.
- W2074388767 hasConceptScore W2074388767C2779227376 @default.
- W2074388767 hasConceptScore W2074388767C41008148 @default.
- W2074388767 hasConceptScore W2074388767C49040817 @default.
- W2074388767 hasConceptScore W2074388767C53524968 @default.
- W2074388767 hasConceptScore W2074388767C7366592 @default.
- W2074388767 hasConceptScore W2074388767C76155785 @default.
- W2074388767 hasConceptScore W2074388767C9390403 @default.
- W2074388767 hasLocation W20743887671 @default.
- W2074388767 hasOpenAccess W2074388767 @default.
- W2074388767 hasPrimaryLocation W20743887671 @default.
- W2074388767 hasRelatedWork W1964532777 @default.
- W2074388767 hasRelatedWork W2011378103 @default.
- W2074388767 hasRelatedWork W2011738660 @default.
- W2074388767 hasRelatedWork W2016135791 @default.
- W2074388767 hasRelatedWork W2020137626 @default.
- W2074388767 hasRelatedWork W2032165152 @default.
- W2074388767 hasRelatedWork W2058223959 @default.
- W2074388767 hasRelatedWork W2068212059 @default.
- W2074388767 hasRelatedWork W2079136130 @default.
- W2074388767 hasRelatedWork W2087012915 @default.
- W2074388767 isParatext "false" @default.
- W2074388767 isRetracted "false" @default.
- W2074388767 magId "2074388767" @default.
- W2074388767 workType "article" @default.