Matches in SemOpenAlex for { <https://semopenalex.org/work/W2074440012> ?p ?o ?g. }
- W2074440012 endingPage "7" @default.
- W2074440012 startingPage "1" @default.
- W2074440012 abstract "This paper presents a novel X–Y dual axis sensitive sensor for static electric field measurement. Compared with the existent electric field micro sensors, which can only detect one axial direction electric field, this sensor is capable of two-dimensional electric field sensing. In the design of the micro sensor, the combination of angular comb-drives and serpentine springs can bring the advantage of achieving large in-plane rotation, which enlarges the vibration amplitudes and results in more induced charges. Moreover, the push–pull electrostatic actuation method and the adopted differential sensing electrodes both can reduce the impact of common mode interference. Two pairs of sensing elements are located differentially to form a cross-like shape, with each pair to get X and Y component of the electric field respectively. Experimental results agree well with the electric field calibration theory and show high measurement accuracy. In the range from 0 to 25 kV/m, the errors of electric field value are better than 8%." @default.
- W2074440012 created "2016-06-24" @default.
- W2074440012 creator A5029529208 @default.
- W2074440012 creator A5036748512 @default.
- W2074440012 creator A5041822714 @default.
- W2074440012 creator A5056234542 @default.
- W2074440012 creator A5067483347 @default.
- W2074440012 creator A5079594267 @default.
- W2074440012 creator A5084685662 @default.
- W2074440012 date "2015-06-01" @default.
- W2074440012 modified "2023-10-18" @default.
- W2074440012 title "A novel micro electric field sensor with X–Y dual axis sensitive differential structure" @default.
- W2074440012 cites W1972997521 @default.
- W2074440012 cites W1992596247 @default.
- W2074440012 cites W2015039727 @default.
- W2074440012 cites W2015217959 @default.
- W2074440012 cites W2020614728 @default.
- W2074440012 cites W2022695621 @default.
- W2074440012 cites W2025320608 @default.
- W2074440012 cites W2039560292 @default.
- W2074440012 cites W2043757791 @default.
- W2074440012 cites W2043981527 @default.
- W2074440012 cites W2062973760 @default.
- W2074440012 cites W2072719414 @default.
- W2074440012 cites W2089870281 @default.
- W2074440012 cites W2125144508 @default.
- W2074440012 cites W2127447759 @default.
- W2074440012 cites W2135321193 @default.
- W2074440012 cites W2154793390 @default.
- W2074440012 cites W2158763378 @default.
- W2074440012 cites W2164310740 @default.
- W2074440012 cites W2169770845 @default.
- W2074440012 cites W2171726171 @default.
- W2074440012 cites W2320531996 @default.
- W2074440012 doi "https://doi.org/10.1016/j.sna.2015.03.013" @default.
- W2074440012 hasPublicationYear "2015" @default.
- W2074440012 type Work @default.
- W2074440012 sameAs 2074440012 @default.
- W2074440012 citedByCount "10" @default.
- W2074440012 countsByYear W20744400122017 @default.
- W2074440012 countsByYear W20744400122018 @default.
- W2074440012 countsByYear W20744400122019 @default.
- W2074440012 countsByYear W20744400122020 @default.
- W2074440012 countsByYear W20744400122021 @default.
- W2074440012 crossrefType "journal-article" @default.
- W2074440012 hasAuthorship W2074440012A5029529208 @default.
- W2074440012 hasAuthorship W2074440012A5036748512 @default.
- W2074440012 hasAuthorship W2074440012A5041822714 @default.
- W2074440012 hasAuthorship W2074440012A5056234542 @default.
- W2074440012 hasAuthorship W2074440012A5067483347 @default.
- W2074440012 hasAuthorship W2074440012A5079594267 @default.
- W2074440012 hasAuthorship W2074440012A5084685662 @default.
- W2074440012 hasConcept C119599485 @default.
- W2074440012 hasConcept C120665830 @default.
- W2074440012 hasConcept C121332964 @default.
- W2074440012 hasConcept C127162648 @default.
- W2074440012 hasConcept C127413603 @default.
- W2074440012 hasConcept C154945302 @default.
- W2074440012 hasConcept C180205008 @default.
- W2074440012 hasConcept C202444582 @default.
- W2074440012 hasConcept C24890656 @default.
- W2074440012 hasConcept C32022120 @default.
- W2074440012 hasConcept C33923547 @default.
- W2074440012 hasConcept C41008148 @default.
- W2074440012 hasConcept C60799052 @default.
- W2074440012 hasConcept C62520636 @default.
- W2074440012 hasConcept C74050887 @default.
- W2074440012 hasConcept C9652623 @default.
- W2074440012 hasConceptScore W2074440012C119599485 @default.
- W2074440012 hasConceptScore W2074440012C120665830 @default.
- W2074440012 hasConceptScore W2074440012C121332964 @default.
- W2074440012 hasConceptScore W2074440012C127162648 @default.
- W2074440012 hasConceptScore W2074440012C127413603 @default.
- W2074440012 hasConceptScore W2074440012C154945302 @default.
- W2074440012 hasConceptScore W2074440012C180205008 @default.
- W2074440012 hasConceptScore W2074440012C202444582 @default.
- W2074440012 hasConceptScore W2074440012C24890656 @default.
- W2074440012 hasConceptScore W2074440012C32022120 @default.
- W2074440012 hasConceptScore W2074440012C33923547 @default.
- W2074440012 hasConceptScore W2074440012C41008148 @default.
- W2074440012 hasConceptScore W2074440012C60799052 @default.
- W2074440012 hasConceptScore W2074440012C62520636 @default.
- W2074440012 hasConceptScore W2074440012C74050887 @default.
- W2074440012 hasConceptScore W2074440012C9652623 @default.
- W2074440012 hasFunder F4320321001 @default.
- W2074440012 hasLocation W20744400121 @default.
- W2074440012 hasOpenAccess W2074440012 @default.
- W2074440012 hasPrimaryLocation W20744400121 @default.
- W2074440012 hasRelatedWork W1514665570 @default.
- W2074440012 hasRelatedWork W1575077847 @default.
- W2074440012 hasRelatedWork W1915053000 @default.
- W2074440012 hasRelatedWork W1975294500 @default.
- W2074440012 hasRelatedWork W1983290920 @default.
- W2074440012 hasRelatedWork W2025232597 @default.
- W2074440012 hasRelatedWork W2065958818 @default.
- W2074440012 hasRelatedWork W2076665077 @default.
- W2074440012 hasRelatedWork W2160293638 @default.
- W2074440012 hasRelatedWork W3098944634 @default.