FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2074518562> ?p ?o ?g. }

• W2074518562 endingPage "1456" @default.
• W2074518562 startingPage "1452" @default.
• W2074518562 abstract "Radio frequency (RF) plasma enhanced chemical vapour deposition (PECVD) technique was used to make a diamond like carbon (DLC) coating on silicon (100) substrate. The deposition was carried out using C2H2 as the process gas, at different temperatures, 25 °C (room temperature) and 300 °C with constant power and flow rate. Characterization techniques such as ellipsometry and Raman spectroscopy were used to characterize these samples. Raman analysis of DLC coatings at different temperature is carried out in detail for two different excitation wavelengths i.e. 514 and 785 nm and, results are presented in the paper. Blue-shiftis observed in both D and G peaks of Raman spectrum with increase in deposition temperature, which indicates the formation of compressive strain in high temperature deposited DLC coatings. Dispersion in both D and G peaks is observed for different excitation wavelength suggesting that the coating is hydrogenated DLC. The degree of hydrogenation of the DLC coating appears to decrease with respect to the deposition temperature. Nano-indentation study shows a marginal increase in hardness with increase in deposition temperature." @default.
• W2074518562 created "2016-06-24" @default.
• W2074518562 creator A5006691023 @default.
• W2074518562 creator A5013228746 @default.
• W2074518562 creator A5022891421 @default.
• W2074518562 creator A5027591197 @default.
• W2074518562 creator A5045220963 @default.
• W2074518562 creator A5052415981 @default.
• W2074518562 date "2014-01-01" @default.
• W2074518562 modified "2023-09-26" @default.
• W2074518562 title "Detailed Raman Study of DLC Coating on Si (100) Made by RF-PECVD" @default.
• W2074518562 cites W1965769936 @default.
• W2074518562 cites W1978937807 @default.
• W2074518562 cites W1979063107 @default.
• W2074518562 cites W1982743546 @default.
• W2074518562 cites W2004139075 @default.
• W2074518562 cites W2008308380 @default.
• W2074518562 cites W2008923113 @default.
• W2074518562 cites W2015811879 @default.
• W2074518562 cites W2037005427 @default.
• W2074518562 cites W2087320214 @default.
• W2074518562 cites W2093681174 @default.
• W2074518562 cites W2124837211 @default.
• W2074518562 cites W2129596426 @default.
• W2074518562 cites W2133061058 @default.
• W2074518562 cites W2142154122 @default.
• W2074518562 cites W3509711 @default.
• W2074518562 doi "https://doi.org/10.1016/j.proeng.2014.12.428" @default.
• W2074518562 hasPublicationYear "2014" @default.
• W2074518562 type Work @default.
• W2074518562 sameAs 2074518562 @default.
• W2074518562 citedByCount "10" @default.
• W2074518562 countsByYear W20745185622017 @default.
• W2074518562 countsByYear W20745185622018 @default.
• W2074518562 countsByYear W20745185622020 @default.
• W2074518562 countsByYear W20745185622021 @default.
• W2074518562 countsByYear W20745185622022 @default.
• W2074518562 countsByYear W20745185622023 @default.
• W2074518562 crossrefType "journal-article" @default.
• W2074518562 hasAuthorship W2074518562A5006691023 @default.
• W2074518562 hasAuthorship W2074518562A5013228746 @default.
• W2074518562 hasAuthorship W2074518562A5022891421 @default.
• W2074518562 hasAuthorship W2074518562A5027591197 @default.
• W2074518562 hasAuthorship W2074518562A5045220963 @default.
• W2074518562 hasAuthorship W2074518562A5052415981 @default.
• W2074518562 hasBestOaLocation W20745185621 @default.
• W2074518562 hasConcept C111368507 @default.
• W2074518562 hasConcept C113196181 @default.
• W2074518562 hasConcept C120665830 @default.
• W2074518562 hasConcept C121332964 @default.
• W2074518562 hasConcept C123380192 @default.
• W2074518562 hasConcept C127313418 @default.
• W2074518562 hasConcept C151730666 @default.
• W2074518562 hasConcept C159985019 @default.
• W2074518562 hasConcept C171250308 @default.
• W2074518562 hasConcept C185592680 @default.
• W2074518562 hasConcept C19067145 @default.
• W2074518562 hasConcept C192562407 @default.
• W2074518562 hasConcept C2777289219 @default.
• W2074518562 hasConcept C2781448156 @default.
• W2074518562 hasConcept C2816523 @default.
• W2074518562 hasConcept C38347018 @default.
• W2074518562 hasConcept C40003534 @default.
• W2074518562 hasConcept C43617362 @default.
• W2074518562 hasConcept C49040817 @default.
• W2074518562 hasConcept C544956773 @default.
• W2074518562 hasConcept C57410435 @default.
• W2074518562 hasConcept C64297162 @default.
• W2074518562 hasConcept C86803240 @default.
• W2074518562 hasConceptScore W2074518562C111368507 @default.
• W2074518562 hasConceptScore W2074518562C113196181 @default.
• W2074518562 hasConceptScore W2074518562C120665830 @default.
• W2074518562 hasConceptScore W2074518562C121332964 @default.
• W2074518562 hasConceptScore W2074518562C123380192 @default.
• W2074518562 hasConceptScore W2074518562C127313418 @default.
• W2074518562 hasConceptScore W2074518562C151730666 @default.
• W2074518562 hasConceptScore W2074518562C159985019 @default.
• W2074518562 hasConceptScore W2074518562C171250308 @default.
• W2074518562 hasConceptScore W2074518562C185592680 @default.
• W2074518562 hasConceptScore W2074518562C19067145 @default.
• W2074518562 hasConceptScore W2074518562C192562407 @default.
• W2074518562 hasConceptScore W2074518562C2777289219 @default.
• W2074518562 hasConceptScore W2074518562C2781448156 @default.
• W2074518562 hasConceptScore W2074518562C2816523 @default.
• W2074518562 hasConceptScore W2074518562C38347018 @default.
• W2074518562 hasConceptScore W2074518562C40003534 @default.
• W2074518562 hasConceptScore W2074518562C43617362 @default.
• W2074518562 hasConceptScore W2074518562C49040817 @default.
• W2074518562 hasConceptScore W2074518562C544956773 @default.
• W2074518562 hasConceptScore W2074518562C57410435 @default.
• W2074518562 hasConceptScore W2074518562C64297162 @default.
• W2074518562 hasConceptScore W2074518562C86803240 @default.
• W2074518562 hasLocation W20745185621 @default.
• W2074518562 hasOpenAccess W2074518562 @default.
• W2074518562 hasPrimaryLocation W20745185621 @default.
• W2074518562 hasRelatedWork W2005308587 @default.
• W2074518562 hasRelatedWork W2025788264 @default.
• W2074518562 hasRelatedWork W2057243639 @default.

• next