Matches in SemOpenAlex for { <https://semopenalex.org/work/W2074543485> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2074543485 abstract "Due to the short wavelength microscopy with extreme ultraviolet (EUV) light is optimally suited for detecting defects e.g. on mask blanks for EUV lithography. In this work the use of a zone plate lens as a second magnification step in EUV microscopy with a multilayer coated Schwarzschild objective is suggested. The zone plate has to be adapted to the optical system and to have a magnification high enough to match the resolution of the Schwarzschild objective to the detector pixel size. The resulting zone plate should have only a few tens of zones and about 1 μm resolution which reduces fabrication demands. Furthermore, this combination enables a scan and zoom procedure where first the measurements are carried out just with a Schwarzschild objective allowing only a small magnification but larger object field. Then, in areas of interest, the second magnification step is switched on by inserting a zone plate in front of the detector and refocusing the sample. The paper addresses regulations for the zone plate design, simulations of the whole optical system and corresponding demonstration experiments on test structures." @default.
- W2074543485 created "2016-06-24" @default.
- W2074543485 creator A5052616255 @default.
- W2074543485 creator A5087937049 @default.
- W2074543485 date "2009-05-07" @default.
- W2074543485 modified "2023-09-23" @default.
- W2074543485 title "Two magnification steps EUV microscopy with a Schwarzschild objective and an adapted zone plate lens" @default.
- W2074543485 cites W1968229769 @default.
- W2074543485 cites W1999895716 @default.
- W2074543485 cites W2025357995 @default.
- W2074543485 cites W2035752375 @default.
- W2074543485 cites W2075365289 @default.
- W2074543485 cites W2090087215 @default.
- W2074543485 cites W2100281273 @default.
- W2074543485 cites W2102586241 @default.
- W2074543485 cites W2134545941 @default.
- W2074543485 cites W2171926948 @default.
- W2074543485 cites W2085984214 @default.
- W2074543485 doi "https://doi.org/10.1117/12.822986" @default.
- W2074543485 hasPublicationYear "2009" @default.
- W2074543485 type Work @default.
- W2074543485 sameAs 2074543485 @default.
- W2074543485 citedByCount "4" @default.
- W2074543485 countsByYear W20745434852013 @default.
- W2074543485 crossrefType "proceedings-article" @default.
- W2074543485 hasAuthorship W2074543485A5052616255 @default.
- W2074543485 hasAuthorship W2074543485A5087937049 @default.
- W2074543485 hasConcept C115304011 @default.
- W2074543485 hasConcept C120665830 @default.
- W2074543485 hasConcept C121332964 @default.
- W2074543485 hasConcept C146024833 @default.
- W2074543485 hasConcept C147080431 @default.
- W2074543485 hasConcept C15336307 @default.
- W2074543485 hasConcept C162996421 @default.
- W2074543485 hasConcept C192562407 @default.
- W2074543485 hasConcept C207114421 @default.
- W2074543485 hasConcept C2776401274 @default.
- W2074543485 hasConcept C32623475 @default.
- W2074543485 hasConcept C4144372 @default.
- W2074543485 hasConcept C44870925 @default.
- W2074543485 hasConcept C520434653 @default.
- W2074543485 hasConcept C94915269 @default.
- W2074543485 hasConceptScore W2074543485C115304011 @default.
- W2074543485 hasConceptScore W2074543485C120665830 @default.
- W2074543485 hasConceptScore W2074543485C121332964 @default.
- W2074543485 hasConceptScore W2074543485C146024833 @default.
- W2074543485 hasConceptScore W2074543485C147080431 @default.
- W2074543485 hasConceptScore W2074543485C15336307 @default.
- W2074543485 hasConceptScore W2074543485C162996421 @default.
- W2074543485 hasConceptScore W2074543485C192562407 @default.
- W2074543485 hasConceptScore W2074543485C207114421 @default.
- W2074543485 hasConceptScore W2074543485C2776401274 @default.
- W2074543485 hasConceptScore W2074543485C32623475 @default.
- W2074543485 hasConceptScore W2074543485C4144372 @default.
- W2074543485 hasConceptScore W2074543485C44870925 @default.
- W2074543485 hasConceptScore W2074543485C520434653 @default.
- W2074543485 hasConceptScore W2074543485C94915269 @default.
- W2074543485 hasLocation W20745434851 @default.
- W2074543485 hasOpenAccess W2074543485 @default.
- W2074543485 hasPrimaryLocation W20745434851 @default.
- W2074543485 hasRelatedWork W1990897501 @default.
- W2074543485 hasRelatedWork W2006745416 @default.
- W2074543485 hasRelatedWork W2007228079 @default.
- W2074543485 hasRelatedWork W2012869290 @default.
- W2074543485 hasRelatedWork W2049330449 @default.
- W2074543485 hasRelatedWork W2074543485 @default.
- W2074543485 hasRelatedWork W2092137862 @default.
- W2074543485 hasRelatedWork W2097521340 @default.
- W2074543485 hasRelatedWork W2434072568 @default.
- W2074543485 hasRelatedWork W2912652396 @default.
- W2074543485 isParatext "false" @default.
- W2074543485 isRetracted "false" @default.
- W2074543485 magId "2074543485" @default.
- W2074543485 workType "article" @default.