Matches in SemOpenAlex for { <https://semopenalex.org/work/W2074577893> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2074577893 abstract "This study presents a method to reduce hole-diameter variation and defect ratio in patterning of a self-assembled block copolymer (BCP) for imprint-mold fabrication. The BCP material used is PMMA-b-poly(methyl acrylate) polyhedral oligomeric silsesquioxane (PMAPOSS) in which PMMA spheres with 18.3-nm-pitch are aligned in the hexagonal close-packed positions in the PMAPOSS matrix. When the self-assembled BCP film was etched in the conventional dry-development process, the hole-diameter variation and the amount of hole defects (defect ratio), defined as “no-opening defects” or “connecting holes,” increased. Variation of PMMA sphere diameter and/or position in the perpendicular direction to the substrate plane was assumed to be the main cause of the increase in hole-diameter variation and defect ratio after BCP development. To optimize the etching conditions for BCP development, a new model representing the relationship between defect ratio and relative standard deviation of PMMA sphere diameter and/or position under various etching conditions (selectivity and anisotropy) was developed. The model indicates that to reduce defect ratio, higher etching selectivity of PMMA to PMAPOSS and etching anisotropy are required. It also indicates that optimizing etching anisotropy is more effective than optimizing etching selectivity. On the basis of these modeling results, the dry-development conditions were optimized; namely, selectivity (etching ratio of PMMA to PMAPOSS) was increased from 4 to 6 and anisotropy (etching ratio of anisotropy to isotropy) was increased from 1.6 to 2.1. As a result, the defect ratio decreased from 31% to 5%. A 1.7 tera-dot/in.2 imprint-mold was fabricated by applying the directed self-assembly process." @default.
- W2074577893 created "2016-06-24" @default.
- W2074577893 creator A5037552153 @default.
- W2074577893 creator A5037588663 @default.
- W2074577893 creator A5042093596 @default.
- W2074577893 creator A5042941311 @default.
- W2074577893 creator A5065236305 @default.
- W2074577893 creator A5069259200 @default.
- W2074577893 creator A5081476034 @default.
- W2074577893 date "2013-07-01" @default.
- W2074577893 modified "2023-09-26" @default.
- W2074577893 title "Reducing hole-size variation and defect ratio after pattern transfer by using self-assembled polymer with spherical structure" @default.
- W2074577893 cites W1968622877 @default.
- W2074577893 cites W1976425030 @default.
- W2074577893 cites W1985516752 @default.
- W2074577893 cites W1995004971 @default.
- W2074577893 cites W2003398981 @default.
- W2074577893 cites W2034205871 @default.
- W2074577893 cites W2044334886 @default.
- W2074577893 cites W2045699160 @default.
- W2074577893 cites W2054929321 @default.
- W2074577893 cites W2058519998 @default.
- W2074577893 cites W2114708340 @default.
- W2074577893 cites W2142846827 @default.
- W2074577893 cites W2162100547 @default.
- W2074577893 cites W2330634357 @default.
- W2074577893 cites W4233417203 @default.
- W2074577893 doi "https://doi.org/10.1116/1.4811648" @default.
- W2074577893 hasPublicationYear "2013" @default.
- W2074577893 type Work @default.
- W2074577893 sameAs 2074577893 @default.
- W2074577893 citedByCount "1" @default.
- W2074577893 countsByYear W20745778932015 @default.
- W2074577893 crossrefType "journal-article" @default.
- W2074577893 hasAuthorship W2074577893A5037552153 @default.
- W2074577893 hasAuthorship W2074577893A5037588663 @default.
- W2074577893 hasAuthorship W2074577893A5042093596 @default.
- W2074577893 hasAuthorship W2074577893A5042941311 @default.
- W2074577893 hasAuthorship W2074577893A5065236305 @default.
- W2074577893 hasAuthorship W2074577893A5069259200 @default.
- W2074577893 hasAuthorship W2074577893A5081476034 @default.
- W2074577893 hasConcept C100460472 @default.
- W2074577893 hasConcept C120665830 @default.
- W2074577893 hasConcept C121332964 @default.
- W2074577893 hasConcept C1291036 @default.
- W2074577893 hasConcept C136525101 @default.
- W2074577893 hasConcept C142724271 @default.
- W2074577893 hasConcept C159985019 @default.
- W2074577893 hasConcept C192562407 @default.
- W2074577893 hasConcept C204787440 @default.
- W2074577893 hasConcept C2779227376 @default.
- W2074577893 hasConcept C71924100 @default.
- W2074577893 hasConcept C82558694 @default.
- W2074577893 hasConcept C85725439 @default.
- W2074577893 hasConceptScore W2074577893C100460472 @default.
- W2074577893 hasConceptScore W2074577893C120665830 @default.
- W2074577893 hasConceptScore W2074577893C121332964 @default.
- W2074577893 hasConceptScore W2074577893C1291036 @default.
- W2074577893 hasConceptScore W2074577893C136525101 @default.
- W2074577893 hasConceptScore W2074577893C142724271 @default.
- W2074577893 hasConceptScore W2074577893C159985019 @default.
- W2074577893 hasConceptScore W2074577893C192562407 @default.
- W2074577893 hasConceptScore W2074577893C204787440 @default.
- W2074577893 hasConceptScore W2074577893C2779227376 @default.
- W2074577893 hasConceptScore W2074577893C71924100 @default.
- W2074577893 hasConceptScore W2074577893C82558694 @default.
- W2074577893 hasConceptScore W2074577893C85725439 @default.
- W2074577893 hasIssue "4" @default.
- W2074577893 hasLocation W20745778931 @default.
- W2074577893 hasOpenAccess W2074577893 @default.
- W2074577893 hasPrimaryLocation W20745778931 @default.
- W2074577893 hasRelatedWork W1513857814 @default.
- W2074577893 hasRelatedWork W1990831804 @default.
- W2074577893 hasRelatedWork W2002854597 @default.
- W2074577893 hasRelatedWork W2027012391 @default.
- W2074577893 hasRelatedWork W2031175500 @default.
- W2074577893 hasRelatedWork W2034845682 @default.
- W2074577893 hasRelatedWork W2059365193 @default.
- W2074577893 hasRelatedWork W2597461771 @default.
- W2074577893 hasRelatedWork W2951581608 @default.
- W2074577893 hasRelatedWork W3090046395 @default.
- W2074577893 hasVolume "31" @default.
- W2074577893 isParatext "false" @default.
- W2074577893 isRetracted "false" @default.
- W2074577893 magId "2074577893" @default.
- W2074577893 workType "article" @default.