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- W2074638164 abstract "Plasma-enhanced chemical vapor deposition (PECVD) at high pressure has been a challenging topic because of the inhomogeneous plasma instability and lack of process information. Here we report a demonstration of atmospheric-pressure plasma-enhanced CVD (AP-PECVD) for uniform deposition of zirconium dioxide (ZrO 2 ) layers that are widely used in electronics and mechanical applications." @default.
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- W2074638164 date "2014-05-01" @default.
- W2074638164 modified "2023-10-07" @default.
- W2074638164 title "Uniform deposition of zirconium dioxide layers by atmospheric-pressure plasma-enhanced chemical vapor deposition" @default.
- W2074638164 doi "https://doi.org/10.1109/plasma.2014.7012610" @default.
- W2074638164 hasPublicationYear "2014" @default.
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