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• W2074647673 abstract "We report on Cr, Mn, Fe, and Zn redistributions either in undoped and unimplanted, or in doped and implanted indium phosphide substrates. Depth profiles, obtained by secondary ion mass spectrometry, demonstrate that residual impurities, as well as dopants, redistribute during thermal processing and that several parameters govern simultaneously the observed phenomena. Results are interpreted in terms of implantation-related damage and thermally generated defects, solubility modifications induced by the position of the Fermi level, p-n junction-related electric fields, and pure diffusion mechanisms." @default.
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• W2074647673 date "1985-02-15" @default.
• W2074647673 modified "2023-09-26" @default.
• W2074647673 title "Further evidence of chromium, manganese, iron, and zinc redistribution in indium phosphide after annealing" @default.
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• W2074647673 doi "https://doi.org/10.1063/1.334543" @default.
• W2074647673 hasPublicationYear "1985" @default.
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