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- W2074672014 startingPage "1594" @default.
- W2074672014 abstract "A highly tetrahedrally bonded, hydrogenated amorphous carbon (ta-C:H) has been deposited from an acetylene-fed plasma beam source. The plasma beam source is operated to provide a highly ionized, monoenergetic plasma beam of ${mathrm{C}}_{2}$${mathrm{H}}_{2}^{+}$ ions. The resulting films are characterized in terms of their ${mathit{sp}}^{3}$ content, mass density, intrinsic stress, surface roughness, radial distribution function, C---H bonding, Raman spectra, optical gap, electrical conductivity, gap states, Youngs modulus, and hardness. The ${mathit{sp}}^{3}$ content reaches a maximum value of 75% at an ion energy of 200 eV, or 92 eV per C ion. The density and stress also reach a maximum at this ion energy. The formation of ta-C:H is interpreted in terms of the subplantation of ${mathrm{C}}^{+}$ ions, which produces a densified, ${mathit{sp}}^{3}$ bonded network. The C-H vibration spectra suggest that C ${mathit{sp}}^{2}$ sites form C=C alkene groups. The optical gap ${mathit{E}}_{04}$ reaches a maximum of 2.85 eV and increases with the ${mathit{sp}}^{3}$ fraction. The spin density due to defects is high and decreases with increasing ion energy. The Youngs modulus and hardness measured by microindenter reach maximum values of 290 and 61 GPa, consistent with the highly ${mathit{sp}}^{3}$ bonding. The variation of hardness with ${mathit{sp}}^{3}$ fraction is consistent with the constraint model of network rigidity. textcopyright{} 1996 The American Physical Society." @default.
- W2074672014 created "2016-06-24" @default.
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- W2074672014 date "1996-01-15" @default.
- W2074672014 modified "2023-09-25" @default.
- W2074672014 title "Preparation and properties of highly tetrahedral hydrogenated amorphous carbon" @default.
- W2074672014 cites W1513544041 @default.
- W2074672014 cites W1619907699 @default.
- W2074672014 cites W1669819412 @default.
- W2074672014 cites W1963834579 @default.
- W2074672014 cites W1965451903 @default.
- W2074672014 cites W1965744054 @default.
- W2074672014 cites W1967095417 @default.
- W2074672014 cites W1969648640 @default.
- W2074672014 cites W1971260593 @default.
- W2074672014 cites W1972724107 @default.
- W2074672014 cites W1973495338 @default.
- W2074672014 cites W1973566553 @default.
- W2074672014 cites W1974405759 @default.
- W2074672014 cites W1975966750 @default.
- W2074672014 cites W1976705497 @default.
- W2074672014 cites W1976868164 @default.
- W2074672014 cites W1981223668 @default.
- W2074672014 cites W1985303787 @default.
- W2074672014 cites W1985516888 @default.
- W2074672014 cites W1987280937 @default.
- W2074672014 cites W1989605237 @default.
- W2074672014 cites W1993581106 @default.
- W2074672014 cites W1995907475 @default.
- W2074672014 cites W1997973641 @default.
- W2074672014 cites W2003366574 @default.
- W2074672014 cites W2004026965 @default.
- W2074672014 cites W2007576784 @default.
- W2074672014 cites W2007729816 @default.
- W2074672014 cites W2009129883 @default.
- W2074672014 cites W2017418574 @default.
- W2074672014 cites W2018972210 @default.
- W2074672014 cites W2020968584 @default.
- W2074672014 cites W2021130955 @default.
- W2074672014 cites W2021983217 @default.
- W2074672014 cites W2022058961 @default.
- W2074672014 cites W2025182908 @default.
- W2074672014 cites W2025659062 @default.
- W2074672014 cites W2029779297 @default.
- W2074672014 cites W2030583379 @default.
- W2074672014 cites W2031746601 @default.
- W2074672014 cites W2031918282 @default.
- W2074672014 cites W2034060191 @default.
- W2074672014 cites W2034865359 @default.
- W2074672014 cites W2036782831 @default.
- W2074672014 cites W2042526716 @default.
- W2074672014 cites W2045354172 @default.
- W2074672014 cites W2047063852 @default.
- W2074672014 cites W2047235007 @default.
- W2074672014 cites W2050179754 @default.
- W2074672014 cites W2050674662 @default.
- W2074672014 cites W2052286373 @default.
- W2074672014 cites W2052323431 @default.
- W2074672014 cites W2054358760 @default.
- W2074672014 cites W2056589190 @default.
- W2074672014 cites W2057437523 @default.
- W2074672014 cites W2059397979 @default.
- W2074672014 cites W2064368706 @default.
- W2074672014 cites W2067979108 @default.
- W2074672014 cites W2068967615 @default.
- W2074672014 cites W2069695520 @default.
- W2074672014 cites W2070999545 @default.
- W2074672014 cites W2071977460 @default.
- W2074672014 cites W2072004113 @default.
- W2074672014 cites W2076728005 @default.
- W2074672014 cites W2079600794 @default.
- W2074672014 cites W2081069021 @default.
- W2074672014 cites W2082654570 @default.
- W2074672014 cites W2083816209 @default.
- W2074672014 cites W2083855830 @default.
- W2074672014 cites W2085401500 @default.
- W2074672014 cites W2088564105 @default.
- W2074672014 cites W2089738450 @default.
- W2074672014 cites W2090116919 @default.
- W2074672014 cites W2091888833 @default.
- W2074672014 cites W2093576729 @default.
- W2074672014 cites W2093695739 @default.
- W2074672014 cites W2109468230 @default.
- W2074672014 cites W2118805593 @default.
- W2074672014 cites W2132087474 @default.
- W2074672014 cites W2137250615 @default.
- W2074672014 cites W2163009788 @default.
- W2074672014 cites W4211184409 @default.
- W2074672014 cites W4251321821 @default.
- W2074672014 doi "https://doi.org/10.1103/physrevb.53.1594" @default.
- W2074672014 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/9983623" @default.
- W2074672014 hasPublicationYear "1996" @default.