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- W2074847089 abstract "Molybdenum has been deposited on single crystal silicon substrates by the vapor phase decomposition of molybdenum chlorides. The thickness, alloy phase, and crystalline nature of the films were studied as functions of substrate temperature, substrate orientation, and source material, using electron microscopy and reflection electron diffraction." @default.
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- W2074847089 date "1967-01-01" @default.
- W2074847089 modified "2023-10-03" @default.
- W2074847089 title "Chemical Vapor Deposition of Mo onto Si" @default.
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- W2074847089 doi "https://doi.org/10.1149/1.2426538" @default.
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