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- W2074925321 abstract "We used a quadrupole mass spectrometer (QMS) to investigate the dissociation of source gases and the generation of radical species during the hot-filament chemical vapor deposition (HFCVD) process at various methane and ammonia concentrations. Since the HFCVD was carried out at the working pressure of 30 Torr, a capillary tube and a 5 μm pinhole were installed to sample the small amount of gas from the HFCVD chamber to the differentially pumped QMS at the vacuum level of 5×10−6 Torr. An investigation of the systematic variations in mass spectra corresponding to the increase of methane concentration in the ammonia-free source gases revealed substantial generation of chemical species containing two carbon atoms. However, an increase of ammonia concentration in the source gas with 20% of methane resulted in generation of nitrogen containing radicals such as CN and HCN, together with the suppression of two-carbon radicals. An implication of observed mass-spectrum variation for the growth behavior of carbon nanotube and/or carbon nanoparticle films was discussed." @default.
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- W2074925321 date "2004-05-01" @default.
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- W2074925321 title "Quadrupole-mass-spectroscopy studies on hot-filament chemical vapor deposition of carbon films with nanosized constituents" @default.
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- W2074925321 doi "https://doi.org/10.1116/1.1722109" @default.
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