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• W2074928369 endingPage "290" @default.
• W2074928369 startingPage "278" @default.
• W2074928369 abstract "In this paper, the three different experimental techniques of AES (Auger electron spectroscopy), ARXPS (angle-resolved X-ray photoelectron spectroscopy) and DLTS (deep level transient spectroscopy) with C − V measurements have been applied to study damaged surfaces and interfaces of SiO 2 Si in MOS. The defects, appearing at the surface of the dielectric layer and the interface between SiO 2 and Si, induced by energetic electron and/or hydrogen ion (H + ) beams, were independently investigated using ARXPS and AES combined with DLTS, respectively. The more intermediate oxidation states, such as Si 1+ , Si 2+ and Si 3+ , corresponding to Si 2 O, SiO and Si 2 O 3 clusters formed at the surface and the transition regions, were obtained for the irradiated sample. The changes of the intensity, full width at half maximum (fwhm) and binding energy of each ARXPS spectrum with take-off angle showed that silicon-rich clusters or chains, and about 4.8 Å of an amorphous silicon, actually existed in the outermost surface as a result of preferential sputtering of oxygen by electron ionization and displacement by H + . The Si 2p core-level spectra were analyzed in terms of five chemically shifted components corresponding to the basic Si binding units SiO n with n = 0, 1, ⋯, 4. The concentration of these bonding units as a function of effective depth of emission was essentially in agreement with the random-bonding model. But some separation into a silicon-rich phase was also evident at intermediate stoichiometries and stacks. In addition, more dangling bonds of Si were present overall in the oxide layer, which acted with an amphoteric character and caused the defect states to lie in the lower half of the bandgap." @default.
• W2074928369 created "2016-06-24" @default.
• W2074928369 creator A5046092085 @default.
• W2074928369 creator A5086855838 @default.
• W2074928369 creator A5088674977 @default.
• W2074928369 date "1992-09-01" @default.
• W2074928369 modified "2023-09-28" @default.
• W2074928369 title "Energy spectroscopy studies of radiation-induced damaged surfaces and interfaces in SiO2/Si by light charged particles" @default.
• W2074928369 cites W1548177543 @default.
• W2074928369 cites W1963625222 @default.
• W2074928369 cites W1964842893 @default.
• W2074928369 cites W1971619067 @default.
• W2074928369 cites W1973155964 @default.
• W2074928369 cites W1975868821 @default.
• W2074928369 cites W1982557427 @default.
• W2074928369 cites W1984512616 @default.
• W2074928369 cites W1984849968 @default.
• W2074928369 cites W1985102802 @default.
• W2074928369 cites W1992195543 @default.
• W2074928369 cites W1996518304 @default.
• W2074928369 cites W2000067590 @default.
• W2074928369 cites W2001033317 @default.
• W2074928369 cites W2002813445 @default.
• W2074928369 cites W2005332140 @default.
• W2074928369 cites W2011487015 @default.
• W2074928369 cites W2013326507 @default.
• W2074928369 cites W2019790571 @default.
• W2074928369 cites W2020580581 @default.
• W2074928369 cites W2030301195 @default.
• W2074928369 cites W2030385275 @default.
• W2074928369 cites W2032656728 @default.
• W2074928369 cites W2034137747 @default.
• W2074928369 cites W2035426761 @default.
• W2074928369 cites W2041492027 @default.
• W2074928369 cites W2050836775 @default.
• W2074928369 cites W2053095387 @default.
• W2074928369 cites W2053140996 @default.
• W2074928369 cites W2054061894 @default.
• W2074928369 cites W2054893389 @default.
• W2074928369 cites W2056045911 @default.
• W2074928369 cites W2058205425 @default.
• W2074928369 cites W2062677926 @default.
• W2074928369 cites W2070904913 @default.
• W2074928369 cites W2075011119 @default.
• W2074928369 cites W2081799892 @default.
• W2074928369 cites W2090962937 @default.
• W2074928369 cites W2091848675 @default.
• W2074928369 cites W2092665187 @default.
• W2074928369 cites W2094652887 @default.
• W2074928369 cites W2095360993 @default.
• W2074928369 cites W2125179932 @default.
• W2074928369 cites W2170169509 @default.
• W2074928369 doi "https://doi.org/10.1016/0168-583x(92)95400-l" @default.
• W2074928369 hasPublicationYear "1992" @default.
• W2074928369 type Work @default.
• W2074928369 sameAs 2074928369 @default.
• W2074928369 citedByCount "8" @default.
• W2074928369 countsByYear W20749283692015 @default.
• W2074928369 countsByYear W20749283692016 @default.
• W2074928369 countsByYear W20749283692017 @default.
• W2074928369 crossrefType "journal-article" @default.
• W2074928369 hasAuthorship W2074928369A5046092085 @default.
• W2074928369 hasAuthorship W2074928369A5086855838 @default.
• W2074928369 hasAuthorship W2074928369A5088674977 @default.
• W2074928369 hasConcept C111337013 @default.
• W2074928369 hasConcept C113196181 @default.
• W2074928369 hasConcept C121332964 @default.
• W2074928369 hasConcept C146088050 @default.
• W2074928369 hasConcept C171250308 @default.
• W2074928369 hasConcept C175708663 @default.
• W2074928369 hasConcept C178187954 @default.
• W2074928369 hasConcept C184779094 @default.
• W2074928369 hasConcept C185544564 @default.
• W2074928369 hasConcept C185592680 @default.
• W2074928369 hasConcept C191897082 @default.
• W2074928369 hasConcept C192562407 @default.
• W2074928369 hasConcept C25442681 @default.
• W2074928369 hasConcept C32424582 @default.
• W2074928369 hasConcept C32891209 @default.
• W2074928369 hasConcept C33893257 @default.
• W2074928369 hasConcept C43617362 @default.
• W2074928369 hasConcept C46141821 @default.
• W2074928369 hasConcept C544956773 @default.
• W2074928369 hasConcept C56052488 @default.
• W2074928369 hasConcept C62520636 @default.
• W2074928369 hasConcept C8010536 @default.
• W2074928369 hasConceptScore W2074928369C111337013 @default.
• W2074928369 hasConceptScore W2074928369C113196181 @default.
• W2074928369 hasConceptScore W2074928369C121332964 @default.
• W2074928369 hasConceptScore W2074928369C146088050 @default.
• W2074928369 hasConceptScore W2074928369C171250308 @default.
• W2074928369 hasConceptScore W2074928369C175708663 @default.
• W2074928369 hasConceptScore W2074928369C178187954 @default.
• W2074928369 hasConceptScore W2074928369C184779094 @default.
• W2074928369 hasConceptScore W2074928369C185544564 @default.
• W2074928369 hasConceptScore W2074928369C185592680 @default.
• W2074928369 hasConceptScore W2074928369C191897082 @default.
• W2074928369 hasConceptScore W2074928369C192562407 @default.

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