Matches in SemOpenAlex for { <https://semopenalex.org/work/W2075042018> ?p ?o ?g. }
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- W2075042018 endingPage "2337" @default.
- W2075042018 startingPage "2335" @default.
- W2075042018 abstract "A model for the effects of dry-etch damage on the conductances of etched structures is developed. Expressions for defect distribution are obtained for top-surface and sidewall damage. The expression for sidewall damage is used in the calculation of wire conductances. The model accounts accurately for changes in experimentally measured conductances of SiCl4-etched n+-GaAs wires with variations in material carrier concentration, epilayer thickness, and etch time/depth. The analysis indicates that defects are created at a significant rate at sidewalls as compared to top surfaces." @default.
- W2075042018 created "2016-06-24" @default.
- W2075042018 creator A5001287976 @default.
- W2075042018 creator A5021255482 @default.
- W2075042018 creator A5057330753 @default.
- W2075042018 creator A5058767208 @default.
- W2075042018 creator A5073120563 @default.
- W2075042018 creator A5075204354 @default.
- W2075042018 date "1992-11-09" @default.
- W2075042018 modified "2023-09-23" @default.
- W2075042018 title "Model for conductance in dry-etch damaged <i>n</i>-GaAs structures" @default.
- W2075042018 cites W1999819066 @default.
- W2075042018 cites W2001187850 @default.
- W2075042018 cites W2028279809 @default.
- W2075042018 cites W2031175500 @default.
- W2075042018 cites W2033265944 @default.
- W2075042018 cites W2041001518 @default.
- W2075042018 cites W2048242437 @default.
- W2075042018 cites W2065477051 @default.
- W2075042018 cites W2080473627 @default.
- W2075042018 cites W2088337834 @default.
- W2075042018 cites W2095701193 @default.
- W2075042018 doi "https://doi.org/10.1063/1.108235" @default.
- W2075042018 hasPublicationYear "1992" @default.
- W2075042018 type Work @default.
- W2075042018 sameAs 2075042018 @default.
- W2075042018 citedByCount "34" @default.
- W2075042018 countsByYear W20750420182020 @default.
- W2075042018 crossrefType "journal-article" @default.
- W2075042018 hasAuthorship W2075042018A5001287976 @default.
- W2075042018 hasAuthorship W2075042018A5021255482 @default.
- W2075042018 hasAuthorship W2075042018A5057330753 @default.
- W2075042018 hasAuthorship W2075042018A5058767208 @default.
- W2075042018 hasAuthorship W2075042018A5073120563 @default.
- W2075042018 hasAuthorship W2075042018A5075204354 @default.
- W2075042018 hasConcept C100460472 @default.
- W2075042018 hasConcept C121332964 @default.
- W2075042018 hasConcept C121932024 @default.
- W2075042018 hasConcept C1291036 @default.
- W2075042018 hasConcept C159985019 @default.
- W2075042018 hasConcept C192562407 @default.
- W2075042018 hasConcept C26873012 @default.
- W2075042018 hasConcept C2779227376 @default.
- W2075042018 hasConcept C49040817 @default.
- W2075042018 hasConcept C510052550 @default.
- W2075042018 hasConcept C81626474 @default.
- W2075042018 hasConceptScore W2075042018C100460472 @default.
- W2075042018 hasConceptScore W2075042018C121332964 @default.
- W2075042018 hasConceptScore W2075042018C121932024 @default.
- W2075042018 hasConceptScore W2075042018C1291036 @default.
- W2075042018 hasConceptScore W2075042018C159985019 @default.
- W2075042018 hasConceptScore W2075042018C192562407 @default.
- W2075042018 hasConceptScore W2075042018C26873012 @default.
- W2075042018 hasConceptScore W2075042018C2779227376 @default.
- W2075042018 hasConceptScore W2075042018C49040817 @default.
- W2075042018 hasConceptScore W2075042018C510052550 @default.
- W2075042018 hasConceptScore W2075042018C81626474 @default.
- W2075042018 hasIssue "19" @default.
- W2075042018 hasLocation W20750420181 @default.
- W2075042018 hasOpenAccess W2075042018 @default.
- W2075042018 hasPrimaryLocation W20750420181 @default.
- W2075042018 hasRelatedWork W1992219747 @default.
- W2075042018 hasRelatedWork W2016278952 @default.
- W2075042018 hasRelatedWork W2021589642 @default.
- W2075042018 hasRelatedWork W2047235601 @default.
- W2075042018 hasRelatedWork W2074438905 @default.
- W2075042018 hasRelatedWork W2132722667 @default.
- W2075042018 hasRelatedWork W2138175443 @default.
- W2075042018 hasRelatedWork W2167242048 @default.
- W2075042018 hasRelatedWork W4297796452 @default.
- W2075042018 hasRelatedWork W2052483455 @default.
- W2075042018 hasVolume "61" @default.
- W2075042018 isParatext "false" @default.
- W2075042018 isRetracted "false" @default.
- W2075042018 magId "2075042018" @default.
- W2075042018 workType "article" @default.