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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2075074691> ?p ?o ?g. }

• W2075074691 endingPage "2868" @default.
• W2075074691 startingPage "2863" @default.
• W2075074691 abstract "The printing of lead zirconate titanate (PZT, Pb(Zr,Ti)O3) piezoelectric thick films on silicon substrates is being studied for potential use as microactuators, microsensors, and microtransducers. A fundamental challenge in the fabrication of useful PZT thick-film devices on silicon is to sinter the PZT to high density at sufficiently low temperature to avoid mechanical or chemical degradation of the silicon substrate. The goal of the present study is to develop and implement suitable electrodes and PZT sintering aids that yield attractive piezoelectric properties for devices while minimizing reactions between the silicon, the bottom electrode, and the PZT thick film. A B2O3-Bi2O3-CdO sintering aid has been found to be superior to borosilicate glass, and the use of a gold/platinum bilayer bottom electrode has resulted in better thermal stability of the electrode/film structure. Films sintered at 900°C for 1 h have relative permittivity of 970 (at 1 kHz), remnant polarization of 20 μC/cm2, coercive field of 30 kV/cm, and weak-field piezoelectric coefficient d33 of 110 pm/V." @default.
• W2075074691 created "2016-06-24" @default.
• W2075074691 creator A5063633425 @default.
• W2075074691 creator A5064708958 @default.
• W2075074691 creator A5091105897 @default.
• W2075074691 date "2001-12-01" @default.
• W2075074691 modified "2023-10-17" @default.
• W2075074691 title "Processing and Properties of Screen-Printed Lead Zirconate Titanate Piezoelectric Thick Films on Electroded Silicon" @default.
• W2075074691 cites W1531988476 @default.
• W2075074691 cites W1982563585 @default.
• W2075074691 cites W1986397309 @default.
• W2075074691 cites W1992049217 @default.
• W2075074691 cites W1997014207 @default.
• W2075074691 cites W2037147843 @default.
• W2075074691 cites W2041472988 @default.
• W2075074691 cites W2044984584 @default.
• W2075074691 cites W2048562077 @default.
• W2075074691 cites W2053196643 @default.
• W2075074691 cites W2056425959 @default.
• W2075074691 cites W2058822522 @default.
• W2075074691 cites W2068380686 @default.
• W2075074691 cites W2074869505 @default.
• W2075074691 cites W2078296963 @default.
• W2075074691 cites W2089557797 @default.
• W2075074691 cites W2092326901 @default.
• W2075074691 cites W2096378183 @default.
• W2075074691 cites W2122860358 @default.
• W2075074691 cites W2127112914 @default.
• W2075074691 cites W2198973842 @default.
• W2075074691 cites W2335164049 @default.
• W2075074691 cites W2533820382 @default.
• W2075074691 doi "https://doi.org/10.1111/j.1151-2916.2001.tb01106.x" @default.
• W2075074691 hasPublicationYear "2001" @default.
• W2075074691 type Work @default.
• W2075074691 sameAs 2075074691 @default.
• W2075074691 citedByCount "58" @default.
• W2075074691 countsByYear W20750746912012 @default.
• W2075074691 countsByYear W20750746912013 @default.
• W2075074691 countsByYear W20750746912014 @default.
• W2075074691 countsByYear W20750746912015 @default.
• W2075074691 countsByYear W20750746912016 @default.
• W2075074691 countsByYear W20750746912017 @default.
• W2075074691 countsByYear W20750746912018 @default.
• W2075074691 countsByYear W20750746912020 @default.
• W2075074691 countsByYear W20750746912021 @default.
• W2075074691 countsByYear W20750746912022 @default.
• W2075074691 crossrefType "journal-article" @default.
• W2075074691 hasAuthorship W2075074691A5063633425 @default.
• W2075074691 hasAuthorship W2075074691A5064708958 @default.
• W2075074691 hasAuthorship W2075074691A5091105897 @default.
• W2075074691 hasConcept C100082104 @default.
• W2075074691 hasConcept C111368507 @default.
• W2075074691 hasConcept C127313418 @default.
• W2075074691 hasConcept C133386390 @default.
• W2075074691 hasConcept C134132462 @default.
• W2075074691 hasConcept C135405054 @default.
• W2075074691 hasConcept C136525101 @default.
• W2075074691 hasConcept C142724271 @default.
• W2075074691 hasConcept C147789679 @default.
• W2075074691 hasConcept C159985019 @default.
• W2075074691 hasConcept C17525397 @default.
• W2075074691 hasConcept C185592680 @default.
• W2075074691 hasConcept C192562407 @default.
• W2075074691 hasConcept C204787440 @default.
• W2075074691 hasConcept C2777289219 @default.
• W2075074691 hasConcept C2777581544 @default.
• W2075074691 hasConcept C2781128178 @default.
• W2075074691 hasConcept C49040817 @default.
• W2075074691 hasConcept C544956773 @default.
• W2075074691 hasConcept C71924100 @default.
• W2075074691 hasConcept C79090758 @default.
• W2075074691 hasConceptScore W2075074691C100082104 @default.
• W2075074691 hasConceptScore W2075074691C111368507 @default.
• W2075074691 hasConceptScore W2075074691C127313418 @default.
• W2075074691 hasConceptScore W2075074691C133386390 @default.
• W2075074691 hasConceptScore W2075074691C134132462 @default.
• W2075074691 hasConceptScore W2075074691C135405054 @default.
• W2075074691 hasConceptScore W2075074691C136525101 @default.
• W2075074691 hasConceptScore W2075074691C142724271 @default.
• W2075074691 hasConceptScore W2075074691C147789679 @default.
• W2075074691 hasConceptScore W2075074691C159985019 @default.
• W2075074691 hasConceptScore W2075074691C17525397 @default.
• W2075074691 hasConceptScore W2075074691C185592680 @default.
• W2075074691 hasConceptScore W2075074691C192562407 @default.
• W2075074691 hasConceptScore W2075074691C204787440 @default.
• W2075074691 hasConceptScore W2075074691C2777289219 @default.
• W2075074691 hasConceptScore W2075074691C2777581544 @default.
• W2075074691 hasConceptScore W2075074691C2781128178 @default.
• W2075074691 hasConceptScore W2075074691C49040817 @default.
• W2075074691 hasConceptScore W2075074691C544956773 @default.
• W2075074691 hasConceptScore W2075074691C71924100 @default.
• W2075074691 hasConceptScore W2075074691C79090758 @default.
• W2075074691 hasIssue "12" @default.
• W2075074691 hasLocation W20750746911 @default.
• W2075074691 hasOpenAccess W2075074691 @default.
• W2075074691 hasPrimaryLocation W20750746911 @default.
• W2075074691 hasRelatedWork W1994673710 @default.
• W2075074691 hasRelatedWork W2047743713 @default.

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