Matches in SemOpenAlex for { <https://semopenalex.org/work/W2075176502> ?p ?o ?g. }
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- W2075176502 endingPage "5381" @default.
- W2075176502 startingPage "5377" @default.
- W2075176502 abstract "The mechanisms of SiO2 etching by CFm- (m = 3−1) and NFn- (n = 2,1) are investigated by applying quantum chemical ab initio methods on local molecular surface models. From the calculated energetic data of intermediate hypercoordinated centers formed by adsorption of the negatively charged ions, the reaction behavior at the surface is estimated. The CFm- and NFn- ions act as blockers for Si centers, provide chemisorbed F- ions, or enable the Si−O bond cleavage. At higher temperatures (energy supply of about 37 kcal/mol), the blocking ions desorb and Si−O bonds break." @default.
- W2075176502 created "2016-06-24" @default.
- W2075176502 creator A5024937078 @default.
- W2075176502 date "1997-07-01" @default.
- W2075176502 modified "2023-09-23" @default.
- W2075176502 title "Mechanisms of SiO2Etching: Ab Initio Calculations on the Reactions of CFm-(m= 3−1) and NFn-(n= 2, 1) Ions with Local Surface Models" @default.
- W2075176502 cites W1556161797 @default.
- W2075176502 cites W1983256684 @default.
- W2075176502 cites W1985083433 @default.
- W2075176502 cites W1989173626 @default.
- W2075176502 cites W1990060841 @default.
- W2075176502 cites W1991632593 @default.
- W2075176502 cites W1993013485 @default.
- W2075176502 cites W1993018628 @default.
- W2075176502 cites W1998424891 @default.
- W2075176502 cites W2000731013 @default.
- W2075176502 cites W2007732617 @default.
- W2075176502 cites W2010337360 @default.
- W2075176502 cites W2018092532 @default.
- W2075176502 cites W2018439593 @default.
- W2075176502 cites W2021534493 @default.
- W2075176502 cites W2021976055 @default.
- W2075176502 cites W2022502870 @default.
- W2075176502 cites W2028391534 @default.
- W2075176502 cites W2031933321 @default.
- W2075176502 cites W2033990154 @default.
- W2075176502 cites W2038197013 @default.
- W2075176502 cites W2044247403 @default.
- W2075176502 cites W2044940178 @default.
- W2075176502 cites W2046412723 @default.
- W2075176502 cites W2083668967 @default.
- W2075176502 cites W2091103045 @default.
- W2075176502 cites W2094642658 @default.
- W2075176502 cites W2164318957 @default.
- W2075176502 cites W2174215792 @default.
- W2075176502 cites W2224726534 @default.
- W2075176502 cites W2952266619 @default.
- W2075176502 doi "https://doi.org/10.1021/jp970450m" @default.
- W2075176502 hasPublicationYear "1997" @default.
- W2075176502 type Work @default.
- W2075176502 sameAs 2075176502 @default.
- W2075176502 citedByCount "1" @default.
- W2075176502 crossrefType "journal-article" @default.
- W2075176502 hasAuthorship W2075176502A5024937078 @default.
- W2075176502 hasConcept C145148216 @default.
- W2075176502 hasConcept C147597530 @default.
- W2075176502 hasConcept C147789679 @default.
- W2075176502 hasConcept C150394285 @default.
- W2075176502 hasConcept C162711632 @default.
- W2075176502 hasConcept C178790620 @default.
- W2075176502 hasConcept C183971685 @default.
- W2075176502 hasConcept C185592680 @default.
- W2075176502 hasConcept C2781442258 @default.
- W2075176502 hasConcept C32909587 @default.
- W2075176502 hasConceptScore W2075176502C145148216 @default.
- W2075176502 hasConceptScore W2075176502C147597530 @default.
- W2075176502 hasConceptScore W2075176502C147789679 @default.
- W2075176502 hasConceptScore W2075176502C150394285 @default.
- W2075176502 hasConceptScore W2075176502C162711632 @default.
- W2075176502 hasConceptScore W2075176502C178790620 @default.
- W2075176502 hasConceptScore W2075176502C183971685 @default.
- W2075176502 hasConceptScore W2075176502C185592680 @default.
- W2075176502 hasConceptScore W2075176502C2781442258 @default.
- W2075176502 hasConceptScore W2075176502C32909587 @default.
- W2075176502 hasIssue "27" @default.
- W2075176502 hasLocation W20751765021 @default.
- W2075176502 hasOpenAccess W2075176502 @default.
- W2075176502 hasPrimaryLocation W20751765021 @default.
- W2075176502 hasRelatedWork W1970145690 @default.
- W2075176502 hasRelatedWork W1971461687 @default.
- W2075176502 hasRelatedWork W2010850091 @default.
- W2075176502 hasRelatedWork W2012003506 @default.
- W2075176502 hasRelatedWork W2034364300 @default.
- W2075176502 hasRelatedWork W2047896711 @default.
- W2075176502 hasRelatedWork W2258772729 @default.
- W2075176502 hasRelatedWork W2313013451 @default.
- W2075176502 hasRelatedWork W2322229116 @default.
- W2075176502 hasRelatedWork W1975290426 @default.
- W2075176502 hasVolume "101" @default.
- W2075176502 isParatext "false" @default.
- W2075176502 isRetracted "false" @default.
- W2075176502 magId "2075176502" @default.
- W2075176502 workType "article" @default.