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• W2075233777 abstract "We demonstrate for the first time, a 20nm FinFET using a new, conformal, and damage-free monolayer doping technique. Unlike conventional ion-implantation, this approach makes use of a dopant-containing precursor to uniformly assemble a monolayer of covalently bonded dopants to enable an ultra-shallow (X <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>j</sub> ~5nm) and abrupt (0.6nm/dec) junction formation around a high aspect ratio fin structure, which overcomes the possible FinFET pitch scaling limitations of traditional doping techniques. FinFETs featuring MLD junctions were successfully demonstrated with good electrostatics control down to a gate length of ~40nm. With further scaling of the fin width, sub-threshold swing and threshold voltage roll-off can be further improved. This low damage and conformal doping is a promising technique to address key FinFET scaling issues associated with parasitic series resistance and short channel control for the 15nm node and beyond." @default.
• W2075233777 created "2016-06-24" @default.
• W2075233777 creator A5005781149 @default.
• W2075233777 creator A5007411459 @default.
• W2075233777 creator A5013809531 @default.
• W2075233777 creator A5018071390 @default.
• W2075233777 creator A5021035929 @default.
• W2075233777 creator A5022879773 @default.
• W2075233777 creator A5023911907 @default.
• W2075233777 creator A5030704805 @default.
• W2075233777 creator A5033103956 @default.
• W2075233777 creator A5043791886 @default.
• W2075233777 creator A5045902660 @default.
• W2075233777 creator A5048224457 @default.
• W2075233777 creator A5054493315 @default.
• W2075233777 creator A5054674996 @default.
• W2075233777 creator A5077590969 @default.
• W2075233777 date "2011-12-01" @default.
• W2075233777 modified "2023-09-28" @default.
• W2075233777 title "300mm FinFET results utilizing conformal, damage free, ultra shallow junctions (X<inf>j</inf>&#x223C;5nm) formed with molecular monolayer doping technique" @default.
• W2075233777 cites W2167243995 @default.
• W2075233777 cites W3106036789 @default.
• W2075233777 doi "https://doi.org/10.1109/iedm.2011.6131679" @default.
• W2075233777 hasPublicationYear "2011" @default.
• W2075233777 type Work @default.
• W2075233777 sameAs 2075233777 @default.
• W2075233777 citedByCount "23" @default.
• W2075233777 countsByYear W20752337772013 @default.
• W2075233777 countsByYear W20752337772014 @default.
• W2075233777 countsByYear W20752337772015 @default.
• W2075233777 countsByYear W20752337772016 @default.
• W2075233777 countsByYear W20752337772017 @default.
• W2075233777 countsByYear W20752337772018 @default.
• W2075233777 countsByYear W20752337772019 @default.
• W2075233777 countsByYear W20752337772020 @default.
• W2075233777 countsByYear W20752337772021 @default.
• W2075233777 countsByYear W20752337772022 @default.
• W2075233777 countsByYear W20752337772023 @default.
• W2075233777 crossrefType "proceedings-article" @default.
• W2075233777 hasAuthorship W2075233777A5005781149 @default.
• W2075233777 hasAuthorship W2075233777A5007411459 @default.
• W2075233777 hasAuthorship W2075233777A5013809531 @default.
• W2075233777 hasAuthorship W2075233777A5018071390 @default.
• W2075233777 hasAuthorship W2075233777A5021035929 @default.
• W2075233777 hasAuthorship W2075233777A5022879773 @default.
• W2075233777 hasAuthorship W2075233777A5023911907 @default.
• W2075233777 hasAuthorship W2075233777A5030704805 @default.
• W2075233777 hasAuthorship W2075233777A5033103956 @default.
• W2075233777 hasAuthorship W2075233777A5043791886 @default.
• W2075233777 hasAuthorship W2075233777A5045902660 @default.
• W2075233777 hasAuthorship W2075233777A5048224457 @default.
• W2075233777 hasAuthorship W2075233777A5054493315 @default.
• W2075233777 hasAuthorship W2075233777A5054674996 @default.
• W2075233777 hasAuthorship W2075233777A5077590969 @default.
• W2075233777 hasConcept C11918236 @default.
• W2075233777 hasConcept C119599485 @default.
• W2075233777 hasConcept C121332964 @default.
• W2075233777 hasConcept C127413603 @default.
• W2075233777 hasConcept C134306372 @default.
• W2075233777 hasConcept C14485415 @default.
• W2075233777 hasConcept C165801399 @default.
• W2075233777 hasConcept C171250308 @default.
• W2075233777 hasConcept C172385210 @default.
• W2075233777 hasConcept C191952053 @default.
• W2075233777 hasConcept C192562407 @default.
• W2075233777 hasConcept C195370968 @default.
• W2075233777 hasConcept C2524010 @default.
• W2075233777 hasConcept C2778413303 @default.
• W2075233777 hasConcept C33923547 @default.
• W2075233777 hasConcept C49040817 @default.
• W2075233777 hasConcept C57863236 @default.
• W2075233777 hasConcept C62520636 @default.
• W2075233777 hasConcept C62611344 @default.
• W2075233777 hasConcept C7070889 @default.
• W2075233777 hasConcept C98214594 @default.
• W2075233777 hasConcept C99844830 @default.
• W2075233777 hasConceptScore W2075233777C11918236 @default.
• W2075233777 hasConceptScore W2075233777C119599485 @default.
• W2075233777 hasConceptScore W2075233777C121332964 @default.
• W2075233777 hasConceptScore W2075233777C127413603 @default.
• W2075233777 hasConceptScore W2075233777C134306372 @default.
• W2075233777 hasConceptScore W2075233777C14485415 @default.
• W2075233777 hasConceptScore W2075233777C165801399 @default.
• W2075233777 hasConceptScore W2075233777C171250308 @default.
• W2075233777 hasConceptScore W2075233777C172385210 @default.
• W2075233777 hasConceptScore W2075233777C191952053 @default.
• W2075233777 hasConceptScore W2075233777C192562407 @default.
• W2075233777 hasConceptScore W2075233777C195370968 @default.
• W2075233777 hasConceptScore W2075233777C2524010 @default.
• W2075233777 hasConceptScore W2075233777C2778413303 @default.
• W2075233777 hasConceptScore W2075233777C33923547 @default.
• W2075233777 hasConceptScore W2075233777C49040817 @default.
• W2075233777 hasConceptScore W2075233777C57863236 @default.
• W2075233777 hasConceptScore W2075233777C62520636 @default.
• W2075233777 hasConceptScore W2075233777C62611344 @default.
• W2075233777 hasConceptScore W2075233777C7070889 @default.
• W2075233777 hasConceptScore W2075233777C98214594 @default.
• W2075233777 hasConceptScore W2075233777C99844830 @default.
• W2075233777 hasLocation W20752337771 @default.
• W2075233777 hasOpenAccess W2075233777 @default.

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