Matches in SemOpenAlex for { <https://semopenalex.org/work/W2075249863> ?p ?o ?g. }
Showing items 1 to 58 of
58
with 100 items per page.
- W2075249863 abstract "In order to shrink down the contact hole which is usually much larger than other patterns, the resist reflow process (RRP) has been widely used. Various types, shapes, and pitches of contact hole arrays are made by RRP, but RRP was limited to be used only for contact hole patterns. The same RRP method is expanded to 32 nm node arbitrary and complex patterns including dense line and space patterns. There might be simple 1-dimensional patterns, but 2-dimensional proximity conflict patterns are difficult to make in general. Specially, the data split with proximity correction needs a lot of attention for double patterning. 32 nm node arbitrary patterns can be easily made by using RRP without complex data split." @default.
- W2075249863 created "2016-06-24" @default.
- W2075249863 creator A5013627493 @default.
- W2075249863 creator A5041572321 @default.
- W2075249863 creator A5077623978 @default.
- W2075249863 date "2008-03-14" @default.
- W2075249863 modified "2023-09-23" @default.
- W2075249863 title "Resist reflow process for arbitrary 32 nm node pattern" @default.
- W2075249863 doi "https://doi.org/10.1117/12.772130" @default.
- W2075249863 hasPublicationYear "2008" @default.
- W2075249863 type Work @default.
- W2075249863 sameAs 2075249863 @default.
- W2075249863 citedByCount "0" @default.
- W2075249863 crossrefType "proceedings-article" @default.
- W2075249863 hasAuthorship W2075249863A5013627493 @default.
- W2075249863 hasAuthorship W2075249863A5041572321 @default.
- W2075249863 hasAuthorship W2075249863A5077623978 @default.
- W2075249863 hasConcept C111919701 @default.
- W2075249863 hasConcept C121332964 @default.
- W2075249863 hasConcept C171250308 @default.
- W2075249863 hasConcept C177409738 @default.
- W2075249863 hasConcept C192562407 @default.
- W2075249863 hasConcept C24890656 @default.
- W2075249863 hasConcept C2779227376 @default.
- W2075249863 hasConcept C41008148 @default.
- W2075249863 hasConcept C53524968 @default.
- W2075249863 hasConcept C62611344 @default.
- W2075249863 hasConcept C78371743 @default.
- W2075249863 hasConcept C98045186 @default.
- W2075249863 hasConceptScore W2075249863C111919701 @default.
- W2075249863 hasConceptScore W2075249863C121332964 @default.
- W2075249863 hasConceptScore W2075249863C171250308 @default.
- W2075249863 hasConceptScore W2075249863C177409738 @default.
- W2075249863 hasConceptScore W2075249863C192562407 @default.
- W2075249863 hasConceptScore W2075249863C24890656 @default.
- W2075249863 hasConceptScore W2075249863C2779227376 @default.
- W2075249863 hasConceptScore W2075249863C41008148 @default.
- W2075249863 hasConceptScore W2075249863C53524968 @default.
- W2075249863 hasConceptScore W2075249863C62611344 @default.
- W2075249863 hasConceptScore W2075249863C78371743 @default.
- W2075249863 hasConceptScore W2075249863C98045186 @default.
- W2075249863 hasLocation W20752498631 @default.
- W2075249863 hasOpenAccess W2075249863 @default.
- W2075249863 hasPrimaryLocation W20752498631 @default.
- W2075249863 hasRelatedWork W1994795669 @default.
- W2075249863 hasRelatedWork W2009562288 @default.
- W2075249863 hasRelatedWork W2019303455 @default.
- W2075249863 hasRelatedWork W2027384929 @default.
- W2075249863 hasRelatedWork W2053620486 @default.
- W2075249863 hasRelatedWork W2075249863 @default.
- W2075249863 hasRelatedWork W2104017208 @default.
- W2075249863 hasRelatedWork W2163407921 @default.
- W2075249863 hasRelatedWork W2791167566 @default.
- W2075249863 hasRelatedWork W4367307989 @default.
- W2075249863 isParatext "false" @default.
- W2075249863 isRetracted "false" @default.
- W2075249863 magId "2075249863" @default.
- W2075249863 workType "article" @default.