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- W2075398780 abstract "Femtosecond laser pulses are irradiated on a single-side polished single-crystalline silicon wafer. Metamorphic zone appears around the ablated zone and the morphology changes gradually in the metamorphic zone. Typical phenomena of thermal ablation such as melt-resolidification and subtransparent glassy materials occur in the marginal area of the ablated zone. No apparent changes are found among microscopic morphologies of the ablated, metamorphic and unirradiated zones. There are flaws and spallations on the smooth back surface of the wafer, which are caused by the stress inside the sample. Nanomechanical properties of the sample surface hardly change in the small scope of the backside around the ablated zone. While regular changes occur in large scope, which is the conjunct result of such stresses caused by many different collateral damages." @default.
- W2075398780 created "2016-06-24" @default.
- W2075398780 creator A5010363081 @default.
- W2075398780 creator A5014249824 @default.
- W2075398780 creator A5014973406 @default.
- W2075398780 creator A5016162807 @default.
- W2075398780 creator A5050251957 @default.
- W2075398780 creator A5056168495 @default.
- W2075398780 creator A5091657842 @default.
- W2075398780 date "2006-12-01" @default.
- W2075398780 modified "2023-09-25" @default.
- W2075398780 title "The Study of Collateral Damages in the Process of Femtosecond Laser Micromachining Single-Crystalline Silicon" @default.
- W2075398780 cites W1984193598 @default.
- W2075398780 cites W1994672641 @default.
- W2075398780 cites W1995883598 @default.
- W2075398780 cites W2022126255 @default.
- W2075398780 cites W2047571370 @default.
- W2075398780 cites W2061505393 @default.
- W2075398780 cites W2137959463 @default.
- W2075398780 doi "https://doi.org/10.4028/www.scientific.net/msf.532-533.560" @default.
- W2075398780 hasPublicationYear "2006" @default.
- W2075398780 type Work @default.
- W2075398780 sameAs 2075398780 @default.
- W2075398780 citedByCount "1" @default.
- W2075398780 countsByYear W20753987802021 @default.
- W2075398780 crossrefType "journal-article" @default.
- W2075398780 hasAuthorship W2075398780A5010363081 @default.
- W2075398780 hasAuthorship W2075398780A5014249824 @default.
- W2075398780 hasAuthorship W2075398780A5014973406 @default.
- W2075398780 hasAuthorship W2075398780A5016162807 @default.
- W2075398780 hasAuthorship W2075398780A5050251957 @default.
- W2075398780 hasAuthorship W2075398780A5056168495 @default.
- W2075398780 hasAuthorship W2075398780A5091657842 @default.
- W2075398780 hasConcept C111337013 @default.
- W2075398780 hasConcept C120665830 @default.
- W2075398780 hasConcept C121332964 @default.
- W2075398780 hasConcept C127413603 @default.
- W2075398780 hasConcept C136525101 @default.
- W2075398780 hasConcept C142724271 @default.
- W2075398780 hasConcept C145667562 @default.
- W2075398780 hasConcept C146978453 @default.
- W2075398780 hasConcept C159985019 @default.
- W2075398780 hasConcept C160671074 @default.
- W2075398780 hasConcept C167735695 @default.
- W2075398780 hasConcept C185544564 @default.
- W2075398780 hasConcept C192562407 @default.
- W2075398780 hasConcept C204787440 @default.
- W2075398780 hasConcept C2778902805 @default.
- W2075398780 hasConcept C2779188808 @default.
- W2075398780 hasConcept C2779667780 @default.
- W2075398780 hasConcept C49040817 @default.
- W2075398780 hasConcept C520434653 @default.
- W2075398780 hasConcept C544956773 @default.
- W2075398780 hasConcept C71924100 @default.
- W2075398780 hasConceptScore W2075398780C111337013 @default.
- W2075398780 hasConceptScore W2075398780C120665830 @default.
- W2075398780 hasConceptScore W2075398780C121332964 @default.
- W2075398780 hasConceptScore W2075398780C127413603 @default.
- W2075398780 hasConceptScore W2075398780C136525101 @default.
- W2075398780 hasConceptScore W2075398780C142724271 @default.
- W2075398780 hasConceptScore W2075398780C145667562 @default.
- W2075398780 hasConceptScore W2075398780C146978453 @default.
- W2075398780 hasConceptScore W2075398780C159985019 @default.
- W2075398780 hasConceptScore W2075398780C160671074 @default.
- W2075398780 hasConceptScore W2075398780C167735695 @default.
- W2075398780 hasConceptScore W2075398780C185544564 @default.
- W2075398780 hasConceptScore W2075398780C192562407 @default.
- W2075398780 hasConceptScore W2075398780C204787440 @default.
- W2075398780 hasConceptScore W2075398780C2778902805 @default.
- W2075398780 hasConceptScore W2075398780C2779188808 @default.
- W2075398780 hasConceptScore W2075398780C2779667780 @default.
- W2075398780 hasConceptScore W2075398780C49040817 @default.
- W2075398780 hasConceptScore W2075398780C520434653 @default.
- W2075398780 hasConceptScore W2075398780C544956773 @default.
- W2075398780 hasConceptScore W2075398780C71924100 @default.
- W2075398780 hasLocation W20753987801 @default.
- W2075398780 hasOpenAccess W2075398780 @default.
- W2075398780 hasPrimaryLocation W20753987801 @default.
- W2075398780 hasRelatedWork W1987297713 @default.
- W2075398780 hasRelatedWork W2061965696 @default.
- W2075398780 hasRelatedWork W2063169793 @default.
- W2075398780 hasRelatedWork W2092240646 @default.
- W2075398780 hasRelatedWork W2121690949 @default.
- W2075398780 hasRelatedWork W2373247025 @default.
- W2075398780 hasRelatedWork W2377830715 @default.
- W2075398780 hasRelatedWork W633874690 @default.
- W2075398780 hasRelatedWork W2094627421 @default.
- W2075398780 hasRelatedWork W2103781697 @default.
- W2075398780 isParatext "false" @default.
- W2075398780 isRetracted "false" @default.
- W2075398780 magId "2075398780" @default.
- W2075398780 workType "article" @default.