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- W2075602958 abstract "The first surface acoustic wave resonators fabricated using a ZnO-on-Si layered structure are described and characterized. The optimum location of the transducers in the resonant cavity and the general performance are first cited for devices containing isoloated aluminum, isolated Cr/Au, and shorted Cr/Au reflector strips. The transmission characteristics and reflecting properties of the shorted Cr/Au configuration are then examined in more detail. An unloaded Q of 3100 has been obtained with the shorted Cr/Au configuration at a resonant frequency of 105.4 MHz." @default.
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- W2075602958 date "1980-10-15" @default.
- W2075602958 modified "2023-10-18" @default.
- W2075602958 title "Zinc-oxide–on–silicon surface acoustic wave resonators" @default.
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- W2075602958 doi "https://doi.org/10.1063/1.92045" @default.
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