FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2075623037> ?p ?o ?g. }

• W2075623037 endingPage "H823" @default.
• W2075623037 startingPage "H823" @default.
• W2075623037 abstract "Tantalum carbonitride (TaCN) thin films were deposited on surface with plasma enhanced atomic layer deposition (PEALD) and thermal atomic layer deposition using tert-butylimido[tri-diethylamido]tantalum (TBTDET) and ammonia. It was confirmed that the film was a mixture of TaC, TaN, , and with oxide phase formed from the postdeposition uptake of oxygen from the air. It was shown that electrical properties of TaCN film were affected by the atomic composition and phase composition in the film. Effect of the process parameters, such as deposition temperature and plasma power on film composition and electronic properties was studied. Formation of carbide phase was suppressed in the TaCN film deposited with ammonia. As the deposition temperature was increased, the carbide phase and TaN phase in the film were increased, phase in the film was decreased and the film resistivity was decreased. The uptake of oxygen after deposition was about 5 atom % with the PEALD process and about 30 atom % with thermal ALD process and it is believed that denser film could be obtained with plasma. The resistivity of TaCN film deposited at and using PEALD process was about ." @default.
• W2075623037 created "2016-06-24" @default.
• W2075623037 creator A5002408487 @default.
• W2075623037 creator A5045008302 @default.
• W2075623037 date "2008-01-01" @default.
• W2075623037 modified "2023-10-16" @default.
• W2075623037 title "Phase Formation in the Tantalum Carbonitride Film Deposited with Atomic Layer Deposition Using Ammonia" @default.
• W2075623037 cites W1965452459 @default.
• W2075623037 cites W1969123512 @default.
• W2075623037 cites W1987358011 @default.
• W2075623037 cites W1987462145 @default.
• W2075623037 cites W2026396549 @default.
• W2075623037 cites W2051346942 @default.
• W2075623037 cites W2054744235 @default.
• W2075623037 cites W2054987143 @default.
• W2075623037 cites W2063650324 @default.
• W2075623037 cites W2066649429 @default.
• W2075623037 cites W2079719052 @default.
• W2075623037 cites W2083936856 @default.
• W2075623037 cites W2098436965 @default.
• W2075623037 cites W2132789743 @default.
• W2075623037 cites W2156844210 @default.
• W2075623037 doi "https://doi.org/10.1149/1.2967333" @default.
• W2075623037 hasPublicationYear "2008" @default.
• W2075623037 type Work @default.
• W2075623037 sameAs 2075623037 @default.
• W2075623037 citedByCount "23" @default.
• W2075623037 countsByYear W20756230372012 @default.
• W2075623037 countsByYear W20756230372013 @default.
• W2075623037 countsByYear W20756230372016 @default.
• W2075623037 countsByYear W20756230372018 @default.
• W2075623037 countsByYear W20756230372021 @default.
• W2075623037 countsByYear W20756230372022 @default.
• W2075623037 crossrefType "journal-article" @default.
• W2075623037 hasAuthorship W2075623037A5002408487 @default.
• W2075623037 hasAuthorship W2075623037A5045008302 @default.
• W2075623037 hasBestOaLocation W20756230372 @default.
• W2075623037 hasConcept C107872376 @default.
• W2075623037 hasConcept C113196181 @default.
• W2075623037 hasConcept C119599485 @default.
• W2075623037 hasConcept C127413603 @default.
• W2075623037 hasConcept C151730666 @default.
• W2075623037 hasConcept C171250308 @default.
• W2075623037 hasConcept C178790620 @default.
• W2075623037 hasConcept C185592680 @default.
• W2075623037 hasConcept C19067145 @default.
• W2075623037 hasConcept C191897082 @default.
• W2075623037 hasConcept C192562407 @default.
• W2075623037 hasConcept C2778112282 @default.
• W2075623037 hasConcept C2779227376 @default.
• W2075623037 hasConcept C2816523 @default.
• W2075623037 hasConcept C42360764 @default.
• W2075623037 hasConcept C44280652 @default.
• W2075623037 hasConcept C514619126 @default.
• W2075623037 hasConcept C5335593 @default.
• W2075623037 hasConcept C64297162 @default.
• W2075623037 hasConcept C69544855 @default.
• W2075623037 hasConcept C69990965 @default.
• W2075623037 hasConcept C86803240 @default.
• W2075623037 hasConceptScore W2075623037C107872376 @default.
• W2075623037 hasConceptScore W2075623037C113196181 @default.
• W2075623037 hasConceptScore W2075623037C119599485 @default.
• W2075623037 hasConceptScore W2075623037C127413603 @default.
• W2075623037 hasConceptScore W2075623037C151730666 @default.
• W2075623037 hasConceptScore W2075623037C171250308 @default.
• W2075623037 hasConceptScore W2075623037C178790620 @default.
• W2075623037 hasConceptScore W2075623037C185592680 @default.
• W2075623037 hasConceptScore W2075623037C19067145 @default.
• W2075623037 hasConceptScore W2075623037C191897082 @default.
• W2075623037 hasConceptScore W2075623037C192562407 @default.
• W2075623037 hasConceptScore W2075623037C2778112282 @default.
• W2075623037 hasConceptScore W2075623037C2779227376 @default.
• W2075623037 hasConceptScore W2075623037C2816523 @default.
• W2075623037 hasConceptScore W2075623037C42360764 @default.
• W2075623037 hasConceptScore W2075623037C44280652 @default.
• W2075623037 hasConceptScore W2075623037C514619126 @default.
• W2075623037 hasConceptScore W2075623037C5335593 @default.
• W2075623037 hasConceptScore W2075623037C64297162 @default.
• W2075623037 hasConceptScore W2075623037C69544855 @default.
• W2075623037 hasConceptScore W2075623037C69990965 @default.
• W2075623037 hasConceptScore W2075623037C86803240 @default.
• W2075623037 hasIssue "10" @default.
• W2075623037 hasLocation W20756230371 @default.
• W2075623037 hasLocation W20756230372 @default.
• W2075623037 hasOpenAccess W2075623037 @default.
• W2075623037 hasPrimaryLocation W20756230371 @default.
• W2075623037 hasRelatedWork W2005595384 @default.
• W2075623037 hasRelatedWork W2047186669 @default.
• W2075623037 hasRelatedWork W2051926442 @default.
• W2075623037 hasRelatedWork W2083664587 @default.
• W2075623037 hasRelatedWork W2126362014 @default.
• W2075623037 hasRelatedWork W2156844210 @default.
• W2075623037 hasRelatedWork W2468455576 @default.
• W2075623037 hasRelatedWork W2599209401 @default.
• W2075623037 hasRelatedWork W2601011046 @default.
• W2075623037 hasRelatedWork W1733954813 @default.
• W2075623037 hasVolume "155" @default.
• W2075623037 isParatext "false" @default.

• next