Matches in SemOpenAlex for { <https://semopenalex.org/work/W2075634566> ?p ?o ?g. }
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- W2075634566 endingPage "2089" @default.
- W2075634566 startingPage "2084" @default.
- W2075634566 abstract "Heteroepitaxial growth of 3C-SiC on Si(111) and Si (100) at temperatures lower than 800 °C was investigated by using a low-temperature crystalline film formation method, reactive-ion-beam deposition. This method uses low-energy ionized species extracted from reactive electron-cyclotron-resonance plasma of SiH4 and C2H4. In the case of direct film growth on clean Si substrates, 3C-SiC film growth can be achieved at the low temperature of 770 °C±12° by adjusting the ion energy to 200 eV. To improve crystalline quality, Si homoepitaxial and Si-C transition layers, about 2–3 and 3–4 nm in thickness, respectively, were formed in the initial heteroepitaxial growth stage. Using these thin layers, 200-nm-thick 3C-SiC/Si(111) heteroepitaxial films with about 63 cm2 /V s (300 K) and about 21 cm2 /V s (700 K) in Hall mobility can be obtained at the same low temperature, although they included twins." @default.
- W2075634566 created "2016-06-24" @default.
- W2075634566 creator A5019692161 @default.
- W2075634566 date "1989-03-01" @default.
- W2075634566 modified "2023-09-25" @default.
- W2075634566 title "Low‐temperature 3C‐SiC heteroepitaxial film growth on Si by reactive‐ion‐beam deposition" @default.
- W2075634566 cites W1964544806 @default.
- W2075634566 cites W1977005867 @default.
- W2075634566 cites W1981541018 @default.
- W2075634566 cites W1989218438 @default.
- W2075634566 cites W2000114312 @default.
- W2075634566 cites W2007644962 @default.
- W2075634566 cites W2008924171 @default.
- W2075634566 cites W2012368321 @default.
- W2075634566 cites W2015453652 @default.
- W2075634566 cites W2026383379 @default.
- W2075634566 cites W2031522718 @default.
- W2075634566 cites W2033692124 @default.
- W2075634566 cites W2034802644 @default.
- W2075634566 cites W2042469719 @default.
- W2075634566 cites W2050345522 @default.
- W2075634566 cites W2050580051 @default.
- W2075634566 cites W2064327221 @default.
- W2075634566 cites W2075954851 @default.
- W2075634566 cites W2079840699 @default.
- W2075634566 cites W2082132839 @default.
- W2075634566 cites W2083181058 @default.
- W2075634566 cites W2095059296 @default.
- W2075634566 doi "https://doi.org/10.1063/1.342854" @default.
- W2075634566 hasPublicationYear "1989" @default.
- W2075634566 type Work @default.
- W2075634566 sameAs 2075634566 @default.
- W2075634566 citedByCount "16" @default.
- W2075634566 crossrefType "journal-article" @default.
- W2075634566 hasAuthorship W2075634566A5019692161 @default.
- W2075634566 hasBestOaLocation W20756345661 @default.
- W2075634566 hasConcept C113196181 @default.
- W2075634566 hasConcept C145148216 @default.
- W2075634566 hasConcept C151730666 @default.
- W2075634566 hasConcept C171250308 @default.
- W2075634566 hasConcept C175361016 @default.
- W2075634566 hasConcept C178790620 @default.
- W2075634566 hasConcept C185592680 @default.
- W2075634566 hasConcept C19067145 @default.
- W2075634566 hasConcept C192562407 @default.
- W2075634566 hasConcept C2781463530 @default.
- W2075634566 hasConcept C2816523 @default.
- W2075634566 hasConcept C43617362 @default.
- W2075634566 hasConcept C49040817 @default.
- W2075634566 hasConcept C50774322 @default.
- W2075634566 hasConcept C64297162 @default.
- W2075634566 hasConcept C79794668 @default.
- W2075634566 hasConcept C86803240 @default.
- W2075634566 hasConceptScore W2075634566C113196181 @default.
- W2075634566 hasConceptScore W2075634566C145148216 @default.
- W2075634566 hasConceptScore W2075634566C151730666 @default.
- W2075634566 hasConceptScore W2075634566C171250308 @default.
- W2075634566 hasConceptScore W2075634566C175361016 @default.
- W2075634566 hasConceptScore W2075634566C178790620 @default.
- W2075634566 hasConceptScore W2075634566C185592680 @default.
- W2075634566 hasConceptScore W2075634566C19067145 @default.
- W2075634566 hasConceptScore W2075634566C192562407 @default.
- W2075634566 hasConceptScore W2075634566C2781463530 @default.
- W2075634566 hasConceptScore W2075634566C2816523 @default.
- W2075634566 hasConceptScore W2075634566C43617362 @default.
- W2075634566 hasConceptScore W2075634566C49040817 @default.
- W2075634566 hasConceptScore W2075634566C50774322 @default.
- W2075634566 hasConceptScore W2075634566C64297162 @default.
- W2075634566 hasConceptScore W2075634566C79794668 @default.
- W2075634566 hasConceptScore W2075634566C86803240 @default.
- W2075634566 hasIssue "5" @default.
- W2075634566 hasLocation W20756345661 @default.
- W2075634566 hasOpenAccess W2075634566 @default.
- W2075634566 hasPrimaryLocation W20756345661 @default.
- W2075634566 hasRelatedWork W1566961201 @default.
- W2075634566 hasRelatedWork W180632857 @default.
- W2075634566 hasRelatedWork W1970428755 @default.
- W2075634566 hasRelatedWork W1983472299 @default.
- W2075634566 hasRelatedWork W2004848609 @default.
- W2075634566 hasRelatedWork W2051060711 @default.
- W2075634566 hasRelatedWork W2107029939 @default.
- W2075634566 hasRelatedWork W2375648871 @default.
- W2075634566 hasRelatedWork W4321517408 @default.
- W2075634566 hasRelatedWork W2132219547 @default.
- W2075634566 hasVolume "65" @default.
- W2075634566 isParatext "false" @default.
- W2075634566 isRetracted "false" @default.
- W2075634566 magId "2075634566" @default.
- W2075634566 workType "article" @default.