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• W2075680009 abstract "Silicon nanowire FET arrays have been designed and fabricated with a relatively low-cost, but wafer-scale process without the use of e-beam lithography. An optimized fabrication process that improves the etching uniformity of NWs and also provides a better control of the NW dimensions is presented. The fabricated devices are electrically characterized and their performance is discussed. A dedicated measurement set-up and a preparation procedure to employ these SiNW FET arrays for real time monitoring of the substance P activation of neurokinin (NK1) receptors in HEK 293 cells are presented." @default.
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• W2075680009 date "2012-01-01" @default.
• W2075680009 modified "2023-09-27" @default.
• W2075680009 title "Silicon nanowire FET arrays for real time detection of chemical activation of cells" @default.
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• W2075680009 doi "https://doi.org/10.1109/memsys.2012.6170424" @default.
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