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- W2075707675 abstract "Parylene films deposited on liquid surface induce film tension that changes the liquid shape. We observed that the force acting on the surface of Parylene-C encapsulated liquid bodies increased continuously during Parylene deposition process and reached final values of magnitude more than 700 ¿N/mm for a 1 ¿m thick film, 20 times larger than the surface tension of the encapsulated liquid. This surface force can only be attributed to the tension of the Parylene films. This founding requires that in design of Parylene encapsulated liquid structures, Parylene film tension must be considered as the main factor that determines the structures' final shape." @default.
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- W2075707675 date "2010-01-01" @default.
- W2075707675 modified "2023-10-16" @default.
- W2075707675 title "Measurement of elastic tension of Parylene films deposited on liquid" @default.
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- W2075707675 doi "https://doi.org/10.1109/memsys.2010.5442443" @default.
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