FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2075751420> ?p ?o ?g. }

• W2075751420 endingPage "3370" @default.
• W2075751420 startingPage "3370" @default.
• W2075751420 abstract "Polycrystalline silicon (poly-Si) films have been prepared from fluorinated precursors by introducing a layer-by-layer technique into hydrogen-radical-enhanced chemical vapour deposition (HR-CVD). The degradation in crystallinity caused by phosphine doping was found to be compensated by this novel technique and a highly ordered structure with a strong (220) orientation was observed by X-ray diffraction (XRD) and transmission electron microscopy (TEM) measurements. The hydrogen was efficiently removed from the growing film and marked evolution of the SiH n stretching mode was observed in IR absorption measurements. The measurements of dark conductivity showed that the carrier conduction at room temperature was dominated by a process of thermionic emission over grain boundary barriers. The trapping states as well as the recombination centres at the grain boundary of the growing film were passivated with the aid of atomic hydrogen, and the resulting films showed higher photoconductivity with the ηµτ product of around 10 -4 cm 2 ·V -1 ." @default.
• W2075751420 created "2016-06-24" @default.
• W2075751420 creator A5048125757 @default.
• W2075751420 creator A5052304188 @default.
• W2075751420 creator A5064451214 @default.
• W2075751420 date "1993-08-01" @default.
• W2075751420 modified "2023-09-23" @default.
• W2075751420 title "Structural and Electrical Properties of n-Type Poly-Si Films Prepared by Layer-by-Layer Technique" @default.
• W2075751420 cites W1965097855 @default.
• W2075751420 cites W1982259583 @default.
• W2075751420 cites W2009498443 @default.
• W2075751420 cites W2023500507 @default.
• W2075751420 cites W2049915743 @default.
• W2075751420 cites W2051290783 @default.
• W2075751420 cites W2068356768 @default.
• W2075751420 cites W2074090331 @default.
• W2075751420 cites W2091797913 @default.
• W2075751420 cites W2126175641 @default.
• W2075751420 cites W2148244558 @default.
• W2075751420 cites W2150006630 @default.
• W2075751420 cites W2162337814 @default.
• W2075751420 doi "https://doi.org/10.1143/jjap.32.3370" @default.
• W2075751420 hasPublicationYear "1993" @default.
• W2075751420 type Work @default.
• W2075751420 sameAs 2075751420 @default.
• W2075751420 citedByCount "13" @default.
• W2075751420 crossrefType "journal-article" @default.
• W2075751420 hasAuthorship W2075751420A5048125757 @default.
• W2075751420 hasAuthorship W2075751420A5052304188 @default.
• W2075751420 hasAuthorship W2075751420A5064451214 @default.
• W2075751420 hasConcept C113196181 @default.
• W2075751420 hasConcept C121332964 @default.
• W2075751420 hasConcept C137637335 @default.
• W2075751420 hasConcept C143979616 @default.
• W2075751420 hasConcept C146088050 @default.
• W2075751420 hasConcept C147120987 @default.
• W2075751420 hasConcept C159985019 @default.
• W2075751420 hasConcept C171250308 @default.
• W2075751420 hasConcept C178790620 @default.
• W2075751420 hasConcept C185592680 @default.
• W2075751420 hasConcept C191897082 @default.
• W2075751420 hasConcept C192562407 @default.
• W2075751420 hasConcept C201999631 @default.
• W2075751420 hasConcept C2779227376 @default.
• W2075751420 hasConcept C2780565262 @default.
• W2075751420 hasConcept C43617362 @default.
• W2075751420 hasConcept C46275449 @default.
• W2075751420 hasConcept C47908070 @default.
• W2075751420 hasConcept C49040817 @default.
• W2075751420 hasConcept C512968161 @default.
• W2075751420 hasConcept C57410435 @default.
• W2075751420 hasConcept C57863236 @default.
• W2075751420 hasConcept C62520636 @default.
• W2075751420 hasConcept C87359718 @default.
• W2075751420 hasConcept C87976508 @default.
• W2075751420 hasConceptScore W2075751420C113196181 @default.
• W2075751420 hasConceptScore W2075751420C121332964 @default.
• W2075751420 hasConceptScore W2075751420C137637335 @default.
• W2075751420 hasConceptScore W2075751420C143979616 @default.
• W2075751420 hasConceptScore W2075751420C146088050 @default.
• W2075751420 hasConceptScore W2075751420C147120987 @default.
• W2075751420 hasConceptScore W2075751420C159985019 @default.
• W2075751420 hasConceptScore W2075751420C171250308 @default.
• W2075751420 hasConceptScore W2075751420C178790620 @default.
• W2075751420 hasConceptScore W2075751420C185592680 @default.
• W2075751420 hasConceptScore W2075751420C191897082 @default.
• W2075751420 hasConceptScore W2075751420C192562407 @default.
• W2075751420 hasConceptScore W2075751420C201999631 @default.
• W2075751420 hasConceptScore W2075751420C2779227376 @default.
• W2075751420 hasConceptScore W2075751420C2780565262 @default.
• W2075751420 hasConceptScore W2075751420C43617362 @default.
• W2075751420 hasConceptScore W2075751420C46275449 @default.
• W2075751420 hasConceptScore W2075751420C47908070 @default.
• W2075751420 hasConceptScore W2075751420C49040817 @default.
• W2075751420 hasConceptScore W2075751420C512968161 @default.
• W2075751420 hasConceptScore W2075751420C57410435 @default.
• W2075751420 hasConceptScore W2075751420C57863236 @default.
• W2075751420 hasConceptScore W2075751420C62520636 @default.
• W2075751420 hasConceptScore W2075751420C87359718 @default.
• W2075751420 hasConceptScore W2075751420C87976508 @default.
• W2075751420 hasIssue "8R" @default.
• W2075751420 hasLocation W20757514201 @default.
• W2075751420 hasOpenAccess W2075751420 @default.
• W2075751420 hasPrimaryLocation W20757514201 @default.
• W2075751420 hasRelatedWork W1970167003 @default.
• W2075751420 hasRelatedWork W2000361250 @default.
• W2075751420 hasRelatedWork W2062025426 @default.
• W2075751420 hasRelatedWork W2078227391 @default.
• W2075751420 hasRelatedWork W2080148406 @default.
• W2075751420 hasRelatedWork W2111609574 @default.
• W2075751420 hasRelatedWork W2341114821 @default.
• W2075751420 hasRelatedWork W2743194952 @default.
• W2075751420 hasRelatedWork W3127975502 @default.
• W2075751420 hasRelatedWork W4234913700 @default.
• W2075751420 hasVolume "32" @default.
• W2075751420 isParatext "false" @default.
• W2075751420 isRetracted "false" @default.
• W2075751420 magId "2075751420" @default.

• next