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- W2076013771 abstract "Abstract Nanostructured silicon as a material for thermoelectrics provides several advantages over conventional materials, such as bismuth telluride or lead telluride. The technological processing of silicon is well advanced due to the rapid development of microelectronics in recent decades. Silicon is largely available and environmentally friendly. The operating temperature of silicon thermoelectric generators is higher (>250 °C) compared to bismuth telluride. So far silicon is rarely used as a thermoelectric material because of its high thermal conductivity. The figure of merit Z , which is the commonly used measure of the thermoelectric properties of materials, is thereby too small for device applications. In order to introduce silicon as an efficient thermoelectric material thermal conductivity has to be drastically reduced. Nanostructuring into wires, i.e. restriction of the device geometry in both dimensions perpendicular to the heat propagation path indicates a route towards lower thermal conductivity. In this study we investigated silicon pillars produced in a wafer-scale top-down process by ICP (Inductive Coupled Plasma) cryogenic dry etching followed by thermal oxidation and oxide stripping. The pillars have diameters from 2 μm down to 170 nm. Their heights vary from 26.7 μm to 32.1 μm. We measured the reduction of thermal conductivity due to decreasing of pillar diameter. 3 ω measurements were performed using a Wollaston probe with pillars of diameters down to 700 nm showing a reduction of thermal conductivity of 27% compared to bulk silicon." @default.
- W2076013771 created "2016-06-24" @default.
- W2076013771 creator A5009439533 @default.
- W2076013771 creator A5015838927 @default.
- W2076013771 creator A5027087490 @default.
- W2076013771 creator A5084421683 @default.
- W2076013771 creator A5084594213 @default.
- W2076013771 date "2011-02-01" @default.
- W2076013771 modified "2023-09-30" @default.
- W2076013771 title "Measurements of thermoelectric properties of silicon pillars" @default.
- W2076013771 cites W1988043732 @default.
- W2076013771 cites W2000304035 @default.
- W2076013771 cites W2009900668 @default.
- W2076013771 cites W2018189177 @default.
- W2076013771 cites W2019606441 @default.
- W2076013771 cites W2022028280 @default.
- W2076013771 cites W2028285928 @default.
- W2076013771 cites W2042056247 @default.
- W2076013771 cites W2070093297 @default.
- W2076013771 cites W2079808007 @default.
- W2076013771 cites W2152431951 @default.
- W2076013771 cites W2168615523 @default.
- W2076013771 cites W2321422392 @default.
- W2076013771 cites W2497069106 @default.
- W2076013771 cites W2768415685 @default.
- W2076013771 doi "https://doi.org/10.1016/j.sna.2011.01.022" @default.
- W2076013771 hasPublicationYear "2011" @default.
- W2076013771 type Work @default.
- W2076013771 sameAs 2076013771 @default.
- W2076013771 citedByCount "6" @default.
- W2076013771 countsByYear W20760137712012 @default.
- W2076013771 countsByYear W20760137712014 @default.
- W2076013771 countsByYear W20760137712015 @default.
- W2076013771 countsByYear W20760137712017 @default.
- W2076013771 countsByYear W20760137712018 @default.
- W2076013771 crossrefType "journal-article" @default.
- W2076013771 hasAuthorship W2076013771A5009439533 @default.
- W2076013771 hasAuthorship W2076013771A5015838927 @default.
- W2076013771 hasAuthorship W2076013771A5027087490 @default.
- W2076013771 hasAuthorship W2076013771A5084421683 @default.
- W2076013771 hasAuthorship W2076013771A5084594213 @default.
- W2076013771 hasConcept C121332964 @default.
- W2076013771 hasConcept C127413603 @default.
- W2076013771 hasConcept C171250308 @default.
- W2076013771 hasConcept C192562407 @default.
- W2076013771 hasConcept C49040817 @default.
- W2076013771 hasConcept C544956773 @default.
- W2076013771 hasConcept C61696701 @default.
- W2076013771 hasConcept C63024428 @default.
- W2076013771 hasConcept C97355855 @default.
- W2076013771 hasConceptScore W2076013771C121332964 @default.
- W2076013771 hasConceptScore W2076013771C127413603 @default.
- W2076013771 hasConceptScore W2076013771C171250308 @default.
- W2076013771 hasConceptScore W2076013771C192562407 @default.
- W2076013771 hasConceptScore W2076013771C49040817 @default.
- W2076013771 hasConceptScore W2076013771C544956773 @default.
- W2076013771 hasConceptScore W2076013771C61696701 @default.
- W2076013771 hasConceptScore W2076013771C63024428 @default.
- W2076013771 hasConceptScore W2076013771C97355855 @default.
- W2076013771 hasLocation W20760137711 @default.
- W2076013771 hasOpenAccess W2076013771 @default.
- W2076013771 hasPrimaryLocation W20760137711 @default.
- W2076013771 hasRelatedWork W1986591367 @default.
- W2076013771 hasRelatedWork W2050890951 @default.
- W2076013771 hasRelatedWork W2074964635 @default.
- W2076013771 hasRelatedWork W2312552982 @default.
- W2076013771 hasRelatedWork W2366143041 @default.
- W2076013771 hasRelatedWork W2606749122 @default.
- W2076013771 hasRelatedWork W2773469196 @default.
- W2076013771 hasRelatedWork W2886292774 @default.
- W2076013771 hasRelatedWork W2948178240 @default.
- W2076013771 hasRelatedWork W2997628752 @default.
- W2076013771 isParatext "false" @default.
- W2076013771 isRetracted "false" @default.
- W2076013771 magId "2076013771" @default.
- W2076013771 workType "article" @default.