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• W2076028080 abstract "The data on electronic sputtering of insulators by ions and electrons is reviewed. A repulsive-dissociative electronic mechanism associated with trapped exciton states is discussed as the process through which energy is transferred from electronic excitation into nuclear motion. Such a model is suggested indirectly by luminescence, submonolayer desorption experiments and electronic relaxation of molecules in the gas phase. The sputtering yields observed are discussed in terms of this mechanism. It is seen that an understanding of exciton diffusion and the transport of the deposited energy on relaxation are required to describe the yields. Competition between luminescence and sputter ejection is also considered." @default.
• W2076028080 created "2016-06-24" @default.
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• W2076028080 date "1983-05-01" @default.
• W2076028080 modified "2023-09-26" @default.
• W2076028080 title "Sputtering of insulators due to electronic excitation, by fast ions and electrons" @default.
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• W2076028080 doi "https://doi.org/10.1016/0167-5087(83)90840-2" @default.
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