Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076056876> ?p ?o ?g. }
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- W2076056876 endingPage "92" @default.
- W2076056876 startingPage "83" @default.
- W2076056876 abstract "A study of the properties of TiO2 and MgF2 thin films deposited both by plasma ion assisted deposition (PIAD) and conventional electron beam evaporation in a Leybold APS 904 vacuum system is carried out. Experimental results for stress measurements of single films performed on a KLA-Tencor FLX-2320 system as well as for the film surface structure performed by AFM are reported. The presented experimental results for the studied films are discussed in terms of film columnar structure, surface free energy and sorption processes at the grain boundaries and columns. Both TiO2 and MgF2 deposited by PIAD have higher refractive indices and packing densities than by conventional processes. MgF2 films deposited by PIAD have higher optical absorption, which can substantially be reduced by adding oxygen during deposition. The AFM study corroborates that TiO2 films deposited by PIAD and conventionally have different structures. In both cases, however, the crystallization is still not fully completed. Annealing to 350°C leads to further crystallization in both films, though the crystallization achieved after heating differs significantly and is much more advanced in the PIAD case. All TiO2 films have tensile stress. The stress of TiO2 films deposited conventionally is influenced more rigorously by the air exposure than the PIAD films. Both film relaxation with time and film stress–temperature behaviour are explained following the grain boundary approach. All MgF2 films have tensile stress immediately after deposition. The stress decreases gradually with time and after 2 days the stress of conventionally deposited MgF2 thin films turns to compressive, while the stress of all PIAD MgF2 films remains tensile. The stress transformation is explained by the chemical absorption of water onto the film. MgF2 thin films also crystallize at temperatures above 250°C. After crystallization their internal stress does not change and the stress–temperature behaviour follows closely the linear stress–temperature model." @default.
- W2076056876 created "2016-06-24" @default.
- W2076056876 creator A5020954723 @default.
- W2076056876 creator A5031143193 @default.
- W2076056876 creator A5043041670 @default.
- W2076056876 creator A5039635747 @default.
- W2076056876 date "1999-03-01" @default.
- W2076056876 modified "2023-09-29" @default.
- W2076056876 title "Mechanical, optical and structural properties of TiO 2 and MgF 2 thin films deposited by plasma ion assisted deposition" @default.
- W2076056876 cites W1976668337 @default.
- W2076056876 cites W1982055669 @default.
- W2076056876 cites W1983024822 @default.
- W2076056876 cites W2007753792 @default.
- W2076056876 cites W2023844597 @default.
- W2076056876 cites W2047684896 @default.
- W2076056876 cites W2050050788 @default.
- W2076056876 cites W2112485534 @default.
- W2076056876 cites W2145881126 @default.
- W2076056876 cites W2162701325 @default.
- W2076056876 cites W2329282158 @default.
- W2076056876 doi "https://doi.org/10.1016/s0040-6090(98)01407-2" @default.
- W2076056876 hasPublicationYear "1999" @default.
- W2076056876 type Work @default.
- W2076056876 sameAs 2076056876 @default.
- W2076056876 citedByCount "49" @default.
- W2076056876 countsByYear W20760568762014 @default.
- W2076056876 countsByYear W20760568762015 @default.
- W2076056876 countsByYear W20760568762016 @default.
- W2076056876 countsByYear W20760568762017 @default.
- W2076056876 countsByYear W20760568762019 @default.
- W2076056876 countsByYear W20760568762022 @default.
- W2076056876 countsByYear W20760568762023 @default.
- W2076056876 crossrefType "journal-article" @default.
- W2076056876 hasAuthorship W2076056876A5020954723 @default.
- W2076056876 hasAuthorship W2076056876A5031143193 @default.
- W2076056876 hasAuthorship W2076056876A5039635747 @default.
- W2076056876 hasAuthorship W2076056876A5043041670 @default.
- W2076056876 hasConcept C112950240 @default.
- W2076056876 hasConcept C127413603 @default.
- W2076056876 hasConcept C149912024 @default.
- W2076056876 hasConcept C151730666 @default.
- W2076056876 hasConcept C159985019 @default.
- W2076056876 hasConcept C171250308 @default.
- W2076056876 hasConcept C19067145 @default.
- W2076056876 hasConcept C192562407 @default.
- W2076056876 hasConcept C202974441 @default.
- W2076056876 hasConcept C203036418 @default.
- W2076056876 hasConcept C2777855556 @default.
- W2076056876 hasConcept C2816523 @default.
- W2076056876 hasConcept C42360764 @default.
- W2076056876 hasConcept C47908070 @default.
- W2076056876 hasConcept C64297162 @default.
- W2076056876 hasConcept C75937256 @default.
- W2076056876 hasConcept C86803240 @default.
- W2076056876 hasConcept C87976508 @default.
- W2076056876 hasConceptScore W2076056876C112950240 @default.
- W2076056876 hasConceptScore W2076056876C127413603 @default.
- W2076056876 hasConceptScore W2076056876C149912024 @default.
- W2076056876 hasConceptScore W2076056876C151730666 @default.
- W2076056876 hasConceptScore W2076056876C159985019 @default.
- W2076056876 hasConceptScore W2076056876C171250308 @default.
- W2076056876 hasConceptScore W2076056876C19067145 @default.
- W2076056876 hasConceptScore W2076056876C192562407 @default.
- W2076056876 hasConceptScore W2076056876C202974441 @default.
- W2076056876 hasConceptScore W2076056876C203036418 @default.
- W2076056876 hasConceptScore W2076056876C2777855556 @default.
- W2076056876 hasConceptScore W2076056876C2816523 @default.
- W2076056876 hasConceptScore W2076056876C42360764 @default.
- W2076056876 hasConceptScore W2076056876C47908070 @default.
- W2076056876 hasConceptScore W2076056876C64297162 @default.
- W2076056876 hasConceptScore W2076056876C75937256 @default.
- W2076056876 hasConceptScore W2076056876C86803240 @default.
- W2076056876 hasConceptScore W2076056876C87976508 @default.
- W2076056876 hasIssue "1-2" @default.
- W2076056876 hasLocation W20760568761 @default.
- W2076056876 hasOpenAccess W2076056876 @default.
- W2076056876 hasPrimaryLocation W20760568761 @default.
- W2076056876 hasRelatedWork W1573980739 @default.
- W2076056876 hasRelatedWork W2069896095 @default.
- W2076056876 hasRelatedWork W2089085266 @default.
- W2076056876 hasRelatedWork W2349041876 @default.
- W2076056876 hasRelatedWork W2352024665 @default.
- W2076056876 hasRelatedWork W2377183674 @default.
- W2076056876 hasRelatedWork W2795554382 @default.
- W2076056876 hasRelatedWork W2883990535 @default.
- W2076056876 hasRelatedWork W4210994732 @default.
- W2076056876 hasRelatedWork W783536130 @default.
- W2076056876 hasVolume "342" @default.
- W2076056876 isParatext "false" @default.
- W2076056876 isRetracted "false" @default.
- W2076056876 magId "2076056876" @default.
- W2076056876 workType "article" @default.