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- W2076084014 abstract "A novel microfabricated inductively coupled plasma (ICP) source is introduced, which is an atomic emission spectrum excitation source. Its radio frequency power loss, size and Argon consumption are far less than one percent of atmospheric pressure ICP source. The micro ICP source is based on MEMS technology, its working gas is Argon at 100Pa. The configuration and characteristics of the micro ICP source are described. The application of the source in spectrometers is illustrated, it is intended to be used in conjunction with a planar miniature Fabry-Perot spectrometer to form a micro gas analyzer. A micro ICP source developed by author is introduced briefly, which work at 13.56MHz. At last, with the development of MEMS technology, the potential application areas of micro gas analyzer is presented." @default.
- W2076084014 created "2016-06-24" @default.
- W2076084014 creator A5010674187 @default.
- W2076084014 creator A5070473449 @default.
- W2076084014 date "2010-01-01" @default.
- W2076084014 modified "2023-09-27" @default.
- W2076084014 title "A microfabricated icp source and its application in miniaturization of spectrometer" @default.
- W2076084014 cites W1829011708 @default.
- W2076084014 cites W1972987860 @default.
- W2076084014 cites W1982111348 @default.
- W2076084014 cites W2003347058 @default.
- W2076084014 cites W2012747716 @default.
- W2076084014 cites W2148642783 @default.
- W2076084014 cites W2163523099 @default.
- W2076084014 cites W2384272166 @default.
- W2076084014 cites W2249950213 @default.
- W2076084014 doi "https://doi.org/10.1109/icacc.2010.5487065" @default.
- W2076084014 hasPublicationYear "2010" @default.
- W2076084014 type Work @default.
- W2076084014 sameAs 2076084014 @default.
- W2076084014 citedByCount "0" @default.
- W2076084014 crossrefType "proceedings-article" @default.
- W2076084014 hasAuthorship W2076084014A5010674187 @default.
- W2076084014 hasAuthorship W2076084014A5070473449 @default.
- W2076084014 hasConcept C107872376 @default.
- W2076084014 hasConcept C120665830 @default.
- W2076084014 hasConcept C121332964 @default.
- W2076084014 hasConcept C158007255 @default.
- W2076084014 hasConcept C171250308 @default.
- W2076084014 hasConcept C184779094 @default.
- W2076084014 hasConcept C185592680 @default.
- W2076084014 hasConcept C188224857 @default.
- W2076084014 hasConcept C192562407 @default.
- W2076084014 hasConcept C2992840811 @default.
- W2076084014 hasConcept C33390570 @default.
- W2076084014 hasConcept C37977207 @default.
- W2076084014 hasConcept C49040817 @default.
- W2076084014 hasConcept C547737533 @default.
- W2076084014 hasConcept C57528182 @default.
- W2076084014 hasConcept C62520636 @default.
- W2076084014 hasConcept C82706917 @default.
- W2076084014 hasConcept C95974651 @default.
- W2076084014 hasConceptScore W2076084014C107872376 @default.
- W2076084014 hasConceptScore W2076084014C120665830 @default.
- W2076084014 hasConceptScore W2076084014C121332964 @default.
- W2076084014 hasConceptScore W2076084014C158007255 @default.
- W2076084014 hasConceptScore W2076084014C171250308 @default.
- W2076084014 hasConceptScore W2076084014C184779094 @default.
- W2076084014 hasConceptScore W2076084014C185592680 @default.
- W2076084014 hasConceptScore W2076084014C188224857 @default.
- W2076084014 hasConceptScore W2076084014C192562407 @default.
- W2076084014 hasConceptScore W2076084014C2992840811 @default.
- W2076084014 hasConceptScore W2076084014C33390570 @default.
- W2076084014 hasConceptScore W2076084014C37977207 @default.
- W2076084014 hasConceptScore W2076084014C49040817 @default.
- W2076084014 hasConceptScore W2076084014C547737533 @default.
- W2076084014 hasConceptScore W2076084014C57528182 @default.
- W2076084014 hasConceptScore W2076084014C62520636 @default.
- W2076084014 hasConceptScore W2076084014C82706917 @default.
- W2076084014 hasConceptScore W2076084014C95974651 @default.
- W2076084014 hasLocation W20760840141 @default.
- W2076084014 hasOpenAccess W2076084014 @default.
- W2076084014 hasPrimaryLocation W20760840141 @default.
- W2076084014 hasRelatedWork W1619276345 @default.
- W2076084014 hasRelatedWork W1998284812 @default.
- W2076084014 hasRelatedWork W2038834694 @default.
- W2076084014 hasRelatedWork W2043086055 @default.
- W2076084014 hasRelatedWork W2076084014 @default.
- W2076084014 hasRelatedWork W2087886233 @default.
- W2076084014 hasRelatedWork W2332497334 @default.
- W2076084014 hasRelatedWork W2369023419 @default.
- W2076084014 hasRelatedWork W2375508437 @default.
- W2076084014 hasRelatedWork W2631804703 @default.
- W2076084014 isParatext "false" @default.
- W2076084014 isRetracted "false" @default.
- W2076084014 magId "2076084014" @default.
- W2076084014 workType "article" @default.