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- W2076092783 endingPage "578" @default.
- W2076092783 startingPage "575" @default.
- W2076092783 abstract "A variable angle of incidence spectroscopic ellipsometer equipped with a compensator has been used to determine the dielectric functions in the 0.74 - 6 eV photon energy range of n-type bulk 4H-SiC with doping concentrations between 10(17) and 10(19) cm(-3). The resulting dielectric function for different SiC wafers depends on the doping concentration, especially around the absorption onset and higher photon energies. Measurements on different wafers with the same doping show good reproducibility. Simulations and preliminary measurements show that ellipsometry might be useful for thickness determination of thin (m) homoepitaxial films." @default.
- W2076092783 created "2016-06-24" @default.
- W2076092783 creator A5035162916 @default.
- W2076092783 creator A5038291065 @default.
- W2076092783 creator A5054211889 @default.
- W2076092783 creator A5071597417 @default.
- W2076092783 creator A5086943853 @default.
- W2076092783 date "2000-05-01" @default.
- W2076092783 modified "2023-09-26" @default.
- W2076092783 title "Optical Characterization of 4H-SiC by Variable Angle of Incidence Spectroscopic Ellipsometry" @default.
- W2076092783 doi "https://doi.org/10.4028/www.scientific.net/msf.338-342.575" @default.
- W2076092783 hasPublicationYear "2000" @default.
- W2076092783 type Work @default.
- W2076092783 sameAs 2076092783 @default.
- W2076092783 citedByCount "3" @default.
- W2076092783 crossrefType "journal-article" @default.
- W2076092783 hasAuthorship W2076092783A5035162916 @default.
- W2076092783 hasAuthorship W2076092783A5038291065 @default.
- W2076092783 hasAuthorship W2076092783A5054211889 @default.
- W2076092783 hasAuthorship W2076092783A5071597417 @default.
- W2076092783 hasAuthorship W2076092783A5086943853 @default.
- W2076092783 hasConcept C113196181 @default.
- W2076092783 hasConcept C120665830 @default.
- W2076092783 hasConcept C121332964 @default.
- W2076092783 hasConcept C171250308 @default.
- W2076092783 hasConcept C18293161 @default.
- W2076092783 hasConcept C185592680 @default.
- W2076092783 hasConcept C19067145 @default.
- W2076092783 hasConcept C192562407 @default.
- W2076092783 hasConcept C2779116783 @default.
- W2076092783 hasConcept C2780841128 @default.
- W2076092783 hasConcept C43617362 @default.
- W2076092783 hasConcept C49040817 @default.
- W2076092783 hasConcept C61511704 @default.
- W2076092783 hasConceptScore W2076092783C113196181 @default.
- W2076092783 hasConceptScore W2076092783C120665830 @default.
- W2076092783 hasConceptScore W2076092783C121332964 @default.
- W2076092783 hasConceptScore W2076092783C171250308 @default.
- W2076092783 hasConceptScore W2076092783C18293161 @default.
- W2076092783 hasConceptScore W2076092783C185592680 @default.
- W2076092783 hasConceptScore W2076092783C19067145 @default.
- W2076092783 hasConceptScore W2076092783C192562407 @default.
- W2076092783 hasConceptScore W2076092783C2779116783 @default.
- W2076092783 hasConceptScore W2076092783C2780841128 @default.
- W2076092783 hasConceptScore W2076092783C43617362 @default.
- W2076092783 hasConceptScore W2076092783C49040817 @default.
- W2076092783 hasConceptScore W2076092783C61511704 @default.
- W2076092783 hasLocation W20760927831 @default.
- W2076092783 hasOpenAccess W2076092783 @default.
- W2076092783 hasPrimaryLocation W20760927831 @default.
- W2076092783 hasRelatedWork W1032875744 @default.
- W2076092783 hasRelatedWork W1967840791 @default.
- W2076092783 hasRelatedWork W2016839992 @default.
- W2076092783 hasRelatedWork W2018352885 @default.
- W2076092783 hasRelatedWork W2033934664 @default.
- W2076092783 hasRelatedWork W2080956175 @default.
- W2076092783 hasRelatedWork W2152278746 @default.
- W2076092783 hasRelatedWork W2154649190 @default.
- W2076092783 hasRelatedWork W2156560053 @default.
- W2076092783 hasRelatedWork W4367042001 @default.
- W2076092783 hasVolume "338-342" @default.
- W2076092783 isParatext "false" @default.
- W2076092783 isRetracted "false" @default.
- W2076092783 magId "2076092783" @default.
- W2076092783 workType "article" @default.