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• W2076098432 abstract "A 20-Hz frequency-doubled Q-switched Nd : YAG laser has been used to measure Thomson-scattering spectra from an inductively coupled argon plasma (ICP). The experimental data were treated with a non-linear regression curve-fitting program to determine electron temperatures and electron number densities under different plasma operating conditions. A comparison of the measured Thomson-scattering spectra with the corresponding fitted curves indicates that the electron energy distributions in the ICP are very close to Maxwellian under a wide range of sample-introduction conditions and at locations above, below, and at the tip of the “bullet”. As a result, electron temperature can be used as a meaningful fundamental parameter. The theory used in this study is briefly reviewed and the detailed experimental considerations are described." @default.
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• W2076098432 date "1990-01-01" @default.
• W2076098432 modified "2023-09-27" @default.
• W2076098432 title "Verification of a Maxwellian electron-energy distribution in the ICP" @default.
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• W2076098432 doi "https://doi.org/10.1016/0584-8547(90)80126-4" @default.
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