Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076113534> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2076113534 abstract "A new process of Cu-Cu direct bonding at lower than 200°C in atmospheric atmosphere was developed. The method is composed of formic acid treatment with Pt catalyst. To demonstrate the feasibility of the method, Cu electrodes samples were designed for characterizing the bonding strength and the contact resistance for the Cu-Cu direct bonding. The bonding strength is about 40MPa, and the contact resistance at the bonding interface is about 0.17mΩ. Both of them are better than those without Pt catalyst. The effects of the Pt catalyst on bonding were investigated and it is concluded that the surface oxide of Cu is reduced effectively by the hydrogen radical generated by formic acid decomposition with Pt catalyst and the Cu formats resulted by the formic acid treatment is decomposed to precipitate very fine Cu grains at the bonded interface." @default.
- W2076113534 created "2016-06-24" @default.
- W2076113534 creator A5009305405 @default.
- W2076113534 creator A5054067619 @default.
- W2076113534 creator A5058949296 @default.
- W2076113534 date "2014-05-01" @default.
- W2076113534 modified "2023-10-01" @default.
- W2076113534 title "Formic acid treatment with Pt catalyst for Cu direct and hybrid bonding at low temperature" @default.
- W2076113534 cites W1969530042 @default.
- W2076113534 cites W1997220400 @default.
- W2076113534 cites W2064390073 @default.
- W2076113534 cites W2127892541 @default.
- W2076113534 cites W2132228965 @default.
- W2076113534 cites W2144345775 @default.
- W2076113534 cites W2147240681 @default.
- W2076113534 cites W2169697107 @default.
- W2076113534 cites W225413000 @default.
- W2076113534 cites W2316272245 @default.
- W2076113534 cites W2562835153 @default.
- W2076113534 doi "https://doi.org/10.1109/ectc.2014.6897433" @default.
- W2076113534 hasPublicationYear "2014" @default.
- W2076113534 type Work @default.
- W2076113534 sameAs 2076113534 @default.
- W2076113534 citedByCount "2" @default.
- W2076113534 countsByYear W20761135342014 @default.
- W2076113534 countsByYear W20761135342020 @default.
- W2076113534 crossrefType "proceedings-article" @default.
- W2076113534 hasAuthorship W2076113534A5009305405 @default.
- W2076113534 hasAuthorship W2076113534A5054067619 @default.
- W2076113534 hasAuthorship W2076113534A5058949296 @default.
- W2076113534 hasConcept C112887158 @default.
- W2076113534 hasConcept C124681953 @default.
- W2076113534 hasConcept C127413603 @default.
- W2076113534 hasConcept C161790260 @default.
- W2076113534 hasConcept C178790620 @default.
- W2076113534 hasConcept C179104552 @default.
- W2076113534 hasConcept C185592680 @default.
- W2076113534 hasConcept C191897082 @default.
- W2076113534 hasConcept C192562407 @default.
- W2076113534 hasConcept C2777379063 @default.
- W2076113534 hasConcept C2778071519 @default.
- W2076113534 hasConcept C2779851234 @default.
- W2076113534 hasConcept C32909587 @default.
- W2076113534 hasConcept C42360764 @default.
- W2076113534 hasConcept C544956773 @default.
- W2076113534 hasConceptScore W2076113534C112887158 @default.
- W2076113534 hasConceptScore W2076113534C124681953 @default.
- W2076113534 hasConceptScore W2076113534C127413603 @default.
- W2076113534 hasConceptScore W2076113534C161790260 @default.
- W2076113534 hasConceptScore W2076113534C178790620 @default.
- W2076113534 hasConceptScore W2076113534C179104552 @default.
- W2076113534 hasConceptScore W2076113534C185592680 @default.
- W2076113534 hasConceptScore W2076113534C191897082 @default.
- W2076113534 hasConceptScore W2076113534C192562407 @default.
- W2076113534 hasConceptScore W2076113534C2777379063 @default.
- W2076113534 hasConceptScore W2076113534C2778071519 @default.
- W2076113534 hasConceptScore W2076113534C2779851234 @default.
- W2076113534 hasConceptScore W2076113534C32909587 @default.
- W2076113534 hasConceptScore W2076113534C42360764 @default.
- W2076113534 hasConceptScore W2076113534C544956773 @default.
- W2076113534 hasLocation W20761135341 @default.
- W2076113534 hasOpenAccess W2076113534 @default.
- W2076113534 hasPrimaryLocation W20761135341 @default.
- W2076113534 hasRelatedWork W1498633406 @default.
- W2076113534 hasRelatedWork W1967199849 @default.
- W2076113534 hasRelatedWork W2010421464 @default.
- W2076113534 hasRelatedWork W2031549730 @default.
- W2076113534 hasRelatedWork W2031987913 @default.
- W2076113534 hasRelatedWork W2047053110 @default.
- W2076113534 hasRelatedWork W2055266801 @default.
- W2076113534 hasRelatedWork W2078604199 @default.
- W2076113534 hasRelatedWork W2090886941 @default.
- W2076113534 hasRelatedWork W2140502255 @default.
- W2076113534 hasRelatedWork W2144837394 @default.
- W2076113534 hasRelatedWork W2317022006 @default.
- W2076113534 hasRelatedWork W2334627442 @default.
- W2076113534 hasRelatedWork W2948819895 @default.
- W2076113534 hasRelatedWork W2949462071 @default.
- W2076113534 hasRelatedWork W2949580581 @default.
- W2076113534 hasRelatedWork W3010614285 @default.
- W2076113534 hasRelatedWork W3133347875 @default.
- W2076113534 hasRelatedWork W3141072594 @default.
- W2076113534 hasRelatedWork W2521561685 @default.
- W2076113534 isParatext "false" @default.
- W2076113534 isRetracted "false" @default.
- W2076113534 magId "2076113534" @default.
- W2076113534 workType "article" @default.