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- W2076133776 abstract "Existing lithographic approaches are good at patterning the top surface of a substrate, but not suited to producing patterns on the sidewalls of microstructures. In this work, we have developed a new method to generate sidewall micropatterns using Si-reinforced polydimethylsiloxane (PDMS) molds through hot-embossing processes. We have successfully produced one and two arrays of 10 μm Au dots, respectively, on the 42- and 85-μm-high sidewalls of 300-μm-wide polymer channels. We have also explored the possibility to fabricate 110-μm-wide Au wires on these channel sidewalls." @default.
- W2076133776 created "2016-06-24" @default.
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- W2076133776 date "2009-05-01" @default.
- W2076133776 modified "2023-10-02" @default.
- W2076133776 title "Fabrication of Au sidewall micropatterns using Si-reinforced PDMS molds" @default.
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- W2076133776 doi "https://doi.org/10.1016/j.sna.2009.03.016" @default.
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