Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076134635> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2076134635 abstract "The shrinkage of semiconductor devices creates demand for micronization in the photolithographic process. As a result, problems are arising in photolithography in the semiconductor manufacturing process. Focus latitude in photolithography becomes smaller as micronization advances and therefore the flatness of the mask can no longer be ignored. In this work, we clarified what the specification of mask flatness should be from the standpoint of its warpage in vacuum chucking of an exposure tool. A two-dimensional approach was applied for the prediction of mask surface after chucking. The approach is simple analytical calculation distinguishing between x-direction and y-direction. Warpage of mask surface after chucking has two modes depending on the directions. One is leverage caused by interaction of mask surface and chucking stage. Another one is warpage along chucking stage surface. The prediction shows good agreement with the actual surface of chucked mask. From this study, a new concept of the specification for mask blank flatness was proposed, taking warpage in vacuum chuck into consideration in the prediction. The proposed specification certainly can exclude masks that show large deformation after chucking even though with good free-standing flatness." @default.
- W2076134635 created "2016-06-24" @default.
- W2076134635 creator A5015671486 @default.
- W2076134635 creator A5020798112 @default.
- W2076134635 creator A5039286507 @default.
- W2076134635 creator A5040457799 @default.
- W2076134635 creator A5056045953 @default.
- W2076134635 date "2002-07-31" @default.
- W2076134635 modified "2023-09-23" @default.
- W2076134635 title "New concept of specification for mask flatness" @default.
- W2076134635 doi "https://doi.org/10.1117/12.476957" @default.
- W2076134635 hasPublicationYear "2002" @default.
- W2076134635 type Work @default.
- W2076134635 sameAs 2076134635 @default.
- W2076134635 citedByCount "0" @default.
- W2076134635 crossrefType "proceedings-article" @default.
- W2076134635 hasAuthorship W2076134635A5015671486 @default.
- W2076134635 hasAuthorship W2076134635A5020798112 @default.
- W2076134635 hasAuthorship W2076134635A5039286507 @default.
- W2076134635 hasAuthorship W2076134635A5040457799 @default.
- W2076134635 hasAuthorship W2076134635A5056045953 @default.
- W2076134635 hasConcept C105487726 @default.
- W2076134635 hasConcept C121332964 @default.
- W2076134635 hasConcept C127413603 @default.
- W2076134635 hasConcept C159985019 @default.
- W2076134635 hasConcept C160671074 @default.
- W2076134635 hasConcept C180145272 @default.
- W2076134635 hasConcept C192562407 @default.
- W2076134635 hasConcept C199639397 @default.
- W2076134635 hasConcept C26405456 @default.
- W2076134635 hasConcept C2778530986 @default.
- W2076134635 hasConcept C49040817 @default.
- W2076134635 hasConcept C62520636 @default.
- W2076134635 hasConcept C66018809 @default.
- W2076134635 hasConcept C78519656 @default.
- W2076134635 hasConceptScore W2076134635C105487726 @default.
- W2076134635 hasConceptScore W2076134635C121332964 @default.
- W2076134635 hasConceptScore W2076134635C127413603 @default.
- W2076134635 hasConceptScore W2076134635C159985019 @default.
- W2076134635 hasConceptScore W2076134635C160671074 @default.
- W2076134635 hasConceptScore W2076134635C180145272 @default.
- W2076134635 hasConceptScore W2076134635C192562407 @default.
- W2076134635 hasConceptScore W2076134635C199639397 @default.
- W2076134635 hasConceptScore W2076134635C26405456 @default.
- W2076134635 hasConceptScore W2076134635C2778530986 @default.
- W2076134635 hasConceptScore W2076134635C49040817 @default.
- W2076134635 hasConceptScore W2076134635C62520636 @default.
- W2076134635 hasConceptScore W2076134635C66018809 @default.
- W2076134635 hasConceptScore W2076134635C78519656 @default.
- W2076134635 hasLocation W20761346351 @default.
- W2076134635 hasOpenAccess W2076134635 @default.
- W2076134635 hasPrimaryLocation W20761346351 @default.
- W2076134635 hasRelatedWork W1494637681 @default.
- W2076134635 hasRelatedWork W1592322676 @default.
- W2076134635 hasRelatedWork W1600269756 @default.
- W2076134635 hasRelatedWork W1971124304 @default.
- W2076134635 hasRelatedWork W1975970818 @default.
- W2076134635 hasRelatedWork W1981756174 @default.
- W2076134635 hasRelatedWork W2041013899 @default.
- W2076134635 hasRelatedWork W2046855516 @default.
- W2076134635 hasRelatedWork W2076134635 @default.
- W2076134635 hasRelatedWork W4281612237 @default.
- W2076134635 isParatext "false" @default.
- W2076134635 isRetracted "false" @default.
- W2076134635 magId "2076134635" @default.
- W2076134635 workType "article" @default.