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- W2076154992 abstract "In this paper, spectroscopic ellipsometry (SE) has been used to investigate SiO2-Si structures, which were subjected to annealing under a high hydrostatic pressure at high temperature (HPHT) processes. Temperature and pressure varied from 450 degrees Celsius to 1280 degrees Celsius and from 105 Pa to 1.2 GPa, respectively. Investigations have been carried out by variable angle spectroscopic ellipsometer VASE of J.A. Woollam Co Inc. Using the standard optical model of the SiO2-Si structure, no satisfying fit of measured and calculated (Psi) and (Delta) ellipsometric parameters characteristics can be obtained. This inconsistency, expressed by the MSE parameter (Mean Squared Error), is proportional to temperature, pressure and time of the HPHT process. Elongated convexities on SiO2 surface have been observed by scanning electron microscope (SEM). It was found that depolarization effect takes place as a result of non-uniformity of either chemical composition or SiO2 film thickness. A model consisting of upper SiO2 surface roughness, SiO2 layer and SiO2-Si interface has been used for data analysis. Application of this model allowed determination of changes in thickness and refractive index of SiO2 as a result of the HPHT process. An increase of refractive index and decrease of layer thickness can be ascribed to excessive stress in SiO2 layer. This stress has been probably caused by densification of silicon dioxide.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
- W2076154992 created "2016-06-24" @default.
- W2076154992 creator A5063290951 @default.
- W2076154992 creator A5069348243 @default.
- W2076154992 creator A5076061264 @default.
- W2076154992 creator A5081296632 @default.
- W2076154992 date "2001-08-10" @default.
- W2076154992 modified "2023-09-23" @default.
- W2076154992 title "<title>Spectroscopic ellipsometry investigation of influence of high-pressure high-temperature process on optical properties of SiO<formula><inf><roman>2</roman></inf></formula>-Si structures</title>" @default.
- W2076154992 doi "https://doi.org/10.1117/12.435963" @default.
- W2076154992 hasPublicationYear "2001" @default.
- W2076154992 type Work @default.
- W2076154992 sameAs 2076154992 @default.
- W2076154992 citedByCount "4" @default.
- W2076154992 countsByYear W20761549922017 @default.
- W2076154992 crossrefType "proceedings-article" @default.
- W2076154992 hasAuthorship W2076154992A5063290951 @default.
- W2076154992 hasAuthorship W2076154992A5069348243 @default.
- W2076154992 hasAuthorship W2076154992A5076061264 @default.
- W2076154992 hasAuthorship W2076154992A5081296632 @default.
- W2076154992 hasConcept C107365816 @default.
- W2076154992 hasConcept C113196181 @default.
- W2076154992 hasConcept C120665830 @default.
- W2076154992 hasConcept C121332964 @default.
- W2076154992 hasConcept C159985019 @default.
- W2076154992 hasConcept C171250308 @default.
- W2076154992 hasConcept C18293161 @default.
- W2076154992 hasConcept C185592680 @default.
- W2076154992 hasConcept C19067145 @default.
- W2076154992 hasConcept C192562407 @default.
- W2076154992 hasConcept C26771246 @default.
- W2076154992 hasConcept C2777855556 @default.
- W2076154992 hasConcept C2910081258 @default.
- W2076154992 hasConcept C42067758 @default.
- W2076154992 hasConcept C43617362 @default.
- W2076154992 hasConcept C49040817 @default.
- W2076154992 hasConcept C71039073 @default.
- W2076154992 hasConcept C97355855 @default.
- W2076154992 hasConceptScore W2076154992C107365816 @default.
- W2076154992 hasConceptScore W2076154992C113196181 @default.
- W2076154992 hasConceptScore W2076154992C120665830 @default.
- W2076154992 hasConceptScore W2076154992C121332964 @default.
- W2076154992 hasConceptScore W2076154992C159985019 @default.
- W2076154992 hasConceptScore W2076154992C171250308 @default.
- W2076154992 hasConceptScore W2076154992C18293161 @default.
- W2076154992 hasConceptScore W2076154992C185592680 @default.
- W2076154992 hasConceptScore W2076154992C19067145 @default.
- W2076154992 hasConceptScore W2076154992C192562407 @default.
- W2076154992 hasConceptScore W2076154992C26771246 @default.
- W2076154992 hasConceptScore W2076154992C2777855556 @default.
- W2076154992 hasConceptScore W2076154992C2910081258 @default.
- W2076154992 hasConceptScore W2076154992C42067758 @default.
- W2076154992 hasConceptScore W2076154992C43617362 @default.
- W2076154992 hasConceptScore W2076154992C49040817 @default.
- W2076154992 hasConceptScore W2076154992C71039073 @default.
- W2076154992 hasConceptScore W2076154992C97355855 @default.
- W2076154992 hasLocation W20761549921 @default.
- W2076154992 hasOpenAccess W2076154992 @default.
- W2076154992 hasPrimaryLocation W20761549921 @default.
- W2076154992 hasRelatedWork W105312015 @default.
- W2076154992 hasRelatedWork W1967169395 @default.
- W2076154992 hasRelatedWork W1973289429 @default.
- W2076154992 hasRelatedWork W1982999546 @default.
- W2076154992 hasRelatedWork W1987140458 @default.
- W2076154992 hasRelatedWork W1998823240 @default.
- W2076154992 hasRelatedWork W2008563309 @default.
- W2076154992 hasRelatedWork W2015742603 @default.
- W2076154992 hasRelatedWork W2056892899 @default.
- W2076154992 hasRelatedWork W2070189678 @default.
- W2076154992 hasRelatedWork W2073163762 @default.
- W2076154992 hasRelatedWork W2074178516 @default.
- W2076154992 hasRelatedWork W2083545124 @default.
- W2076154992 hasRelatedWork W2113449004 @default.
- W2076154992 hasRelatedWork W2113746739 @default.
- W2076154992 hasRelatedWork W2348314487 @default.
- W2076154992 hasRelatedWork W2367153267 @default.
- W2076154992 hasRelatedWork W2545586408 @default.
- W2076154992 hasRelatedWork W2743157620 @default.
- W2076154992 hasRelatedWork W3029385414 @default.
- W2076154992 isParatext "false" @default.
- W2076154992 isRetracted "false" @default.
- W2076154992 magId "2076154992" @default.
- W2076154992 workType "article" @default.