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• W2076164436 abstract "The X-ray standing wave method, an interferometric technique for accurately determining the position of atoms at surfaces and interfaces, allows us to determine the position of atoms along the diffraction vector. In spite of the validity of the X-ray standing wave method, there are few analyses of buried hetero epitaxial interface structure of semiconductors because of the signal adding effect from overlayers. This effect is very significant for GaAs/Si because of the large lattice mismatch of about 4%. The thin overlayer technique, which neglects this adding effect, avoids this difficulty. This report describes the use of the X-ray standing wave analysis with thin GaAs films on a Si substrate. Two 4 ML GaAs/Si(111) samples with different initial surface were prepared. The sample with the initial Si(111)1 × 1 surface passivated by As atoms shows the same fluorescence profiles of Ga and As reported previously. When Ga was deposited first on the initial surface, however, fluorescence profiles suggest that about half of the interracial Ga atoms are exchanged with As atoms, leaving both Si-Ga-As and Si-As-Ga bondings at the interface. Judging from the analysis of samples kept in air for longer periods, this method can give useful information about this GaAs/Si system." @default.
• W2076164436 created "2016-06-24" @default.
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• W2076164436 date "1991-07-01" @default.
• W2076164436 modified "2023-10-01" @default.
• W2076164436 title "X-ray standing wave analysis of the GaAs/Si interface" @default.
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• W2076164436 doi "https://doi.org/10.1016/0039-6028(91)90978-2" @default.
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