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- W2076169008 endingPage "343" @default.
- W2076169008 startingPage "340" @default.
- W2076169008 abstract "Abstract A study has been made on the formation of boron–carbon–nitride (BCN) thin films. The BCN thin films were synthesized using dual cesium ion beam sputtering system, which consisted of conventional magnetron sputter for carbon and boron sources and cesium flow system for negative ion generation. Nitrogen gas was introduced into argon plasma as a nitrogen source. Optimum process parameters were examined by the method of Taguchi L9 experiment. Hardness of BCN films was mainly affected by carbon sputtering power, working pressure and boron sputtering power in sequence. At the optimum process condition, the hardness and stoichiometry of BCN film were 30.6 GPa and BC 0.9 N 0.7 . From Fourier transform infrared spectroscopy results, it was found that the characteristics of the films had mixed with sp 2 BN, BC and CN bonding. The tribological behaviors of BCN films have been investigated by ball-on-disk tribometer. It is found that the friction coefficient is directly related to the film hardness and process parameters." @default.
- W2076169008 created "2016-06-24" @default.
- W2076169008 creator A5006777241 @default.
- W2076169008 creator A5019207795 @default.
- W2076169008 creator A5024441816 @default.
- W2076169008 creator A5046276371 @default.
- W2076169008 creator A5074713545 @default.
- W2076169008 date "2003-06-01" @default.
- W2076169008 modified "2023-10-07" @default.
- W2076169008 title "Mechanical properties of BCN films deposited by dual cesium ion beam sputtering system" @default.
- W2076169008 cites W1949847011 @default.
- W2076169008 cites W1970559022 @default.
- W2076169008 cites W1981973612 @default.
- W2076169008 cites W2007749266 @default.
- W2076169008 cites W2011090058 @default.
- W2076169008 cites W2016036762 @default.
- W2076169008 cites W2054457157 @default.
- W2076169008 cites W2067378090 @default.
- W2076169008 cites W2073374224 @default.
- W2076169008 cites W2079364989 @default.
- W2076169008 cites W2081536686 @default.
- W2076169008 doi "https://doi.org/10.1016/s0257-8972(03)00102-6" @default.
- W2076169008 hasPublicationYear "2003" @default.
- W2076169008 type Work @default.
- W2076169008 sameAs 2076169008 @default.
- W2076169008 citedByCount "19" @default.
- W2076169008 countsByYear W20761690082012 @default.
- W2076169008 countsByYear W20761690082013 @default.
- W2076169008 countsByYear W20761690082014 @default.
- W2076169008 countsByYear W20761690082015 @default.
- W2076169008 countsByYear W20761690082016 @default.
- W2076169008 countsByYear W20761690082019 @default.
- W2076169008 countsByYear W20761690082020 @default.
- W2076169008 countsByYear W20761690082021 @default.
- W2076169008 countsByYear W20761690082023 @default.
- W2076169008 crossrefType "journal-article" @default.
- W2076169008 hasAuthorship W2076169008A5006777241 @default.
- W2076169008 hasAuthorship W2076169008A5019207795 @default.
- W2076169008 hasAuthorship W2076169008A5024441816 @default.
- W2076169008 hasAuthorship W2076169008A5046276371 @default.
- W2076169008 hasAuthorship W2076169008A5074713545 @default.
- W2076169008 hasConcept C107872376 @default.
- W2076169008 hasConcept C113196181 @default.
- W2076169008 hasConcept C120665830 @default.
- W2076169008 hasConcept C121332964 @default.
- W2076169008 hasConcept C145148216 @default.
- W2076169008 hasConcept C168834538 @default.
- W2076169008 hasConcept C171250308 @default.
- W2076169008 hasConcept C178790620 @default.
- W2076169008 hasConcept C179104552 @default.
- W2076169008 hasConcept C184779094 @default.
- W2076169008 hasConcept C185592680 @default.
- W2076169008 hasConcept C19067145 @default.
- W2076169008 hasConcept C192562407 @default.
- W2076169008 hasConcept C22423302 @default.
- W2076169008 hasConcept C50774322 @default.
- W2076169008 hasConcept C519659679 @default.
- W2076169008 hasConcept C93106096 @default.
- W2076169008 hasConceptScore W2076169008C107872376 @default.
- W2076169008 hasConceptScore W2076169008C113196181 @default.
- W2076169008 hasConceptScore W2076169008C120665830 @default.
- W2076169008 hasConceptScore W2076169008C121332964 @default.
- W2076169008 hasConceptScore W2076169008C145148216 @default.
- W2076169008 hasConceptScore W2076169008C168834538 @default.
- W2076169008 hasConceptScore W2076169008C171250308 @default.
- W2076169008 hasConceptScore W2076169008C178790620 @default.
- W2076169008 hasConceptScore W2076169008C179104552 @default.
- W2076169008 hasConceptScore W2076169008C184779094 @default.
- W2076169008 hasConceptScore W2076169008C185592680 @default.
- W2076169008 hasConceptScore W2076169008C19067145 @default.
- W2076169008 hasConceptScore W2076169008C192562407 @default.
- W2076169008 hasConceptScore W2076169008C22423302 @default.
- W2076169008 hasConceptScore W2076169008C50774322 @default.
- W2076169008 hasConceptScore W2076169008C519659679 @default.
- W2076169008 hasConceptScore W2076169008C93106096 @default.
- W2076169008 hasLocation W20761690081 @default.
- W2076169008 hasOpenAccess W2076169008 @default.
- W2076169008 hasPrimaryLocation W20761690081 @default.
- W2076169008 hasRelatedWork W1495609493 @default.
- W2076169008 hasRelatedWork W1990257181 @default.
- W2076169008 hasRelatedWork W2001693995 @default.
- W2076169008 hasRelatedWork W2013169458 @default.
- W2076169008 hasRelatedWork W2030920768 @default.
- W2076169008 hasRelatedWork W2085415432 @default.
- W2076169008 hasRelatedWork W2132925456 @default.
- W2076169008 hasRelatedWork W2133076232 @default.
- W2076169008 hasRelatedWork W3192129111 @default.
- W2076169008 hasRelatedWork W35510713 @default.
- W2076169008 hasVolume "169-170" @default.
- W2076169008 isParatext "false" @default.
- W2076169008 isRetracted "false" @default.
- W2076169008 magId "2076169008" @default.
- W2076169008 workType "article" @default.