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- W2076173625 abstract "Accurate photoresist modeling parameters are required for correct lithographic simulations. In particular, three sets of data are required to model a typical non-chemically amplified resist: the refractive index as a function of wavelength and exposure, the exposure or ABC parameters (the Dill parameters), and the development parameters. This work focuses on an improved technique for the accurate extraction of development rate parameters for non-chemically amplified resists. Traditionally, the refractive index for photoresists is considered constant in simulations and other work. However, the refractive index of a photoresist varies as the chemical composition of the photoresist changes during exposure. This work presents a rigorous analysis technique for extracting development parameters from resist development rate data which accounts for this refractive index change. Development parameter measurements for a commercial resist are discussed. Comparisons of the various development rate models are made using this experimental data." @default.
- W2076173625 created "2016-06-24" @default.
- W2076173625 creator A5002426546 @default.
- W2076173625 creator A5010046244 @default.
- W2076173625 creator A5022534413 @default.
- W2076173625 creator A5027381116 @default.
- W2076173625 creator A5030609261 @default.
- W2076173625 creator A5060023120 @default.
- W2076173625 creator A5081079686 @default.
- W2076173625 date "1997-07-07" @default.
- W2076173625 modified "2023-09-27" @default.
- W2076173625 title "Photoresist characterization for lithography simulation: III. Development parameter measurements" @default.
- W2076173625 cites W2072214309 @default.
- W2076173625 cites W2082120663 @default.
- W2076173625 doi "https://doi.org/10.1117/12.275882" @default.
- W2076173625 hasPublicationYear "1997" @default.
- W2076173625 type Work @default.
- W2076173625 sameAs 2076173625 @default.
- W2076173625 citedByCount "6" @default.
- W2076173625 countsByYear W20761736252015 @default.
- W2076173625 crossrefType "proceedings-article" @default.
- W2076173625 hasAuthorship W2076173625A5002426546 @default.
- W2076173625 hasAuthorship W2076173625A5010046244 @default.
- W2076173625 hasAuthorship W2076173625A5022534413 @default.
- W2076173625 hasAuthorship W2076173625A5027381116 @default.
- W2076173625 hasAuthorship W2076173625A5030609261 @default.
- W2076173625 hasAuthorship W2076173625A5060023120 @default.
- W2076173625 hasAuthorship W2076173625A5081079686 @default.
- W2076173625 hasConcept C105487726 @default.
- W2076173625 hasConcept C120665830 @default.
- W2076173625 hasConcept C121332964 @default.
- W2076173625 hasConcept C134306372 @default.
- W2076173625 hasConcept C134406635 @default.
- W2076173625 hasConcept C171250308 @default.
- W2076173625 hasConcept C192562407 @default.
- W2076173625 hasConcept C204223013 @default.
- W2076173625 hasConcept C2776542497 @default.
- W2076173625 hasConcept C2779227376 @default.
- W2076173625 hasConcept C2780841128 @default.
- W2076173625 hasConcept C33923547 @default.
- W2076173625 hasConcept C42067758 @default.
- W2076173625 hasConcept C47378062 @default.
- W2076173625 hasConcept C49040817 @default.
- W2076173625 hasConcept C53524968 @default.
- W2076173625 hasConceptScore W2076173625C105487726 @default.
- W2076173625 hasConceptScore W2076173625C120665830 @default.
- W2076173625 hasConceptScore W2076173625C121332964 @default.
- W2076173625 hasConceptScore W2076173625C134306372 @default.
- W2076173625 hasConceptScore W2076173625C134406635 @default.
- W2076173625 hasConceptScore W2076173625C171250308 @default.
- W2076173625 hasConceptScore W2076173625C192562407 @default.
- W2076173625 hasConceptScore W2076173625C204223013 @default.
- W2076173625 hasConceptScore W2076173625C2776542497 @default.
- W2076173625 hasConceptScore W2076173625C2779227376 @default.
- W2076173625 hasConceptScore W2076173625C2780841128 @default.
- W2076173625 hasConceptScore W2076173625C33923547 @default.
- W2076173625 hasConceptScore W2076173625C42067758 @default.
- W2076173625 hasConceptScore W2076173625C47378062 @default.
- W2076173625 hasConceptScore W2076173625C49040817 @default.
- W2076173625 hasConceptScore W2076173625C53524968 @default.
- W2076173625 hasLocation W20761736251 @default.
- W2076173625 hasOpenAccess W2076173625 @default.
- W2076173625 hasPrimaryLocation W20761736251 @default.
- W2076173625 hasRelatedWork W1008141977 @default.
- W2076173625 hasRelatedWork W1970936111 @default.
- W2076173625 hasRelatedWork W2002360572 @default.
- W2076173625 hasRelatedWork W2011067919 @default.
- W2076173625 hasRelatedWork W2013001663 @default.
- W2076173625 hasRelatedWork W2038630043 @default.
- W2076173625 hasRelatedWork W2052410752 @default.
- W2076173625 hasRelatedWork W2057628115 @default.
- W2076173625 hasRelatedWork W2076173625 @default.
- W2076173625 hasRelatedWork W2089358494 @default.
- W2076173625 isParatext "false" @default.
- W2076173625 isRetracted "false" @default.
- W2076173625 magId "2076173625" @default.
- W2076173625 workType "article" @default.