Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076177710> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2076177710 endingPage "6" @default.
- W2076177710 startingPage "1" @default.
- W2076177710 abstract "GaAs selective growth mechanism was investigated, based on Ga species behavior using trimethyl gallium (TMG) or triethyl gallium (TEG) as the Ga source. Selective growth, using TMG, was obtained at a substrate temperature as low as 400°C. In the case of TEG use, the selective growth temperature was above 600°C. Furthermore, selective Ga deposition on a GaAs substrate with a SiO2 mask was carried out, using only an alkyl Ga source without arsenic. The selective Ga deposition was realized at 350°C for TMG use and above 500°C for TEG use. These results show that the Ga species related to TMG is easier to desorb from a SiO2 surface than that related to TEG, and that the desorption temperature for the Ga species is strongly correlative to the selective growth temperature. Consequently, the difference in selective growth temperature may be caused by the desorption rate for the Ga species, originating from the alkyl Ga source. Moreover, the difference in Ga species desorption rates, between GaAs surface and SiO2 surface, will contribute to the selective growth." @default.
- W2076177710 created "2016-06-24" @default.
- W2076177710 creator A5024379099 @default.
- W2076177710 creator A5053041251 @default.
- W2076177710 date "1991-05-01" @default.
- W2076177710 modified "2023-09-27" @default.
- W2076177710 title "Selective growth mechanism of GaAs in metalorganic molecular beam epitaxy" @default.
- W2076177710 cites W1965270910 @default.
- W2076177710 cites W1968715228 @default.
- W2076177710 cites W1971007704 @default.
- W2076177710 cites W1981426247 @default.
- W2076177710 cites W1988248872 @default.
- W2076177710 cites W2005235355 @default.
- W2076177710 cites W2041593491 @default.
- W2076177710 cites W2044296254 @default.
- W2076177710 cites W2053308435 @default.
- W2076177710 cites W2053511798 @default.
- W2076177710 cites W2057388014 @default.
- W2076177710 cites W2066939557 @default.
- W2076177710 cites W2071175890 @default.
- W2076177710 cites W2072768452 @default.
- W2076177710 cites W2086994584 @default.
- W2076177710 doi "https://doi.org/10.1016/0022-0248(91)90905-k" @default.
- W2076177710 hasPublicationYear "1991" @default.
- W2076177710 type Work @default.
- W2076177710 sameAs 2076177710 @default.
- W2076177710 citedByCount "14" @default.
- W2076177710 countsByYear W20761777102012 @default.
- W2076177710 countsByYear W20761777102015 @default.
- W2076177710 countsByYear W20761777102018 @default.
- W2076177710 crossrefType "journal-article" @default.
- W2076177710 hasAuthorship W2076177710A5024379099 @default.
- W2076177710 hasAuthorship W2076177710A5053041251 @default.
- W2076177710 hasConcept C110738630 @default.
- W2076177710 hasConcept C121332964 @default.
- W2076177710 hasConcept C171250308 @default.
- W2076177710 hasConcept C173696418 @default.
- W2076177710 hasConcept C175665537 @default.
- W2076177710 hasConcept C185592680 @default.
- W2076177710 hasConcept C192562407 @default.
- W2076177710 hasConcept C26456737 @default.
- W2076177710 hasConcept C2779227376 @default.
- W2076177710 hasConcept C3792809 @default.
- W2076177710 hasConcept C49040817 @default.
- W2076177710 hasConcept C62520636 @default.
- W2076177710 hasConcept C8010536 @default.
- W2076177710 hasConcept C89611455 @default.
- W2076177710 hasConceptScore W2076177710C110738630 @default.
- W2076177710 hasConceptScore W2076177710C121332964 @default.
- W2076177710 hasConceptScore W2076177710C171250308 @default.
- W2076177710 hasConceptScore W2076177710C173696418 @default.
- W2076177710 hasConceptScore W2076177710C175665537 @default.
- W2076177710 hasConceptScore W2076177710C185592680 @default.
- W2076177710 hasConceptScore W2076177710C192562407 @default.
- W2076177710 hasConceptScore W2076177710C26456737 @default.
- W2076177710 hasConceptScore W2076177710C2779227376 @default.
- W2076177710 hasConceptScore W2076177710C3792809 @default.
- W2076177710 hasConceptScore W2076177710C49040817 @default.
- W2076177710 hasConceptScore W2076177710C62520636 @default.
- W2076177710 hasConceptScore W2076177710C8010536 @default.
- W2076177710 hasConceptScore W2076177710C89611455 @default.
- W2076177710 hasIssue "1" @default.
- W2076177710 hasLocation W20761777101 @default.
- W2076177710 hasOpenAccess W2076177710 @default.
- W2076177710 hasPrimaryLocation W20761777101 @default.
- W2076177710 hasRelatedWork W1504272055 @default.
- W2076177710 hasRelatedWork W1888620668 @default.
- W2076177710 hasRelatedWork W1964538863 @default.
- W2076177710 hasRelatedWork W1973238565 @default.
- W2076177710 hasRelatedWork W2036167158 @default.
- W2076177710 hasRelatedWork W2048148363 @default.
- W2076177710 hasRelatedWork W2093563087 @default.
- W2076177710 hasRelatedWork W30198322 @default.
- W2076177710 hasRelatedWork W90722077 @default.
- W2076177710 hasRelatedWork W345925863 @default.
- W2076177710 hasVolume "112" @default.
- W2076177710 isParatext "false" @default.
- W2076177710 isRetracted "false" @default.
- W2076177710 magId "2076177710" @default.
- W2076177710 workType "article" @default.