Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076202498> ?p ?o ?g. }
- W2076202498 endingPage "10562" @default.
- W2076202498 startingPage "10554" @default.
- W2076202498 abstract "We have used infrared spectroscopy to investigate the decomposition of the gas-phase (Me)3M:NH3 (M = Al, Ga, In) adducts from room temperature to 573 K, at reactant concentrations in the nominal range used for Al(Ga,In)N metal organic chemical vapor deposition. At 473−523 K TMAl:NH3 decomposes quantitatively to yield (Me2)AlNH2 and CH4. Comparison of the experimental and theoretical spectra indicates that the majority of the aluminum metal organic product exists in dimer form, i.e., [(Me2)AlNH2]2. The decomposition reaction exhibits unimolecular decomposition kinetics with rate constant parameters of ν = 1 × 1012 s-1 and Ea = 25.7 kcal/mol. At temperatures <543 K, TMGa + NH3 and TMIn + NH3 mixtures are dominated by reversible adduct formation−dissociation with no detectable quantities of CH4 produced. At 574 K a small amount of decomposition is observed in TMGa + NH3 mixtures, which can be explained by a simple kinetic model that includes the effect of adduct equilibrium. Results demonstrate that the (Me)3Al:NH3 decomposition rate is fast enough to contribute to the early stages of a concerted parasitic chemical reaction mechanism, but the (Me)3Ga:NH3 decomposition rate is too slow." @default.
- W2076202498 created "2016-06-24" @default.
- W2076202498 creator A5007319638 @default.
- W2076202498 creator A5025025017 @default.
- W2076202498 date "2005-11-01" @default.
- W2076202498 modified "2023-10-03" @default.
- W2076202498 title "Kinetics of Metal Organic−Ammonia Adduct Decomposition: Implications for Group-III Nitride MOCVD" @default.
- W2076202498 cites W1561991687 @default.
- W2076202498 cites W1967824846 @default.
- W2076202498 cites W1973719236 @default.
- W2076202498 cites W1979502099 @default.
- W2076202498 cites W1979736280 @default.
- W2076202498 cites W1986615098 @default.
- W2076202498 cites W1987104764 @default.
- W2076202498 cites W1989157842 @default.
- W2076202498 cites W1997757647 @default.
- W2076202498 cites W2000379809 @default.
- W2076202498 cites W2003701273 @default.
- W2076202498 cites W2006514235 @default.
- W2076202498 cites W2008507011 @default.
- W2076202498 cites W2012494369 @default.
- W2076202498 cites W2015357876 @default.
- W2076202498 cites W2020042245 @default.
- W2076202498 cites W2020775619 @default.
- W2076202498 cites W2024900818 @default.
- W2076202498 cites W2025134782 @default.
- W2076202498 cites W2031880204 @default.
- W2076202498 cites W2032028957 @default.
- W2076202498 cites W2032775803 @default.
- W2076202498 cites W2048116955 @default.
- W2076202498 cites W2054795482 @default.
- W2076202498 cites W2054853870 @default.
- W2076202498 cites W2059906873 @default.
- W2076202498 cites W2060992450 @default.
- W2076202498 cites W2065276880 @default.
- W2076202498 cites W2072019533 @default.
- W2076202498 cites W2080263419 @default.
- W2076202498 cites W2093480377 @default.
- W2076202498 cites W2102137949 @default.
- W2076202498 cites W2107582627 @default.
- W2076202498 cites W2129579634 @default.
- W2076202498 cites W2137328429 @default.
- W2076202498 cites W2143981217 @default.
- W2076202498 cites W2171005857 @default.
- W2076202498 cites W2586211505 @default.
- W2076202498 cites W2950229617 @default.
- W2076202498 cites W2951345448 @default.
- W2076202498 cites W2952116865 @default.
- W2076202498 cites W3023401049 @default.
- W2076202498 cites W4235689110 @default.
- W2076202498 doi "https://doi.org/10.1021/jp054380s" @default.
- W2076202498 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/16834311" @default.
- W2076202498 hasPublicationYear "2005" @default.
- W2076202498 type Work @default.
- W2076202498 sameAs 2076202498 @default.
- W2076202498 citedByCount "41" @default.
- W2076202498 countsByYear W20762024982012 @default.
- W2076202498 countsByYear W20762024982013 @default.
- W2076202498 countsByYear W20762024982014 @default.
- W2076202498 countsByYear W20762024982015 @default.
- W2076202498 countsByYear W20762024982016 @default.
- W2076202498 countsByYear W20762024982017 @default.
- W2076202498 countsByYear W20762024982018 @default.
- W2076202498 countsByYear W20762024982019 @default.
- W2076202498 countsByYear W20762024982020 @default.
- W2076202498 countsByYear W20762024982021 @default.
- W2076202498 countsByYear W20762024982022 @default.
- W2076202498 countsByYear W20762024982023 @default.
- W2076202498 crossrefType "journal-article" @default.
- W2076202498 hasAuthorship W2076202498A5007319638 @default.
- W2076202498 hasAuthorship W2076202498A5025025017 @default.
- W2076202498 hasConcept C102931765 @default.
- W2076202498 hasConcept C108204754 @default.
- W2076202498 hasConcept C110738630 @default.
- W2076202498 hasConcept C121332964 @default.
- W2076202498 hasConcept C124681953 @default.
- W2076202498 hasConcept C147789679 @default.
- W2076202498 hasConcept C148898269 @default.
- W2076202498 hasConcept C153642686 @default.
- W2076202498 hasConcept C175665537 @default.
- W2076202498 hasConcept C178790620 @default.
- W2076202498 hasConcept C179104552 @default.
- W2076202498 hasConcept C185592680 @default.
- W2076202498 hasConcept C2776382133 @default.
- W2076202498 hasConcept C2779227376 @default.
- W2076202498 hasConcept C2779546866 @default.
- W2076202498 hasConcept C48333953 @default.
- W2076202498 hasConcept C537208039 @default.
- W2076202498 hasConcept C544153396 @default.
- W2076202498 hasConcept C62520636 @default.
- W2076202498 hasConcept C93391505 @default.
- W2076202498 hasConceptScore W2076202498C102931765 @default.
- W2076202498 hasConceptScore W2076202498C108204754 @default.
- W2076202498 hasConceptScore W2076202498C110738630 @default.
- W2076202498 hasConceptScore W2076202498C121332964 @default.
- W2076202498 hasConceptScore W2076202498C124681953 @default.
- W2076202498 hasConceptScore W2076202498C147789679 @default.
- W2076202498 hasConceptScore W2076202498C148898269 @default.