Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076222749> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2076222749 endingPage "4885" @default.
- W2076222749 startingPage "4882" @default.
- W2076222749 abstract "A novel etch front roughening phenomenon has been observed in the plasma etching of Si(100). The morphology exhibits a network structure with holes which coarsen with etech time, and a wavelength selection with a characteristic spatial frequency decreasing with time. The average local slope is invariant while the vertical roughness grows as $wensuremath{sim}{t}^{ensuremath{beta}}$, with $ensuremath{beta}phantom{rule{0ex}{0ex}}=phantom{rule{0ex}{0ex}}0.91ifmmodepmelsetextpmfi{}0.03$. We suggest a nonlocal Langevin equation based on the redistribution of the reactant gas flux by local morphological features. Numerical calculations give results consistent with our experiments." @default.
- W2076222749 created "2016-06-24" @default.
- W2076222749 creator A5004669507 @default.
- W2076222749 creator A5006897488 @default.
- W2076222749 creator A5020867211 @default.
- W2076222749 creator A5036379653 @default.
- W2076222749 date "1999-06-14" @default.
- W2076222749 modified "2023-10-14" @default.
- W2076222749 title "Roughening in Plasma Etch Fronts of Si(100)" @default.
- W2076222749 cites W1975212415 @default.
- W2076222749 cites W1989870118 @default.
- W2076222749 cites W1993548322 @default.
- W2076222749 cites W2000422079 @default.
- W2076222749 cites W2000932984 @default.
- W2076222749 cites W2004268977 @default.
- W2076222749 cites W2008919294 @default.
- W2076222749 cites W2046145053 @default.
- W2076222749 cites W2053723379 @default.
- W2076222749 cites W2068191335 @default.
- W2076222749 cites W2068542435 @default.
- W2076222749 cites W2071985143 @default.
- W2076222749 cites W2086411813 @default.
- W2076222749 cites W2977474616 @default.
- W2076222749 doi "https://doi.org/10.1103/physrevlett.82.4882" @default.
- W2076222749 hasPublicationYear "1999" @default.
- W2076222749 type Work @default.
- W2076222749 sameAs 2076222749 @default.
- W2076222749 citedByCount "87" @default.
- W2076222749 countsByYear W20762227492012 @default.
- W2076222749 countsByYear W20762227492013 @default.
- W2076222749 countsByYear W20762227492014 @default.
- W2076222749 countsByYear W20762227492015 @default.
- W2076222749 countsByYear W20762227492016 @default.
- W2076222749 countsByYear W20762227492017 @default.
- W2076222749 countsByYear W20762227492018 @default.
- W2076222749 countsByYear W20762227492019 @default.
- W2076222749 countsByYear W20762227492021 @default.
- W2076222749 countsByYear W20762227492022 @default.
- W2076222749 countsByYear W20762227492023 @default.
- W2076222749 crossrefType "journal-article" @default.
- W2076222749 hasAuthorship W2076222749A5004669507 @default.
- W2076222749 hasAuthorship W2076222749A5006897488 @default.
- W2076222749 hasAuthorship W2076222749A5020867211 @default.
- W2076222749 hasAuthorship W2076222749A5036379653 @default.
- W2076222749 hasConcept C120665830 @default.
- W2076222749 hasConcept C121332964 @default.
- W2076222749 hasConcept C159985019 @default.
- W2076222749 hasConcept C184779094 @default.
- W2076222749 hasConcept C192562407 @default.
- W2076222749 hasConcept C199360897 @default.
- W2076222749 hasConcept C26873012 @default.
- W2076222749 hasConcept C2776174256 @default.
- W2076222749 hasConcept C41008148 @default.
- W2076222749 hasConcept C62520636 @default.
- W2076222749 hasConcept C6260449 @default.
- W2076222749 hasConcept C71039073 @default.
- W2076222749 hasConcept C82706917 @default.
- W2076222749 hasConceptScore W2076222749C120665830 @default.
- W2076222749 hasConceptScore W2076222749C121332964 @default.
- W2076222749 hasConceptScore W2076222749C159985019 @default.
- W2076222749 hasConceptScore W2076222749C184779094 @default.
- W2076222749 hasConceptScore W2076222749C192562407 @default.
- W2076222749 hasConceptScore W2076222749C199360897 @default.
- W2076222749 hasConceptScore W2076222749C26873012 @default.
- W2076222749 hasConceptScore W2076222749C2776174256 @default.
- W2076222749 hasConceptScore W2076222749C41008148 @default.
- W2076222749 hasConceptScore W2076222749C62520636 @default.
- W2076222749 hasConceptScore W2076222749C6260449 @default.
- W2076222749 hasConceptScore W2076222749C71039073 @default.
- W2076222749 hasConceptScore W2076222749C82706917 @default.
- W2076222749 hasIssue "24" @default.
- W2076222749 hasLocation W20762227491 @default.
- W2076222749 hasOpenAccess W2076222749 @default.
- W2076222749 hasPrimaryLocation W20762227491 @default.
- W2076222749 hasRelatedWork W2055361825 @default.
- W2076222749 hasRelatedWork W2077215210 @default.
- W2076222749 hasRelatedWork W2161514919 @default.
- W2076222749 hasRelatedWork W2321604366 @default.
- W2076222749 hasRelatedWork W2620249052 @default.
- W2076222749 hasRelatedWork W2889209824 @default.
- W2076222749 hasRelatedWork W2946946499 @default.
- W2076222749 hasRelatedWork W4240692630 @default.
- W2076222749 hasRelatedWork W2496245880 @default.
- W2076222749 hasRelatedWork W2499519824 @default.
- W2076222749 hasVolume "82" @default.
- W2076222749 isParatext "false" @default.
- W2076222749 isRetracted "false" @default.
- W2076222749 magId "2076222749" @default.
- W2076222749 workType "article" @default.