Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076240461> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2076240461 abstract "Formation of the biorecognition layers within microfluidic sensor channels must be done after the completion of the channel structure since these layers cannot withstand the wafer bonding temperature. We propose a new post-bonding immobilization process to prepare the enzyme layers within microfluidic channels of electrochemical biosensors. An array of Pt vertical electrodes is electroplated using a SU-8 mold. The cured SU-8 is then removed by plasma etching to expose the Pt electrode and to define the fluidic channel cavity simultaneously. An array of enzyme posts is formed on the Pt surface by either electropolymerizing or photopolymerizing enzyme precursor solutions injected into the channel. Very little report is available about the reactive ion etching (RIE) of SU-8 that is the most critical step in this process. A systematic investigation on the RIE of SU-8 is conducted to obtain the maximum etch rate (1.2 mum/min.) based on different combinations of parameters of CF4 and O2 gas flow, RF power and time." @default.
- W2076240461 created "2016-06-24" @default.
- W2076240461 creator A5007529310 @default.
- W2076240461 creator A5015980893 @default.
- W2076240461 creator A5056188023 @default.
- W2076240461 creator A5071650122 @default.
- W2076240461 creator A5079551022 @default.
- W2076240461 date "2006-10-01" @default.
- W2076240461 modified "2023-09-25" @default.
- W2076240461 title "Process development for the formation of post-bonding biorecognition layers in microfluidic biosensors" @default.
- W2076240461 cites W2000186646 @default.
- W2076240461 cites W2023639503 @default.
- W2076240461 cites W2035757080 @default.
- W2076240461 cites W2113492577 @default.
- W2076240461 cites W2131774812 @default.
- W2076240461 cites W2135154635 @default.
- W2076240461 doi "https://doi.org/10.1109/icsens.2007.355548" @default.
- W2076240461 hasPublicationYear "2006" @default.
- W2076240461 type Work @default.
- W2076240461 sameAs 2076240461 @default.
- W2076240461 citedByCount "0" @default.
- W2076240461 crossrefType "proceedings-article" @default.
- W2076240461 hasAuthorship W2076240461A5007529310 @default.
- W2076240461 hasAuthorship W2076240461A5015980893 @default.
- W2076240461 hasAuthorship W2076240461A5056188023 @default.
- W2076240461 hasAuthorship W2076240461A5071650122 @default.
- W2076240461 hasAuthorship W2076240461A5079551022 @default.
- W2076240461 hasConcept C100460472 @default.
- W2076240461 hasConcept C119599485 @default.
- W2076240461 hasConcept C121332964 @default.
- W2076240461 hasConcept C127413603 @default.
- W2076240461 hasConcept C130472188 @default.
- W2076240461 hasConcept C132651336 @default.
- W2076240461 hasConcept C136525101 @default.
- W2076240461 hasConcept C142724271 @default.
- W2076240461 hasConcept C147789679 @default.
- W2076240461 hasConcept C160671074 @default.
- W2076240461 hasConcept C160756335 @default.
- W2076240461 hasConcept C162117346 @default.
- W2076240461 hasConcept C171250308 @default.
- W2076240461 hasConcept C172120300 @default.
- W2076240461 hasConcept C17525397 @default.
- W2076240461 hasConcept C185592680 @default.
- W2076240461 hasConcept C192562407 @default.
- W2076240461 hasConcept C204787440 @default.
- W2076240461 hasConcept C2779133538 @default.
- W2076240461 hasConcept C2779227376 @default.
- W2076240461 hasConcept C37977207 @default.
- W2076240461 hasConcept C49040817 @default.
- W2076240461 hasConcept C51807945 @default.
- W2076240461 hasConcept C52859227 @default.
- W2076240461 hasConcept C62520636 @default.
- W2076240461 hasConcept C71924100 @default.
- W2076240461 hasConcept C8673954 @default.
- W2076240461 hasConceptScore W2076240461C100460472 @default.
- W2076240461 hasConceptScore W2076240461C119599485 @default.
- W2076240461 hasConceptScore W2076240461C121332964 @default.
- W2076240461 hasConceptScore W2076240461C127413603 @default.
- W2076240461 hasConceptScore W2076240461C130472188 @default.
- W2076240461 hasConceptScore W2076240461C132651336 @default.
- W2076240461 hasConceptScore W2076240461C136525101 @default.
- W2076240461 hasConceptScore W2076240461C142724271 @default.
- W2076240461 hasConceptScore W2076240461C147789679 @default.
- W2076240461 hasConceptScore W2076240461C160671074 @default.
- W2076240461 hasConceptScore W2076240461C160756335 @default.
- W2076240461 hasConceptScore W2076240461C162117346 @default.
- W2076240461 hasConceptScore W2076240461C171250308 @default.
- W2076240461 hasConceptScore W2076240461C172120300 @default.
- W2076240461 hasConceptScore W2076240461C17525397 @default.
- W2076240461 hasConceptScore W2076240461C185592680 @default.
- W2076240461 hasConceptScore W2076240461C192562407 @default.
- W2076240461 hasConceptScore W2076240461C204787440 @default.
- W2076240461 hasConceptScore W2076240461C2779133538 @default.
- W2076240461 hasConceptScore W2076240461C2779227376 @default.
- W2076240461 hasConceptScore W2076240461C37977207 @default.
- W2076240461 hasConceptScore W2076240461C49040817 @default.
- W2076240461 hasConceptScore W2076240461C51807945 @default.
- W2076240461 hasConceptScore W2076240461C52859227 @default.
- W2076240461 hasConceptScore W2076240461C62520636 @default.
- W2076240461 hasConceptScore W2076240461C71924100 @default.
- W2076240461 hasConceptScore W2076240461C8673954 @default.
- W2076240461 hasLocation W20762404611 @default.
- W2076240461 hasOpenAccess W2076240461 @default.
- W2076240461 hasPrimaryLocation W20762404611 @default.
- W2076240461 hasRelatedWork W116109801 @default.
- W2076240461 hasRelatedWork W2153949890 @default.
- W2076240461 hasRelatedWork W2209105269 @default.
- W2076240461 hasRelatedWork W2413154917 @default.
- W2076240461 hasRelatedWork W2911745557 @default.
- W2076240461 hasRelatedWork W2938035759 @default.
- W2076240461 hasRelatedWork W3135562135 @default.
- W2076240461 hasRelatedWork W3206575557 @default.
- W2076240461 hasRelatedWork W4213426881 @default.
- W2076240461 hasRelatedWork W2133193634 @default.
- W2076240461 isParatext "false" @default.
- W2076240461 isRetracted "false" @default.
- W2076240461 magId "2076240461" @default.
- W2076240461 workType "article" @default.