Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076240468> ?p ?o ?g. }
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- W2076240468 endingPage "511" @default.
- W2076240468 startingPage "507" @default.
- W2076240468 abstract "Un-doped poly process becomes more critical with CMOS scaling down as gate electrode in advanced Poly/SiON process and dummy poly in HK/MG technology. The poly grain size and roughness impact the device mis-match between different transistors like NMOS off current fluctuation and it plays as dummy poly role in HK/MG technology. It is necessary to investigate the poly grain size after deposition and thermal process as it will change the poly grain structure. In this paper, top view Scanning Electrical Microscope (SEM), X-ray Diffraction (XRD),Atomic Force Microscopy (AFM) and Transmission Electron Microscope (TEM) are used to characterize the poly grain size, crystalline fraction, surface roughness and poly structure. It is find that the poly grain becomes larger after thermal, especially spike anneal. A smaller grain size of undoped poly with lower roughness was achieved by process tuning of temperature, pressure, gas flow etc which was implemented in device wafer and get improved performance." @default.
- W2076240468 created "2016-06-24" @default.
- W2076240468 creator A5008093018 @default.
- W2076240468 creator A5012154320 @default.
- W2076240468 creator A5014039590 @default.
- W2076240468 creator A5034143419 @default.
- W2076240468 creator A5034697631 @default.
- W2076240468 date "2014-02-27" @default.
- W2076240468 modified "2023-10-16" @default.
- W2076240468 title "Investigation of Poly Film Application in Advanced MOSFET Technology" @default.
- W2076240468 doi "https://doi.org/10.1149/06001.0507ecst" @default.
- W2076240468 hasPublicationYear "2014" @default.
- W2076240468 type Work @default.
- W2076240468 sameAs 2076240468 @default.
- W2076240468 citedByCount "2" @default.
- W2076240468 countsByYear W20762404682016 @default.
- W2076240468 countsByYear W20762404682017 @default.
- W2076240468 crossrefType "journal-article" @default.
- W2076240468 hasAuthorship W2076240468A5008093018 @default.
- W2076240468 hasAuthorship W2076240468A5012154320 @default.
- W2076240468 hasAuthorship W2076240468A5014039590 @default.
- W2076240468 hasAuthorship W2076240468A5034143419 @default.
- W2076240468 hasAuthorship W2076240468A5034697631 @default.
- W2076240468 hasConcept C107365816 @default.
- W2076240468 hasConcept C119599485 @default.
- W2076240468 hasConcept C127413603 @default.
- W2076240468 hasConcept C146088050 @default.
- W2076240468 hasConcept C159985019 @default.
- W2076240468 hasConcept C160671074 @default.
- W2076240468 hasConcept C165801399 @default.
- W2076240468 hasConcept C171250308 @default.
- W2076240468 hasConcept C172385210 @default.
- W2076240468 hasConcept C192191005 @default.
- W2076240468 hasConcept C192562407 @default.
- W2076240468 hasConcept C197162436 @default.
- W2076240468 hasConcept C26771246 @default.
- W2076240468 hasConcept C71039073 @default.
- W2076240468 hasConceptScore W2076240468C107365816 @default.
- W2076240468 hasConceptScore W2076240468C119599485 @default.
- W2076240468 hasConceptScore W2076240468C127413603 @default.
- W2076240468 hasConceptScore W2076240468C146088050 @default.
- W2076240468 hasConceptScore W2076240468C159985019 @default.
- W2076240468 hasConceptScore W2076240468C160671074 @default.
- W2076240468 hasConceptScore W2076240468C165801399 @default.
- W2076240468 hasConceptScore W2076240468C171250308 @default.
- W2076240468 hasConceptScore W2076240468C172385210 @default.
- W2076240468 hasConceptScore W2076240468C192191005 @default.
- W2076240468 hasConceptScore W2076240468C192562407 @default.
- W2076240468 hasConceptScore W2076240468C197162436 @default.
- W2076240468 hasConceptScore W2076240468C26771246 @default.
- W2076240468 hasConceptScore W2076240468C71039073 @default.
- W2076240468 hasIssue "1" @default.
- W2076240468 hasLocation W20762404681 @default.
- W2076240468 hasOpenAccess W2076240468 @default.
- W2076240468 hasPrimaryLocation W20762404681 @default.
- W2076240468 hasRelatedWork W1512319868 @default.
- W2076240468 hasRelatedWork W1970133672 @default.
- W2076240468 hasRelatedWork W2023388273 @default.
- W2076240468 hasRelatedWork W2041878788 @default.
- W2076240468 hasRelatedWork W2132635108 @default.
- W2076240468 hasRelatedWork W2196605515 @default.
- W2076240468 hasRelatedWork W2351696714 @default.
- W2076240468 hasRelatedWork W2374963277 @default.
- W2076240468 hasRelatedWork W2387616028 @default.
- W2076240468 hasRelatedWork W3144367999 @default.
- W2076240468 hasVolume "60" @default.
- W2076240468 isParatext "false" @default.
- W2076240468 isRetracted "false" @default.
- W2076240468 magId "2076240468" @default.
- W2076240468 workType "article" @default.