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• W2076252617 endingPage "1972" @default.
• W2076252617 startingPage "1969" @default.
• W2076252617 abstract "With the aim of preparing nano-scale pattern for micro-machines and nano-devices, fabrication and imprint ability of Pd39Cu29Ni13P19 glassy alloy thin film were investigated. By using a magnetron sputtering method, the Pd-based glassy alloy thin film of 1 μm in thickness was successfully fabricated. The Pd-based glassy alloy thin film shows large supercooled liquid region, long incubation time to crystallization, high hardness and very smooth surface, which are suitable for nano-imprint processing. Nano-imprint ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The imprinted hole array pattern precisely corresponded to the periodic dot pattern of the mold. These results suggest that the Pd-based glassy alloy thin film has high potential for application to the nano-imprinting materials for micro-machines and nano-devices." @default.
• W2076252617 created "2016-06-24" @default.
• W2076252617 creator A5008412118 @default.
• W2076252617 creator A5021407470 @default.
• W2076252617 creator A5038808160 @default.
• W2076252617 creator A5072817859 @default.
• W2076252617 date "2010-10-01" @default.
• W2076252617 modified "2023-09-27" @default.
• W2076252617 title "Thermal stability, mechanical properties and nano-imprint ability of Pd-Cu-Ni-P glassy alloy thin film" @default.
• W2076252617 cites W1970595242 @default.
• W2076252617 cites W1992297369 @default.
• W2076252617 cites W1994770831 @default.
• W2076252617 cites W1997795585 @default.
• W2076252617 cites W2008016540 @default.
• W2076252617 cites W2032793448 @default.
• W2076252617 cites W2039971369 @default.
• W2076252617 cites W2042320556 @default.
• W2076252617 cites W2044926188 @default.
• W2076252617 cites W2046019884 @default.
• W2076252617 cites W2062047511 @default.
• W2076252617 cites W2062074587 @default.
• W2076252617 cites W2063934921 @default.
• W2076252617 cites W2066583856 @default.
• W2076252617 cites W2082179795 @default.
• W2076252617 cites W2088379676 @default.
• W2076252617 cites W2092422144 @default.
• W2076252617 cites W2117580806 @default.
• W2076252617 cites W2157254946 @default.
• W2076252617 cites W2162044192 @default.
• W2076252617 cites W4240721670 @default.
• W2076252617 doi "https://doi.org/10.1016/j.intermet.2010.02.045" @default.
• W2076252617 hasPublicationYear "2010" @default.
• W2076252617 type Work @default.
• W2076252617 sameAs 2076252617 @default.
• W2076252617 citedByCount "14" @default.
• W2076252617 countsByYear W20762526172012 @default.
• W2076252617 countsByYear W20762526172014 @default.
• W2076252617 countsByYear W20762526172017 @default.
• W2076252617 crossrefType "journal-article" @default.
• W2076252617 hasAuthorship W2076252617A5008412118 @default.
• W2076252617 hasAuthorship W2076252617A5021407470 @default.
• W2076252617 hasAuthorship W2076252617A5038808160 @default.
• W2076252617 hasAuthorship W2076252617A5072817859 @default.
• W2076252617 hasConcept C112964491 @default.
• W2076252617 hasConcept C121332964 @default.
• W2076252617 hasConcept C123266363 @default.
• W2076252617 hasConcept C127413603 @default.
• W2076252617 hasConcept C136525101 @default.
• W2076252617 hasConcept C142724271 @default.
• W2076252617 hasConcept C159985019 @default.
• W2076252617 hasConcept C171250308 @default.
• W2076252617 hasConcept C19067145 @default.
• W2076252617 hasConcept C192562407 @default.
• W2076252617 hasConcept C203036418 @default.
• W2076252617 hasConcept C204787440 @default.
• W2076252617 hasConcept C22423302 @default.
• W2076252617 hasConcept C2780026712 @default.
• W2076252617 hasConcept C2780357685 @default.
• W2076252617 hasConcept C2780566776 @default.
• W2076252617 hasConcept C42360764 @default.
• W2076252617 hasConcept C59061564 @default.
• W2076252617 hasConcept C61427134 @default.
• W2076252617 hasConcept C71924100 @default.
• W2076252617 hasConcept C97355855 @default.
• W2076252617 hasConceptScore W2076252617C112964491 @default.
• W2076252617 hasConceptScore W2076252617C121332964 @default.
• W2076252617 hasConceptScore W2076252617C123266363 @default.
• W2076252617 hasConceptScore W2076252617C127413603 @default.
• W2076252617 hasConceptScore W2076252617C136525101 @default.
• W2076252617 hasConceptScore W2076252617C142724271 @default.
• W2076252617 hasConceptScore W2076252617C159985019 @default.
• W2076252617 hasConceptScore W2076252617C171250308 @default.
• W2076252617 hasConceptScore W2076252617C19067145 @default.
• W2076252617 hasConceptScore W2076252617C192562407 @default.
• W2076252617 hasConceptScore W2076252617C203036418 @default.
• W2076252617 hasConceptScore W2076252617C204787440 @default.
• W2076252617 hasConceptScore W2076252617C22423302 @default.
• W2076252617 hasConceptScore W2076252617C2780026712 @default.
• W2076252617 hasConceptScore W2076252617C2780357685 @default.
• W2076252617 hasConceptScore W2076252617C2780566776 @default.
• W2076252617 hasConceptScore W2076252617C42360764 @default.
• W2076252617 hasConceptScore W2076252617C59061564 @default.
• W2076252617 hasConceptScore W2076252617C61427134 @default.
• W2076252617 hasConceptScore W2076252617C71924100 @default.
• W2076252617 hasConceptScore W2076252617C97355855 @default.
• W2076252617 hasIssue "10" @default.
• W2076252617 hasLocation W20762526171 @default.
• W2076252617 hasOpenAccess W2076252617 @default.
• W2076252617 hasPrimaryLocation W20762526171 @default.
• W2076252617 hasRelatedWork W2041316190 @default.
• W2076252617 hasRelatedWork W2061323148 @default.
• W2076252617 hasRelatedWork W2113905780 @default.
• W2076252617 hasRelatedWork W2153846871 @default.
• W2076252617 hasRelatedWork W2316948141 @default.
• W2076252617 hasRelatedWork W2370817605 @default.
• W2076252617 hasRelatedWork W2380767736 @default.
• W2076252617 hasRelatedWork W2413495170 @default.
• W2076252617 hasRelatedWork W2902239188 @default.

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