FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076257951> ?p ?o ?g. }

• W2076257951 endingPage "1181" @default.
• W2076257951 startingPage "1178" @default.
• W2076257951 abstract "SnO2 films doped with Sb (ATO) were deposited both on unheated glass substrates and on glass substrates that had been heated at 200 °C by reactive sputtering of an Sb–Sn alloy target with a plasma control unit (PCU) and mid-frequency (mf, 50 kHz) unipolar pulsing. The PCU feedback system monitors the oxidation states of target surface by detecting the sputtering cathode voltage (impedance control method). The mf pulse wave is approximately square-shaped; this helps to reduce arcing on the target when high power density is applied on the cathode. In case of the ATO depositions on the heated substrate at 200 °C in the “transition region” of reactive sputtering, the deposition rate was 280 nm/min, the lowest resistivity of the ATO films was 4.6 × 10− 3 Ω cm and the optical transmittance was over 80% in the visible region of light." @default.
• W2076257951 created "2016-06-24" @default.
• W2076257951 creator A5013644948 @default.
• W2076257951 creator A5027991895 @default.
• W2076257951 creator A5038646221 @default.
• W2076257951 creator A5047985138 @default.
• W2076257951 creator A5063715165 @default.
• W2076257951 creator A5088847015 @default.
• W2076257951 date "2011-12-01" @default.
• W2076257951 modified "2023-09-23" @default.
• W2076257951 title "High-rate deposition of Sb-doped SnO2 films by reactive sputtering using the impedance control method" @default.
• W2076257951 cites W1969991462 @default.
• W2076257951 cites W1970452615 @default.
• W2076257951 cites W1976064050 @default.
• W2076257951 cites W1980099270 @default.
• W2076257951 cites W1984834968 @default.
• W2076257951 cites W1992727139 @default.
• W2076257951 cites W2003176142 @default.
• W2076257951 cites W2009246450 @default.
• W2076257951 cites W2022508831 @default.
• W2076257951 cites W2023696694 @default.
• W2076257951 cites W2025284863 @default.
• W2076257951 cites W2026509833 @default.
• W2076257951 cites W2030271267 @default.
• W2076257951 cites W2062404953 @default.
• W2076257951 cites W2062814645 @default.
• W2076257951 cites W2070409462 @default.
• W2076257951 cites W2075385866 @default.
• W2076257951 cites W2083549727 @default.
• W2076257951 doi "https://doi.org/10.1016/j.tsf.2011.04.151" @default.
• W2076257951 hasPublicationYear "2011" @default.
• W2076257951 type Work @default.
• W2076257951 sameAs 2076257951 @default.
• W2076257951 citedByCount "21" @default.
• W2076257951 countsByYear W20762579512012 @default.
• W2076257951 countsByYear W20762579512013 @default.
• W2076257951 countsByYear W20762579512014 @default.
• W2076257951 countsByYear W20762579512015 @default.
• W2076257951 countsByYear W20762579512016 @default.
• W2076257951 countsByYear W20762579512017 @default.
• W2076257951 countsByYear W20762579512018 @default.
• W2076257951 countsByYear W20762579512019 @default.
• W2076257951 countsByYear W20762579512020 @default.
• W2076257951 countsByYear W20762579512022 @default.
• W2076257951 crossrefType "journal-article" @default.
• W2076257951 hasAuthorship W2076257951A5013644948 @default.
• W2076257951 hasAuthorship W2076257951A5027991895 @default.
• W2076257951 hasAuthorship W2076257951A5038646221 @default.
• W2076257951 hasAuthorship W2076257951A5047985138 @default.
• W2076257951 hasAuthorship W2076257951A5063715165 @default.
• W2076257951 hasAuthorship W2076257951A5088847015 @default.
• W2076257951 hasConcept C111368507 @default.
• W2076257951 hasConcept C113196181 @default.
• W2076257951 hasConcept C119599485 @default.
• W2076257951 hasConcept C127313418 @default.
• W2076257951 hasConcept C127413603 @default.
• W2076257951 hasConcept C147789679 @default.
• W2076257951 hasConcept C150493377 @default.
• W2076257951 hasConcept C151730666 @default.
• W2076257951 hasConcept C171250308 @default.
• W2076257951 hasConcept C185592680 @default.
• W2076257951 hasConcept C19067145 @default.
• W2076257951 hasConcept C192562407 @default.
• W2076257951 hasConcept C22423302 @default.
• W2076257951 hasConcept C2777289219 @default.
• W2076257951 hasConcept C2816523 @default.
• W2076257951 hasConcept C43617362 @default.
• W2076257951 hasConcept C49040817 @default.
• W2076257951 hasConcept C49110097 @default.
• W2076257951 hasConcept C57863236 @default.
• W2076257951 hasConcept C64297162 @default.
• W2076257951 hasConcept C69990965 @default.
• W2076257951 hasConcept C86803240 @default.
• W2076257951 hasConceptScore W2076257951C111368507 @default.
• W2076257951 hasConceptScore W2076257951C113196181 @default.
• W2076257951 hasConceptScore W2076257951C119599485 @default.
• W2076257951 hasConceptScore W2076257951C127313418 @default.
• W2076257951 hasConceptScore W2076257951C127413603 @default.
• W2076257951 hasConceptScore W2076257951C147789679 @default.
• W2076257951 hasConceptScore W2076257951C150493377 @default.
• W2076257951 hasConceptScore W2076257951C151730666 @default.
• W2076257951 hasConceptScore W2076257951C171250308 @default.
• W2076257951 hasConceptScore W2076257951C185592680 @default.
• W2076257951 hasConceptScore W2076257951C19067145 @default.
• W2076257951 hasConceptScore W2076257951C192562407 @default.
• W2076257951 hasConceptScore W2076257951C22423302 @default.
• W2076257951 hasConceptScore W2076257951C2777289219 @default.
• W2076257951 hasConceptScore W2076257951C2816523 @default.
• W2076257951 hasConceptScore W2076257951C43617362 @default.
• W2076257951 hasConceptScore W2076257951C49040817 @default.
• W2076257951 hasConceptScore W2076257951C49110097 @default.
• W2076257951 hasConceptScore W2076257951C57863236 @default.
• W2076257951 hasConceptScore W2076257951C64297162 @default.
• W2076257951 hasConceptScore W2076257951C69990965 @default.
• W2076257951 hasConceptScore W2076257951C86803240 @default.
• W2076257951 hasIssue "4" @default.
• W2076257951 hasLocation W20762579511 @default.
• W2076257951 hasOpenAccess W2076257951 @default.

• next