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- W2076308001 abstract "The authors present fabrication process details and test data for a vertical-via interconnection suitable for low-frequency signal extraction from infrared antenna-coupled sensors. Electrical readout of the signal from an antenna-coupled bolometer was accomplished using two 300nm diameter Au via structures that extended 300nm in the vertical direction. These vertical vias passed through two isolation layers of SiO2 and through a 1500×600nm2 cutout in a ground plane. Electromagnetic isolation of the antenna from its associated electrical-readout bondpads at 28.3THz in the infrared was demonstrated by mapping the two-dimensional spatial response of the antenna and comparing it to spatial response data from a similar structure without the intervening ground plane." @default.
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- W2076308001 date "2006-11-01" @default.
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- W2076308001 title "Vertical-via interconnection for infrared antennas" @default.
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- W2076308001 doi "https://doi.org/10.1116/1.2366613" @default.
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