Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076334011> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2076334011 endingPage "1417" @default.
- W2076334011 startingPage "1413" @default.
- W2076334011 abstract "In a TiN etching process using electron cyclotron resonance (ECR) plasma of BCl3 and Cl2 gas mixture, the decline of TiN etch rate was observed after the erosion of the photoresist surface with the ECR plasma, but we could prevent the decline by the addition of N2 to the etching gas mixture. Carbon was detected by x-ray photoelectron spectroscopy (XPS) on the TiN surface (on which there was no photoresist) etched in the reactor with the ECR plasma after the erosion of the photoresist. The TiN surface was contaminated by carbon in the reactor during the etching process. N2 gas was added to reduce carbon contamination. In fact, after the photoresist was eroded with the N2 added ECR plasma, carbon was hardly detected by the XPS on the sample surface etched in the reactor and the TiN etch rate did not decline. Therefore, we concluded that carbon contamination on the TiN surface originated from the erosion of the photoresist with the ECR plasma causing the decline of the TiN etch rate. The effect of N2 addition must be attributed to the reaction between nitrogen radical in the N2 added ECR plasma and carbon in the reactor." @default.
- W2076334011 created "2016-06-24" @default.
- W2076334011 creator A5013802192 @default.
- W2076334011 creator A5016286466 @default.
- W2076334011 creator A5026053063 @default.
- W2076334011 creator A5026408534 @default.
- W2076334011 creator A5027506482 @default.
- W2076334011 creator A5070074634 @default.
- W2076334011 date "1997-05-01" @default.
- W2076334011 modified "2023-10-08" @default.
- W2076334011 title "Carbon contamination in an etching reactor using electron cyclotron resonance plasma and the effect of a N2 addition" @default.
- W2076334011 cites W2094498700 @default.
- W2076334011 doi "https://doi.org/10.1116/1.580552" @default.
- W2076334011 hasPublicationYear "1997" @default.
- W2076334011 type Work @default.
- W2076334011 sameAs 2076334011 @default.
- W2076334011 citedByCount "0" @default.
- W2076334011 crossrefType "journal-article" @default.
- W2076334011 hasAuthorship W2076334011A5013802192 @default.
- W2076334011 hasAuthorship W2076334011A5016286466 @default.
- W2076334011 hasAuthorship W2076334011A5026053063 @default.
- W2076334011 hasAuthorship W2076334011A5026408534 @default.
- W2076334011 hasAuthorship W2076334011A5027506482 @default.
- W2076334011 hasAuthorship W2076334011A5070074634 @default.
- W2076334011 hasConcept C100460472 @default.
- W2076334011 hasConcept C104779481 @default.
- W2076334011 hasConcept C107187091 @default.
- W2076334011 hasConcept C107872376 @default.
- W2076334011 hasConcept C113196181 @default.
- W2076334011 hasConcept C121332964 @default.
- W2076334011 hasConcept C127413603 @default.
- W2076334011 hasConcept C134406635 @default.
- W2076334011 hasConcept C140205800 @default.
- W2076334011 hasConcept C145148216 @default.
- W2076334011 hasConcept C159985019 @default.
- W2076334011 hasConcept C175361016 @default.
- W2076334011 hasConcept C175708663 @default.
- W2076334011 hasConcept C178790620 @default.
- W2076334011 hasConcept C185592680 @default.
- W2076334011 hasConcept C191897082 @default.
- W2076334011 hasConcept C192562407 @default.
- W2076334011 hasConcept C2779227376 @default.
- W2076334011 hasConcept C42360764 @default.
- W2076334011 hasConcept C525849907 @default.
- W2076334011 hasConcept C62520636 @default.
- W2076334011 hasConcept C82706917 @default.
- W2076334011 hasConceptScore W2076334011C100460472 @default.
- W2076334011 hasConceptScore W2076334011C104779481 @default.
- W2076334011 hasConceptScore W2076334011C107187091 @default.
- W2076334011 hasConceptScore W2076334011C107872376 @default.
- W2076334011 hasConceptScore W2076334011C113196181 @default.
- W2076334011 hasConceptScore W2076334011C121332964 @default.
- W2076334011 hasConceptScore W2076334011C127413603 @default.
- W2076334011 hasConceptScore W2076334011C134406635 @default.
- W2076334011 hasConceptScore W2076334011C140205800 @default.
- W2076334011 hasConceptScore W2076334011C145148216 @default.
- W2076334011 hasConceptScore W2076334011C159985019 @default.
- W2076334011 hasConceptScore W2076334011C175361016 @default.
- W2076334011 hasConceptScore W2076334011C175708663 @default.
- W2076334011 hasConceptScore W2076334011C178790620 @default.
- W2076334011 hasConceptScore W2076334011C185592680 @default.
- W2076334011 hasConceptScore W2076334011C191897082 @default.
- W2076334011 hasConceptScore W2076334011C192562407 @default.
- W2076334011 hasConceptScore W2076334011C2779227376 @default.
- W2076334011 hasConceptScore W2076334011C42360764 @default.
- W2076334011 hasConceptScore W2076334011C525849907 @default.
- W2076334011 hasConceptScore W2076334011C62520636 @default.
- W2076334011 hasConceptScore W2076334011C82706917 @default.
- W2076334011 hasIssue "3" @default.
- W2076334011 hasLocation W20763340111 @default.
- W2076334011 hasOpenAccess W2076334011 @default.
- W2076334011 hasPrimaryLocation W20763340111 @default.
- W2076334011 hasRelatedWork W1630723792 @default.
- W2076334011 hasRelatedWork W1971499333 @default.
- W2076334011 hasRelatedWork W1987680690 @default.
- W2076334011 hasRelatedWork W1992919011 @default.
- W2076334011 hasRelatedWork W2010478243 @default.
- W2076334011 hasRelatedWork W2017246694 @default.
- W2076334011 hasRelatedWork W2032552246 @default.
- W2076334011 hasRelatedWork W2039888619 @default.
- W2076334011 hasRelatedWork W2079137774 @default.
- W2076334011 hasRelatedWork W2708860359 @default.
- W2076334011 hasVolume "15" @default.
- W2076334011 isParatext "false" @default.
- W2076334011 isRetracted "false" @default.
- W2076334011 magId "2076334011" @default.
- W2076334011 workType "article" @default.