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- W2076336723 abstract "Excimer laser pulses (λ=248or193 nm) induce transient and permanent defects in optical glasses of high UV transparency. Such defects are causing additional absorption and changes of density and refractive index, respectively (compaction). The interaction of each laser pulse with different OH-rich fused silica samples was investigated by real time measurements of laser-induced fluorescence (LIF) and of Raman spectra excited by the 248 nm KrF-excimer laser. The irradiation of the glasses with energy densities of about 10 mJ/cm2 and more induces E′ and NBOH defects simultaneously. The laser-induced fluorescence of NBOH defect centres at 650 nm characterises the kinetics of defect generation and relaxation. The primary absorption process is the two-photon absorption of KrF laser pulses. The relaxation of defects in the time interval between the laser pulses is mainly influenced by diffusion limited processes. Locally resolved LIF and Raman spectra allow the investigation of homogeneity and laser damage stability in large area substrates (e.g. for mask blanks). Raman spectra excited by KrF laser pulses are measured to detect precursors and intermediates of laser-induced defects and molecular hydrogen in the glass matrix. The detection limit of H2 molecules is in the range of 1017 cm−3. A correlation between LIF intensities and H2 concentrations is found." @default.
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- W2076336723 date "2000-05-01" @default.
- W2076336723 modified "2023-09-27" @default.
- W2076336723 title "In situ diagnostics of pulse laser-induced defects in DUV transparent fused silica glasses" @default.
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