Matches in SemOpenAlex for { <https://semopenalex.org/work/W2076371092> ?p ?o ?g. }
- W2076371092 endingPage "89" @default.
- W2076371092 startingPage "83" @default.
- W2076371092 abstract "InGaAs channel FinFETs with self-aligned molybdenum (Mo) contacts was demonstrated using a gate-last process. By realizing Mo contacts on in situ doped n++ InGaAs source and drain and self-aligned to channel, the FinFETs achieved series resistance of ∼250 Ω μm, which is the lowest value reported-to-date for InGaAs non-planar n-MOSFETs. A FinFET with channel length of 500 nm and equivalent oxide thickness (EOT) of 3 nm has an on-state/off-state current ratio of ∼105 and peak extrinsic transconductance of 255 μS/μm at drain voltage of 0.5 V. To further reduce EOT, atomic-layer-deposited HfO2/Al2O3 high-k dielectric was integrated in InGaAs FinFETs. Good interface quality and small EOT of ∼1 nm were achieved. Forming gas annealing (FGA) was used for drive current enhancement. A 300 °C 30 min FGA leads to ∼48% increase in drive current as well as significant reduction of subthreshold swing, probably due to an improvement of the HfO2/Al2O3/InGaAs interface quality." @default.
- W2076371092 created "2016-06-24" @default.
- W2076371092 creator A5014399843 @default.
- W2076371092 creator A5025542675 @default.
- W2076371092 creator A5034868438 @default.
- W2076371092 creator A5038375764 @default.
- W2076371092 creator A5082567662 @default.
- W2076371092 date "2013-06-01" @default.
- W2076371092 modified "2023-10-04" @default.
- W2076371092 title "In0.53Ga0.47As FinFETs with self-aligned molybdenum contacts and HfO2/Al2O3 gate dielectric" @default.
- W2076371092 cites W148255965 @default.
- W2076371092 cites W1624907158 @default.
- W2076371092 cites W1652463614 @default.
- W2076371092 cites W1956471281 @default.
- W2076371092 cites W1965567994 @default.
- W2076371092 cites W1976868005 @default.
- W2076371092 cites W1988454505 @default.
- W2076371092 cites W1992731671 @default.
- W2076371092 cites W2001885877 @default.
- W2076371092 cites W2030380452 @default.
- W2076371092 cites W2034434740 @default.
- W2076371092 cites W2063963742 @default.
- W2076371092 cites W2067557061 @default.
- W2076371092 cites W2076631689 @default.
- W2076371092 cites W2086510144 @default.
- W2076371092 cites W2090571446 @default.
- W2076371092 cites W2096493920 @default.
- W2076371092 cites W2099090402 @default.
- W2076371092 cites W2105245648 @default.
- W2076371092 cites W2121773140 @default.
- W2076371092 cites W2134853715 @default.
- W2076371092 cites W2404841824 @default.
- W2076371092 cites W4244093052 @default.
- W2076371092 doi "https://doi.org/10.1016/j.sse.2013.02.009" @default.
- W2076371092 hasPublicationYear "2013" @default.
- W2076371092 type Work @default.
- W2076371092 sameAs 2076371092 @default.
- W2076371092 citedByCount "7" @default.
- W2076371092 countsByYear W20763710922014 @default.
- W2076371092 countsByYear W20763710922015 @default.
- W2076371092 countsByYear W20763710922016 @default.
- W2076371092 countsByYear W20763710922017 @default.
- W2076371092 countsByYear W20763710922019 @default.
- W2076371092 countsByYear W20763710922020 @default.
- W2076371092 crossrefType "journal-article" @default.
- W2076371092 hasAuthorship W2076371092A5014399843 @default.
- W2076371092 hasAuthorship W2076371092A5025542675 @default.
- W2076371092 hasAuthorship W2076371092A5034868438 @default.
- W2076371092 hasAuthorship W2076371092A5038375764 @default.
- W2076371092 hasAuthorship W2076371092A5082567662 @default.
- W2076371092 hasConcept C119599485 @default.
- W2076371092 hasConcept C127413603 @default.
- W2076371092 hasConcept C133386390 @default.
- W2076371092 hasConcept C14485415 @default.
- W2076371092 hasConcept C16317505 @default.
- W2076371092 hasConcept C165801399 @default.
- W2076371092 hasConcept C166972891 @default.
- W2076371092 hasConcept C172385210 @default.
- W2076371092 hasConcept C191897082 @default.
- W2076371092 hasConcept C192562407 @default.
- W2076371092 hasConcept C195370968 @default.
- W2076371092 hasConcept C2361726 @default.
- W2076371092 hasConcept C2777855556 @default.
- W2076371092 hasConcept C2779283907 @default.
- W2076371092 hasConcept C2779769603 @default.
- W2076371092 hasConcept C2982823382 @default.
- W2076371092 hasConcept C36003996 @default.
- W2076371092 hasConcept C49040817 @default.
- W2076371092 hasConcept C510052550 @default.
- W2076371092 hasConcept C52780932 @default.
- W2076371092 hasConcept C549387045 @default.
- W2076371092 hasConceptScore W2076371092C119599485 @default.
- W2076371092 hasConceptScore W2076371092C127413603 @default.
- W2076371092 hasConceptScore W2076371092C133386390 @default.
- W2076371092 hasConceptScore W2076371092C14485415 @default.
- W2076371092 hasConceptScore W2076371092C16317505 @default.
- W2076371092 hasConceptScore W2076371092C165801399 @default.
- W2076371092 hasConceptScore W2076371092C166972891 @default.
- W2076371092 hasConceptScore W2076371092C172385210 @default.
- W2076371092 hasConceptScore W2076371092C191897082 @default.
- W2076371092 hasConceptScore W2076371092C192562407 @default.
- W2076371092 hasConceptScore W2076371092C195370968 @default.
- W2076371092 hasConceptScore W2076371092C2361726 @default.
- W2076371092 hasConceptScore W2076371092C2777855556 @default.
- W2076371092 hasConceptScore W2076371092C2779283907 @default.
- W2076371092 hasConceptScore W2076371092C2779769603 @default.
- W2076371092 hasConceptScore W2076371092C2982823382 @default.
- W2076371092 hasConceptScore W2076371092C36003996 @default.
- W2076371092 hasConceptScore W2076371092C49040817 @default.
- W2076371092 hasConceptScore W2076371092C510052550 @default.
- W2076371092 hasConceptScore W2076371092C52780932 @default.
- W2076371092 hasConceptScore W2076371092C549387045 @default.
- W2076371092 hasLocation W20763710921 @default.
- W2076371092 hasOpenAccess W2076371092 @default.
- W2076371092 hasPrimaryLocation W20763710921 @default.
- W2076371092 hasRelatedWork W1979689056 @default.
- W2076371092 hasRelatedWork W2076371092 @default.
- W2076371092 hasRelatedWork W2112366909 @default.