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- W2076376572 endingPage "2713" @default.
- W2076376572 startingPage "2710" @default.
- W2076376572 abstract "We report on the use of a carbon-rich Pt-based material, obtained by electron and ion beam assisted deposition from metal-organic precursor, as a mask for pattern transfer processes. Thin and narrow mask patterns subjected to oxygen plasma and reactive ion etching (RIE) of silicon in SF6 were investigated by atomic force microscopy and energy dispersive X-ray analysis. As for the masks obtained by electron beam assisted deposition, both the pattern and the surrounding halo were found to be etched in oxygen plasma. In contrast, the pattern deposited by assist of ion beam was basically unaffected, likely due to implanted Ga^+ ions during deposition, while the surrounding halo was found to be appreciably thinned. Masks having thickness as low as few nanometers sustained successfully a 200nm RIE step, producing structures with sub-100nm size. Mask stripping was achieved in Piranha bath." @default.
- W2076376572 created "2016-06-24" @default.
- W2076376572 creator A5009568297 @default.
- W2076376572 creator A5035270119 @default.
- W2076376572 creator A5066334907 @default.
- W2076376572 date "2011-08-01" @default.
- W2076376572 modified "2023-10-16" @default.
- W2076376572 title "Ion and electron beam deposited masks for pattern transfer by reactive ion etching" @default.
- W2076376572 cites W1968280812 @default.
- W2076376572 cites W1968634812 @default.
- W2076376572 cites W2015443726 @default.
- W2076376572 cites W2029749677 @default.
- W2076376572 cites W2113236375 @default.
- W2076376572 doi "https://doi.org/10.1016/j.mee.2011.02.053" @default.
- W2076376572 hasPublicationYear "2011" @default.
- W2076376572 type Work @default.
- W2076376572 sameAs 2076376572 @default.
- W2076376572 citedByCount "6" @default.
- W2076376572 countsByYear W20763765722012 @default.
- W2076376572 countsByYear W20763765722015 @default.
- W2076376572 countsByYear W20763765722018 @default.
- W2076376572 countsByYear W20763765722019 @default.
- W2076376572 crossrefType "journal-article" @default.
- W2076376572 hasAuthorship W2076376572A5009568297 @default.
- W2076376572 hasAuthorship W2076376572A5035270119 @default.
- W2076376572 hasAuthorship W2076376572A5066334907 @default.
- W2076376572 hasConcept C100460472 @default.
- W2076376572 hasConcept C121332964 @default.
- W2076376572 hasConcept C123669783 @default.
- W2076376572 hasConcept C130472188 @default.
- W2076376572 hasConcept C145148216 @default.
- W2076376572 hasConcept C147120987 @default.
- W2076376572 hasConcept C171250308 @default.
- W2076376572 hasConcept C178790620 @default.
- W2076376572 hasConcept C185544564 @default.
- W2076376572 hasConcept C185592680 @default.
- W2076376572 hasConcept C192562407 @default.
- W2076376572 hasConcept C2779227376 @default.
- W2076376572 hasConcept C50774322 @default.
- W2076376572 hasConcept C75473681 @default.
- W2076376572 hasConcept C93106096 @default.
- W2076376572 hasConcept C95312477 @default.
- W2076376572 hasConceptScore W2076376572C100460472 @default.
- W2076376572 hasConceptScore W2076376572C121332964 @default.
- W2076376572 hasConceptScore W2076376572C123669783 @default.
- W2076376572 hasConceptScore W2076376572C130472188 @default.
- W2076376572 hasConceptScore W2076376572C145148216 @default.
- W2076376572 hasConceptScore W2076376572C147120987 @default.
- W2076376572 hasConceptScore W2076376572C171250308 @default.
- W2076376572 hasConceptScore W2076376572C178790620 @default.
- W2076376572 hasConceptScore W2076376572C185544564 @default.
- W2076376572 hasConceptScore W2076376572C185592680 @default.
- W2076376572 hasConceptScore W2076376572C192562407 @default.
- W2076376572 hasConceptScore W2076376572C2779227376 @default.
- W2076376572 hasConceptScore W2076376572C50774322 @default.
- W2076376572 hasConceptScore W2076376572C75473681 @default.
- W2076376572 hasConceptScore W2076376572C93106096 @default.
- W2076376572 hasConceptScore W2076376572C95312477 @default.
- W2076376572 hasIssue "8" @default.
- W2076376572 hasLocation W20763765721 @default.
- W2076376572 hasOpenAccess W2076376572 @default.
- W2076376572 hasPrimaryLocation W20763765721 @default.
- W2076376572 hasRelatedWork W1971546258 @default.
- W2076376572 hasRelatedWork W1984892874 @default.
- W2076376572 hasRelatedWork W2015495124 @default.
- W2076376572 hasRelatedWork W2027420890 @default.
- W2076376572 hasRelatedWork W2044931314 @default.
- W2076376572 hasRelatedWork W2131444697 @default.
- W2076376572 hasRelatedWork W2199570605 @default.
- W2076376572 hasRelatedWork W2952980876 @default.
- W2076376572 hasRelatedWork W3096726776 @default.
- W2076376572 hasRelatedWork W84168953 @default.
- W2076376572 hasVolume "88" @default.
- W2076376572 isParatext "false" @default.
- W2076376572 isRetracted "false" @default.
- W2076376572 magId "2076376572" @default.
- W2076376572 workType "article" @default.